EBARA ESA70W Instruction Manual page 34

13
Fig. 4.6 25 Pin D Sub-Miniature Female Receptacle
Table 4.6 Control Connector Pin Assignment(CN-Y)
Pin No. Signal name
1 RESET (+)
2 RESERVED (+)
3 RESERVED (+)
4 RESERVED (+)
5 RESERVED (+)
6 EMO STATUS (+)
7 PUMP N2 WARNING STATUS (+)
8 RESERVED (+)
9 RESERVED (+)
10 BACK PRESSURE HIGH WARNING STATUS (+) *1
11 RESERVED (+)
12 RESERVED (+)
13
14 RESET (−)
15 RESERVED (−)
16 RESERVED (−)
17 RESERVED (−)
18 RESERVED (−)
19 EMO STATUS (−)
20 PUMP N2 WARNING STATUS (−)
21 RESERVED (−)
22 RESERVED (−)
23 BACK PRESSURE HIGH WARNING STATUS (−) *1
24 RESERVED (−)
25 RESERVED (−)
*1 As optional
*2 It can change to "Abnormality：OPEN, Alternate" by DIP SW. setting.
25
(As seen from connecting side)
Screw lock size : M2.6
1
14
Contact pin surface : Au
I/O
IN
IN
IN
IN
IN
OUT
OUT
OUT
IN
OUT
OUT
OUT
(21)
Signal type
RESET:CLOSE
Abnormality : OPEN,Alternate
Abnormality : CLOSE,Alternate*2
Abnormality : CLOSE,Alternate*2
EBARA
Corporation