EBARA ESA500W Instruction Manual page 41

P.28
BP: ##.# A
MP: ##.# A
▽ △
ALARM：MP MOTOR
TEMP．H.HIGH
▽ △
CONTROL：LOCAL
MODE：NORMAL
▽ △
PUMP RUNNING
HISTORY?
▽ △
ALARM/WARNING
HISTORY？
▽ △
UNIT NO
&&&&&&&&
▽ △
PUMP TYPE ### V
ESA###
▽ △
OPE．TIME
#### h
▽ △
BACK PRESSURE
##．# kPa
▽ △
PUMP N2 FLOW
##．# Pam3/s
▽ △
WATER FLOW
##．# L/min
▽ △
PUMP CASING
### °C
▽ △
BP SPEED
# ．# k min-1
Fig. 6.2 Key operation for the pump operation status display screen
PM10U
Current
Alarm / Warning display
Control mode: LOCAL, REMOTE, COM
Pump operational mode: NORMAL, LOW SPEED
Pump running history
PRG.
ALARM：CASING
ENTER
TEMP．HIGH
Alarm history
▽ △
PRG.
WARNING：BP MOTOR
TEMP．HIGH
Pump unit No.
Voltage Class
PUMP Model
Total operation time
Back pressure (option)
How to read the alarm history
Pump N2 gas flow
History No.
(The lower number is newer.)
Cooling water flow
Pump casing temperature
Motor speed
001 06
ENTER
020901 12：23：21
Displayed during ENTER key pushed
002 51
ENTER
020901 12：25：26
Displayed during ENTER key pushed
Alarm 1st code
002 51
020901 12 : 25 : 26
Occurrence date
See Table 6.2 for the alarm codes.
00 ####
00 ####
Alarm 2nd code
Analog value
00 ####
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