Table Of Contents - EBARA ESA500W Instruction Manual

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Environmental Basic Policies............................................................................... i
Safety Information............................................................................................... ii
Important Prior Warnings ....................................................................................iii
Standard Limited Warranty ................................................................................ ix
Contents ............................................................................................................. x
1. Foreword......................................................................................................... 1
2. Introduction ..................................................................................................... 1
2.1 Introduction............................................................................................... 1
2.2 Environmental Concerns .......................................................................... 2
3. Product Description ........................................................................................ 3
3.1 Outline ...................................................................................................... 3
3.1.1 Pump Module ........................................................................................ 3
3.1.2 N2 Gas ..............................................................................................3
3.1.3 Cooling Water....................................................................................4
3.1.4 Exhaust .............................................................................................4
3.2 Control System ......................................................................................... 4
3.2.1 Warning .............................................................................................4
3.2.2 Operation Status Control ...................................................................5
3.3 The way of pump moving.......................................................................... 5
3.3.1 Preparation........................................................................................5
3.3.2 Moving method..................................................................................6
3.4 Detailed Specifications ............................................................................. 7
4. Installation..................................................................................................... 11
4.1 Movement and Fixation .......................................................................... 11
4.1.1 Location...........................................................................................11
4.1.2 Caster and adjustment foot .............................................................11
4.2 Piping...................................................................................................... 13
4.2.1 Vacuum and Exhaust Piping ........................................................... 13
4.2.2 Cooling Water Piping....................................................................... 14
4.2.3 N2 Gas Piping ................................................................................. 16
4.2.4 Ventilation Duct ............................................................................... 16
4.3 Electrical Wiring...................................................................................... 18
4.3.1 Grounding........................................................................................19
4.3.2 Power Supply Wiring ....................................................................... 20
4.3.3 Control Signal Wiring....................................................................... 21
5. Power Supply for accessories....................................................................... 24
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