EBARA ESA500W Instruction Manual page 7

WARNING
WARNING
CAUTION Never operate the pump without pump cover for safety.
PM10U
In designing the dry pumps, Ebara does not assume risks
caused by hazardous chemical reactions resulted from
simultaneous injection or mixture of multiple process gases in
the pumps, and the pump is not equipped with a protection
against the dangers from such pump usage.
suppliers and users must pay attention not to simultaneously
inject or mix those gases.
Do not perform a withstand voltage test. Failure to comply could
result in damage to the sensitive devices.
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The tool
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