Operation Status Control; The Way Of Pump Moving; Preparation - EBARA ESA500W Instruction Manual

when the upper mechanical safety limit is reached during pump operation.
When an ALARM output is suddenly generated, while the plant unit is
operational, a WARNING signal will be generated to ensure that the plant
operation is not discontinued. This enables the operator to check the pump after
the equivalent of one cycle has been completed.
Be sure to contact EBARA Corporation for details on checking the WARNING
and ALARM setting conditions.
• Note that the warning indications of the Model ESA500W dry pump are
different from the conventional pumps like as UERR, A, AA, AAS series,
based on SEMI standard E73.

3.2.2 Operation Status Control

The sensor data are displayed on the LCD display provided on the controller to
facilitate operation status control and daily inspection.
All WARNING and ALARM signals are displayed on the LCD display. For remote
operation and monitoring, the signals are available as individual and group
outputs.

3.3 The way of pump moving

3.3.1 Preparation

Before pump moving, all adjuster feet shall be raised fully at four places.
In case of being not raised fully, pump may be tripped over by obstacle on floor.
PM10U
Alarm 1
(Pump operation continued)
Alarm 2
(Pump stop)
UERR,A,AA, Model
and AAS
ESA500W
ALARM WARNING
TRIP ALARM
fully
raised
Adjuster
Caster
P.5
EBARA
CORPORATION