EBARA ESA500W Instruction Manual page 30

Connect the ventilation duct, locating on the top of the pump, to a duct that the
user provides. The user side duct shall have exhaust capability listed in Table
3.1 and shall be independent from the duct connected to the pump exhaust
outlet.
A substance, which is not corroded with used gas, shall be used as the material
of the exhaust duct.
CAUTION For safety, be sure to ventilate through the ventilation duct
CAUTION Even when the pump is used for exhausting process gases
CAUTION Never operate the pump without pump cover for safety.
PM10U
when the pump is used to exhaust toxic, inflammable, and/or
other hazardous gases. Do not combine the ventilation duct
with the pump exhaust piping
that are not toxic and/or inflammable, do not combine the
ventilation duct with the pump exhaust piping. The exhaust
noise of the pump will give rise to acoustic resonance inside
the pump unit and result in an abnormal noise being
generated.
P.17
EBARA
CORPORATION