EBARA ESA500W Instruction Manual page 42

ALARM name
MP casing temp high
BP motor temp h. high
MP motor temp h. high
Water leakage
BP motor overload
MP motor overload
MP no current
Back press high
Phase error
BP driver OC
BP driver OV
BP driver OH1
BP driver OH2
BP driver CPF
BP driver UV
BP driver DRE
BP motor overload 2
BP motor step out
Emergency off
Water flow low
Ext. interlock
IO comm. error
BP comm. error
BP current high
Other error name
Watch dog timer error
Continuous alarm occurred!!
Momentary power failure running (＊)
Momentary power failure stop (＊)
Start fail alarm/warn exist
"＊" no displayed.
PM10U
Table 6.2 Alarm code list
Code
1st 2nd
code code
50 01
51 00
52 00
(▲) 53 00
54 00
55 00
60 00
(▲) 63 00
64 00
01
02
04
66 05
06
07
09
67 00
69 00
71 00
73 90
(▲) 74 00
01
81
02
03
Code
1st 2nd
code code
47 00
48 00
01
49
02
WARNING name
Water flow low
MP casing temp high
Pump box temp high
Pump N2 flow low
Back press high
Back press wire broke
BP motor temp high
MP motor temp high
BP driver temp high case
BP driver temp high inner
BP comm. error
IO comm. error
Current IO comm. eroor
BP current high
"▲" indicates that the item is optional.
P.29
Code
1st 2nd
code code
00 01
05 01
13 00
18 01
(▲) 01
21
(▲) 02
23 00
24 00
02
25
04
02
26
03
07
31 14
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