Setting The Operational Mode - EBARA ESA500W Instruction Manual

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6.3 Setting the operational mode

This section describes how to set the operational mode. In the normal state, the
LCD controller displays pump status. To display the operational mode setting
screen, press the key "PRG." for three seconds or longer. Pressing the key for
one second or longer again returns to the pump status display screen. Table 6.3
below shows indications and the details of the operational mode setting.
Item
Setting the pump operation
control mode
Setting the DIP switch
Setting the pump running
mode
Setting the rotational speed
in the NOMAL mode
Setting the rotational speed
in the LOW SPEED mode
Setting the pump N2
warning
Setting the WARNING value
for the back pressure
(option)
Keys work as below for the setting screen.
START
STOP
RESET
BZ.OFF
△
▽
ENTER
See Fig. 6.3 for how to set the operational modes.
PM10U
Table 6.3 Operational
Indication
SET
CONTROL MODE?
SET
DIP SW?
SET
RUNNING MODE?
SET BP
NOMAL SPEED?
SET BP
LOW SPEED?
SET POINT
N2 FLOW LOW?
SET POINT
BACK PRESSURE?
: Valid
: Stops the pump.
: Resets WARNING and /or ALARM.
: Switches the DIP switch No.
: Sets the DIP switch to ON. Switches the display of the operational
mode setting screen.
: Sets the DIP switch to OFF.
operational mode setting screen.
: Determines the selected setting.
mode setting screen
Switches the control modes:
local ,remote, communication.
Performs the DIP switch settings
(see 6.4).
Switches the running modes:
NORMAL and S. ENERGY.
Sets the pump rotational speed
in the NOMAL mode.
Sets the pump rotational speed
in the LOW SPEED mode.
Sets the WARNING value for
N2 flow
Sets the WARNING value for
the back pressure.
Switches the display of the
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