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EBARA ESA70W Instruction Manual page 35

Multi-stage dry vacuum pump
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(22)
Input
Signal
Output
Signal
Table 4.7 CN-Z & CN-Y Signal Contacts
Pump side Circuit
12VDC
1kΩ
Pump side Circuit
100mA Max.
Open Collector
ＥＭＯ
100mA Max.
Dry Contact
Customer's connection
10mA　Min.
Open Collector
Customer's connection
4VDC-27VDC
4VDC-27VDC
EBARA
Dry Contact
Corporation
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