EBARA ESA500W Instruction Manual page 23

P.10
Circuit Breaker
Power
N2 Gas
Regulator
Water
PM10U
LCD Controller
Control
Connector
Control Circuit
Motor Starter 1
Motor Starter 2
P Pressure Gauge
N2 Gas Flow Sensor
FT1
FT2
Cooling Water Flow Sensor
Fig. 3.2 System Flow
Gas Inlet
Driver
Booster Pump
Motor 2
（ＢＰ）
Main Pump
Motor 1
（ＭＰ）
EBARA
Gas Outlet
Silencer
Check
Valve
CORPORATION