EBARA EV-A10 Instruction Manual
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EBARA EV-A10 Instruction Manual

Multi-stage dry vacuum pump
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！
Read and understand this INSTRUCTION MANUAL thoroughly before using
this equipment.
Be sure to keep this INSTRUCTION MANUAL on hand for future reference.
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user personal
actually operation this equipment.
PM10U
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL EV-A10
STANDARD MODEL
200-240V (1Phase 50/60Hz)
200-240V (3Phase 50/60Hz)
CAUTION
"MODEL EV-A10"
in this instruction manual is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
EVA_STD_E_Rev.3
EBARA
CORPORATION

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  • Page 1 EVA_STD_E_Rev.3 INSTRUCTION MANUAL MULTI-STAGE DRY VACUUM PUMP MODEL EV-A10 STANDARD MODEL 200-240V (1Phase 50/60Hz) 200-240V (3Phase 50/60Hz) ！ CAUTION Read and understand this INSTRUCTION MANUAL thoroughly before using this equipment. Be sure to keep this INSTRUCTION MANUAL on hand for future reference.
  • Page 2 Do not reproduce or reprint any portion of this manual without permission. Manufacture reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations. MODEL EV-A10 in this instruction manual is our model code. All rights reserved, copyright EBARA Corporation.

  • Page 3: Environmental Basic Policies

    We will widely publicize these basic policies to regional societies and the general public and work to make Ebara’s position on the environment clear to society in general. EBARA...

  • Page 4: Forward

    EBARA MODEL EV-A10 DRY VACUUM PUMP by careful study of this manual. If any questions arise regarding this manual, please direct them to EBARA or your dealer. Your questions will be promptly answered and your suggestion may be considered for incorporation into our future product.

  • Page 5: Limited Warranty

    Warranties Seller warranties each standard Product manufactured and sold by it to be free of defects in materials and workmanship for such period of time and under such conditions as are specified herein or as may be specified by Seller on the face of its Quotation or otherwise reduced to writing and expressly approved by Seller.

  • Page 6: Safety Notice

    (e.g., electrical, stored electrical, thermal). The operator should read through this instruction manual and other documents issued by EBARA in detail. The following symbols are used to highlight important information and instructions that must be followed to prevent personal injury or damage to equipment.
  • Page 7 Precautions necessary for safe use of the EBARA MODEL EV-A10 DRY VACUUM PUMP are detailed in this instruction manual, while important items concerning precautions for handling EBARA MODEL EV-A10 DRY VACUUM PUMP are listed below. ！ ！ ！ ！ DANGER ·...
  • Page 8 The pump cannot start while the measuring instruments are booting after the ＣＰ is placed in the ON position. · The pump will not start when an ALARM has been generated. After you have taken the remedial action, reset the pump. EBARA CORPORATION PM10U...

  • Page 9: Safety Warning Labels

    Heavy Object Can cause impact injury through falling or tipping. Use appropriate, properly rigged lifting equipment and keep from under suspended pump. Raise all adjuster feet fully when moving. 重量物。落下及び転倒により重傷または死亡の危険があります。 吊り上げたポンプの下に入らないで下さい。 移動時は全アジャスタフットを上限まであげて下さい。 C-7110-316-0001 5. Electric charge mark EBARA CORPORATION PM10U...
  • Page 10 P.10 Heavy weight danger Hazardous voltage warning Top View High temperature warning Front View Electric charge mark EBARA CORPORATION PM10U...

  • Page 11: Environmental Concerns

    To dispose the standard consumption parts, follow effective laws and ordinances applicable in the area where the unit is installed. 3) To dispose the unit, follow effective laws and ordinances applicable in the area where the unit is installed. EBARA CORPORATION PM10U...

  • Page 12: Table Of Contents

    3.2.1 Vacuum and Exhaust Piping ............24 3.3 Electrical Wiring ..................25 3.3.1 Power Supply Wiring ..............25 3.3.2 Control Signal Wiring ..............29 3.3.3 Motor Protection Wiring ..............31 4. Operational Panel..................32 4.1 Operational Panel Outline ..............32 4.2 Operation Panel Display ..............35 EBARA CORPORATION PM10U...
  • Page 13 Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG) Appendix 3 : Overhaul / Repair Request form (JPN) Appendix 4 : Overhaul / Repair Request form (ENG) Appendix 5 : Leak Check procedure Information of Global Network EBARA CORPORATION PM10U...

  • Page 14: Acceptance Check

    Humidity 80% or less NOTE Notify EBARA without delay when damage is discovered or when components are missing. Do not use when a leak is present as this will result in accident. NOTE Pump must be placed in an upright position. Do not stack as packing. When the pump was overturned, this will result in accident.

  • Page 15: Product Description

    Be sure to contact EBARA for details on checking the ALARM setting condition. All ALARM signal are displayed on the front panel. For remote operation and monitoring, the signal is...

  • Page 16: The Way Of Pump Moving

    / ditches and pump shall be moved on it by two persons with care. Steel Plate If pump should lose its balance when moving and start tripping over, never try to sustain the pump, get away from the pump immediately. EBARA CORPORATION PM10U...

  • Page 17: Detailed Specifications

    2.4 Detailed Specification The following tables and figures should be consulted for pump specification, dimension and performance details. 2.4.1 Model Description □□ ① ② EV-A10- Position of ② ② ② ② ① ① ① ① Power Supply Remarks Exhaust Specification...

  • Page 18: Specifications

    Ambient Temperature 5 to 40 deg C [note 1] The gas ballast port is equipped with the model “EV-A10-*S”, or chosen option of the model “EV-A10-*U”. [note 2] It is an amount of the maximum processing when the gas ballast is “ON”.

  • Page 19: Outline Drawing

    P.19 2.4.3 Outline Drawing EBARA CORPORATION PM10U...
  • Page 20 P.20 EBARA CORPORATION PM10U...

  • Page 21: Performance Curve

    P.21 2.4.4 Performance Curve EBARA CORPORATION PM10U...

  • Page 22: System Flow

    Valve Power Noise Noise Circuit Protector Filter Filter Control Inverter Connector Main Pump Motor (MP) Cooling Fan Thermal Protector Model EV-A10-*U Gas Ballast Inlet Inlet Power Circuit Noise Protector Filter Control Inverter Connector Outlet Exhaust Silencer Main Pump Motor (MP)

  • Page 23: Installation

    CAUTION The neck portion of the casters will vibrate during caster movement. Be sure to keep your fingers and feet out. ！ ！ ！ ！ CAUTION Do not step on the pump or place objects on it. EBARA CORPORATION PM10U...

  • Page 24: Piping

    The pump casing, inlet piping and exhaust piping become extremely hot during operation and for some time after stopping. Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances. Do not remove the pump cover during operation. EBARA CORPORATION PM10U...

  • Page 25: Electrical Wiring

    Power Supply Wiring ！ ！ ！ ！ WARNING The pump must be connected to electrical supply with a suitable circuit breaker. (lockout / tagout CB). ！ ！ ！ ！ WARNING Be sure to connect the grounding wire. EBARA CORPORATION PM10U...
  • Page 26 Use the power cable with ground. Insert the power cable in the gounding power outlet. ！ ！ ！ ！ WARNING Do not use the power cable adapter. Fig. 3.1 shows details of the front panel of model EV-A10-2*. Terminal block : for thermal protector Power connector...
  • Page 27 Use the power cable which suits “IEC 60320-C19”. Transit overvoltage on power supply : Instrallation category 2 of “IEC 60364-4-443”. B : For model EV-A10-3* (3Phase 200V) Fig. 3.2 shows details of the front panel of model EV-A10-3*. Terminal block : for thermal protector...
  • Page 28 Power Supply Receptacle (As seen from connecting side) Table 3.2 Receptacle and Plug Specifications Receptacle type C016 20C003 100 12 Recep. Manufacture Amphenol Adapted plug type C016 20D003 100 12 Suitable wire AWG #14 Power capacity [kVA] EBARA CORPORATION PM10U...

  • Page 29: Control Signal Wiring

    ALARM : OPEN PUMP RUN (-) [note 2] ALARM RESET (-) [note 2] PUMP RUN/STOP STATUS (-) ALARM STATUS (-) [note 1] RESET needs continuing signal over 5msec. [note 2] 9 and 10 pins are short-circuited by internal wiring. EBARA CORPORATION PM10U...
  • Page 30 24V DC 8 mA 8 mA Open collector Dry contact Pump side circuit Customer’s connection AC250V 10mA - 1A DC30V 10mA - 1A Min. Load: DC5V, 10mA 【ALARM】 DC 5-48 V 50 mA or less 【RUN/STOP】 Open collector EBARA CORPORATION PM10U...

  • Page 31: Motor Protection Wiring

    * The max. outside diameter of the terminal must use the one of less than φ6.7 mm. Pump side circuit Contact capacity : AC250V, 3A Minimum load : DC5-24V 5-10mA Fig. 3.5 Contact Conditions of Thermal Protector EBARA CORPORATION PM10U...

  • Page 32: Operational Panel

    P.32 4. Operational Panel 4.1 Operation Panel Outline LO/RE LED LED Lamps Data screen RUN LED Push button switches Connector only for maintenance Fig. 4.1 Operation Panel EBARA CORPORATION PM10U...
  • Page 33 Do not open the connector cover. The connector is only for maintenance. Do not connect another equipment with cable; such as LAN cable that has been on the market. The connection may cause failure of the equipment or the pump. EBARA CORPORATION PM10U...
  • Page 34 P.34 Table 4.1 shows seven-segment display character representations. Table 4.1 Seven-segment Display Character Representations Text Display Text Display Text Display Text Display none none EBARA CORPORATION PM10U...

  • Page 35: Operation Panel Display

    , or the inverter settings might be changed. Push button several times to come back to status screen, if the screen shows information other than above. If the setting is changed, the pump specification or control system can’t be guaranteed. EBARA CORPORATION PM10U...
  • Page 36 ” display on the data screen are blinking for OV retry process. [note 2] Under-Voltage (UV) condition is kept for less than 1sec, the inverter condition is returned to before UV ALARM occurred. ALM lamp and “ ” display on the data screen are blinking for UV condition. EBARA CORPORATION PM10U...

  • Page 37: Operation

    (4) When the pump exhaust pipe is equipped with a valve, open this valve before starting the pump. ！ ！ ！ ！ CATION Problems with occur when the pump is operated with the valve closed as the exhaust pipe will be pressurized. EBARA CORPORATION PM10U...

  • Page 38: Start / Stop

    Execute the safety preparations against sudden start the pump. ！ ！ ！ ！ CATION If the pump does not start smoothly, the exhaust gas may be backstreaming from the outlet port. Please check the system condition and retry the start process. EBARA CORPORATION PM10U...

  • Page 39: Operation When Momentarily Power Failure Happens

    Then ALM lamp turns on and data screen displays “ ” or “ ”. In the momentarily power failure condition, pump rotor is driven by inertia due to interception of power supply. Thus, pumping performance may be decreased than guaranteed specification. EBARA CORPORATION PM10U...

  • Page 40: Gas Ballast

    P.40 5.4 Gas Ballast [NOTE] The gas ballast port is equipped with the model “EV-A10-*S”, or chosen option of the model “EV-A10-*U”. When introducing a condensable gas, such as water vapor, into the pump, remove the plug of the gas ballast port and operate a pump. (See Fig. 5.2) This pump introduces air or N gas as ballast gas.

  • Page 41: Maintenance And Inspection

    Do not remove the pump cover during operation. ！ ！ ！ ！ WARNING Be sure to check for gas leaks after you have finished pipe maintenance work. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa. EBARA CORPORATION PM10U...

  • Page 42: Lubrication Oil

    The removal direction of a outer cover of a outer cover Outer Cover Outer Cover Remove 14 screws Remove 12 screws (thin arrow) (thin arrow) Model EV-A10-*U Model EV-A10-*S Fig. 6.3 How to remove the outer cover EBARA CORPORATION PM10U...
  • Page 43 Material Safety Data Sheets. (Appendix 1, 2) WARNING ！ ！ ！ ！ When the lubrication oil level exceeds the upper limit, the oil may leak to the pump side. Thus, be sure no to exceed the upper limit line when adding the oil. EBARA CORPORATION PM10U...

  • Page 44: Maintenance Parts List

    Table 6.3 List of wastes during maintenance Part Equipped on Remarks Lubricant oil Inside of pump module Refer to Appendix 1, 2 for Material Safety See section 6.3 Data Sheet O-ring Connection of vacuum line Usual industrial waste EBARA CORPORATION PM10U...

  • Page 45: Repair And Serving

    Overhaul is performed in EBARA. Contact EBARA Sales office or Overhaul service center. The Ebara EV-A10 pump may require periodic overhaul based on the application. Overhauls should only be completed utilizing Ebara factory trained personnel. Please contact Ebara for information on how to return your pump.
  • Page 46 (6) For transportation, secure the pump by lowering the adjustment feet. Place a protective cloth around the pump to avoid shock and position rotective members between the outer cover and the wires in order to distribute the load of the fastening wires. EBARA CORPORATION PM10U...

  • Page 47: Troubleshooting

    Pump overload. Check pump load. Display appears and ALM Inverter overheat. Cool down inverter. lamp lights. Display appears and ALM Pump overload. Check pump load. lamp lights. Parts of the pump are damaged. Replace or overhaul pump. EBARA CORPORATION PM10U...
  • Page 48 Be sure to avoid contact and keep inflammable substances out of reach. Do not remove the outer cover during operation. ！ ！ ！ ！ CAUTION Be sure to check for leaks after you have installed and maintenance the pump. EBARA CORPORATION PM10U...
  • Page 58 Appendix 3 Overhaul/Repair Request (JPN)
  • Page 59 Appendix 4 Overhaul/Repair Request (ENG)
  • Page 61 Appendix 5 Leak Check procedure...
  • Page 62 LIVINGSTONE, WEST LOTHIAN, EH54 9DE, U.K. PHONE:44-1506-460232 URL: FAX:44-1506-460222 http://www.ebara.com.sg/index.php?option=com_frontpage&Itemid=1 CHINA Service Locations: http://www.ebara-pm.eu/about-us/locations.html SHANGHAI EBARA PRECISION MACHINERY CO., LTD. KOREA ZHANGJIANG HIGH-TECHNIC PARK, NO.76 LANE 887, EBARA PRECISION MACHINERY KOREA INC. ZUCHONGZHI ROAD, SHANGHAI, 201203, CHINA PHONE:86-21-5131-7008 HEADQUARTERS FAX:86-21-5131-7048 20FL, KANGNAM BLDG.

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