EBARA ESA500W Instruction Manual page 36

Input
Signal
Output
Signal
PM10U
Table 4.7 CN-Z & CN-Y Signal Contacts
Pump side Circuit
12VDC
1kΩ
Pump side Circuit
100mA Max.
Open Collector
ＥＭＯ 100mA Max.
Dry Contact
Customer's connection
10mA Min.
Open Collector
Customer's connection
4VDC-27VDC
4VDC-27VDC
P.23
Dry Contact
EBARA
CORPORATION