EBARA ESA70W Instruction Manual page 82

Multi-stage dry vacuum pump
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(69)
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the ALARM signal still remains, the ALARM display will appear
again even after you have reset.
During REMOTE operation carry out the above procedures after you have turned
off the external start signal. When the external start signal remains on in the
ALTERNATE mode, the pump will start immediately when the RESET signal is
applied.
EBARA
Corporation

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