EBARA ESA500W Instruction Manual page 77

P.64
Display
WARN: WATER
FLOW LOW ##.#
WARN: PUMP N2
FLOW LOW
WARN: MP CASING
TEMP HIGH
WARN: BP MOTOR
TEMP HIGH
WARN: MP MOTOR
TEMP HIGH
WARN: BP DRIVER
TEMP HIGH #####
WARN:
## COMM.ERROR
ALARM: PUMP BOX
TEMP HIGH
WARN:
OIL LEVEL LOW
After you have taken the remedial actions above, reset the pump. If the problem
that has caused the WARNING signal still remains, the WARNING display will
appear again even after you have reset.
PM10U
Symptom
Water flow is reduced. Coupler is disconnected.
Pressure is not sufficient.
Root valve is closed.
Water pipe is clogged.
Tube fittings are loosened.
Instrument failure
Outlet & inlet pipes are
reverse. (flow value 0 L/min)
Pump N2 flow is N2 port is not connected.
reduced.
Primary pressure is
insufficient.
Regulator setting value
LOW.
N2 pipe is clogged.
Leaks on N2 pipe.
Instrument failure
MP Casing Duct ventilation insufficient
temperature rises.
Pump back pressure rises.
Increase of the gas load.
Accumulation of by-product
Cooling water flow is
reduced.
Booster Pump (BP) Cooling water flow is
motor coil temp. reduced.
rises.
Main pump (MP)
motor coil temp.
rises.
Booster Pump (BP) Duct ventilation insufficient
driver temp. rises.
Cooling water flow is
reduced.
Communication is not Connection error of the
established. instrumented units
Instrument failure
Temp. rises in pump Duct ventilation not
cover. sufficient
Cooling water flow is
reduced.
Oil level is low. Check oil level.
(See Fig.8.1)
Check Item
Connect coupler.
Apply sufficient pressure.
Open valve.
Clean or replace piping.
Re-tighten.
Replace instrument.
Connect pipes correctly.
Connect N2 pipe fitting.
Apply sufficient pressure.
Increase pressure setting.
Replace N2 piping.
Check the fittings.
Replace instrument.
Ventilate sufficiently.
Check exhaust pipe
Reduce the inflow gas
amount.
Replace or overhaul pump.
Increase cooling water flow.
Cool pump thoroughly and
reset.
Ventilate sufficiently.
Increase cooling water flow.
Check the connection of the
instrumented unit.
Replace instrument.
Ventilate sufficiently.
Increase cooling water flow.
Charge lubrication oil.
Corrective Action
EBARA
CORPORATION