Control Signal Wiring - EBARA ESA500W Instruction Manual

4.3.3 Control Signal Wiring

Connect wires to the control connector for remote operation and remote monitoring. Tables
4.4 , 4.5 , 4.6 and 4.7 and Figs. 4.6 and 4.7 show the pin assignment.
Connector No.
Pin. No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
PM10U
Table 4.4 Receptacle Specification
15 pin D sub-miniature Female receptacle
CN-Z
CN-Y 25 pin D sub-miniature Female receptacle
8
15
Fig. 4.5 15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.5 Control Connector Pin Assignment(CN-Z)
Signal name
MP START (+)
BP START (+)
MP START STATUS (+)
BP START STATUS (+)
WARNING STATUS (+)
ALARM STATUS (+)
REMOTE STATUS (+)
−
MP START (−)
BP START (−)
MP START STATUS (−)
BP START STATUS (−)
WARNING STATUS (−)
ALARM STATUS (−)
REMOTE STATUS (−)
Connector type
(Applicable for SEMI E73-0299)
Screw lock size : M2.6
1
Contact pin surface : Au
9
I/O
IN
IN
OUT
OUT
OUT
OUT
OUT
Signal type
Run：CLOSE, Alternate
Run：CLOSE, Alternate
Run：CLOSE, Alternate
Run：CLOSE, Alternate
WARNING：OPEN, Alternate
ALARM：OPEN, Alternate
REMOTE：CLOSE
EBARA
CORPORATION
P.21