EBARA ESA70W Instruction Manual page 79

Multi-stage dry vacuum pump
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ALARM: BP MOTOR
TEMP HIGH
ALARM: MP MOTOR
TEMP HIGH
ALARM: BP MOTOR
OVERLOAD 1
ALARM: MP MOTOR
OVERLOAD 1
ALARM: BP MOTOR
OVERLOAD 2
ALARM: BP
MOTOR STEP
OUT
ALARM:
BP DRIVER
###
ALARM: MP MOTOR
NO CURRENT
ALARM:
PHASE ERROR
ALARM:
STARTFAIL
ALARM/WARNING
EXIST
CONTINUOUS
ALARM OCCURRED!!
ALARM: WATER
FLOW LOW
Symptom
BP motor coil temp.
rises.
MP motor coil temp.
rises.
BP motor current rises.
(thermal relay alarm)
MP motor current rises.
(thermal relay alarm)
Booster Pump (BP)
motor overload
Booster Pump (BP)
motor step out
BP Motor driver
protection
MP motor current value
is 0.
Open phase
Negative phase
Start fault
ALARM occurred 5 times
in 10 minutes.
Water flow is
continuous reduced.
Check Item
Cooling water flow is
reduced.
Motor failure
Instrument failure
Pump back press. rises.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
MP performance down
Pump back press. rises.
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
Insufficient ventilation
Cooling water flow rate is
reduced.
Motor driver has broken
down.
Instruments are in failure.
Instrument failure
Incorrect wiring
Starting during
ALARM/WARNING status
Instrument failure
Display is not checked.
Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0
L/min)
Corrective Action
Cool pump thoroughly and
reset.
Replace or overhaul pump.
Replace instrument.
Check exhaust pipe & trap.
Replace or overhaul pump.
Replace instrument.
Check exhaust pipe &
silencer.
Replace or overhaul pump.
Replace instrument.
Replace or overhaul pump.
Replace instrument.
Ventilate sufficiently.
Cool pump thoroughly and
reset.
Replace motor driver.
Replace instruments.
Replace instrument.
Check power supply
Make sure that all starting
conditions are met.
Replace instrument.
Cut ELB and restart the
pump.
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
EBARA
Corporation

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