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EBARA ESA500W Instruction Manual page 79

Multi-stage dry vacuum pump, 200v/400v, 50hz, 200-220v/400-480v, 60hz

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P.66
Display
ALARM: WATER
FLOW LOW
ALARM: MP CASING
TEMP HIGH
ALARM:BP MOTOR
TEMP H.HIGH
ALARM:MP MOTOR
TEMP H.HIGH
ALARM:BP MOTOR
OVERLOAD
ALARM:MP MOTOR
OVERLOAD
ALARM:BP MOTOR
STEP OUT
ALARM :MP
NO CURRENT
PM10U
Symptom
Water flow is reduced.
Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
MP Pump casing
Insufficient ventilation
temp.
Pump back press. rises.
rises.
Increase of the gas load.
Cooling water flow is
reduced.
Accumulation of
by-products
Booster Pump (BP)
Cooling water flow is
motor coil temp.
reduced.
rises.
Motor failure
Main Pump (MP)
motor coil temp.
rises.
BP motor current
Pump back press. rises.
rises. (thermal relay
trip)
Increase of the gas load.
MP motor current
Rotor makes contact.
rises. (thermal relay
(Accumulation of
trip)
by-products)
(Substance plunge)
Open phase
Instrument failure
Booster Pump (BP)
Pump back press. rises.
motor step out
Increase of the gas load.
Can not restart
Rotor makes contact.
(Accumulation of
by-products)
(Substance plunge)
Instrument failure
MP motor current
Instruments are in failure.
value is 0.
Check Item
Connect coupler.
Apply sufficient
pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
Ventilate sufficiently
Check exhaust pipe &
silencer.
Reduce the inflow gas
amount.
Cool pump thoroughly
and reset.
Replace or overhaul
pump.
Cool pump thoroughly
and reset.
Replace or overhaul
pump.
Check exhaust pipe &
silencer.
Reduce the inflow gas
amount.
Replace or overhaul
pump.
Loss of the phase in
power source
Replace instrument.
Check exhaust pipe.
Reduce the inflow gas
amount.
Replace or overhaul
pump.
Replace instrument.
Replace instruments.
EBARA
Corrective Action
CORPORATION

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