EBARA ESA500W Instruction Manual page 66

(2) After you have waited until the internal pump pressure returns to atmospheric
(normal) pressure, remove the plug from the oil-filler inlet. (See Fig. 8.2)
(3) Check the level through the window of the gauge. Then, add the oil so that
the level is upper limit line (see Fig. 8.2 and 8.3).
(4) After you have checked that there are no depositions and fragments adhering
to the O ring attached to the plug, close the oil-filler inlet.
(5) Fit a waste oil container (PVC bag) to the bottom of the oil drain hole of the
secondary reservoir and remove the drain plug. (See Fig.8.2)
(6) When you have drained off the waste oil close the drain hole after you have
checked that there are no depositions and fragments adhering to the O ring
attached to the plug.
Oil drain hole
Oil filler inlet
Oil level gauge
Oil drain hole
Oil filler inlet
Oil level gauge
Oil drain hole
Fig. 8.2 Oil filler port, oil level gauge, and oil drain port positions
(7) Please check the air leak after supplying lubricant oil.
PM10U
P.53
Oil drain hole
Oil filler inlet
Oil level gauge
Oil filler inlet
Oil level gauge
EBARA
CORPORATION