EBARA ESA70W Instruction Manual page 22

(9)
Performance Curve (Model ESA70W)
at 50Hz
10000
1000
100
10
1
0.1 1 10 100 1000 10000 100000
Inlet Pressure (Pa)
at 60Hz
10000
1000
100
10
1
0.1 1 10 100 1000 10000 100000
Inlet Pressure (Pa)
EBARA
Corporation