EBARA ESA500W Instruction Manual page 35

P.22
13
25
Pin No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
※1 It can change to "Abnormality：OPEN, Alternate" by DIP SW. setting.
PM10U
1
14
Fig. 4.6 25 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.6 Control Connector Pin Assignment(CN-Y)
Signal name
RESET (+)
LOW SPEED CONTROL
RESERVED (+)
RESERVED (+)
RESERVED (+)
EMO STATUS (+)
PUMP N2 WARNING STATUS (+)
RESERVED (+)
LOW SPEED CONTROL
BACK PRESSURE HIGH WARNING STATUS
RESERVED (+)
RESERVED (+)
−
RESET (−)
SAVING ENERGY CONTROL (−)
RESERVED (−)
RESERVED (−)
RESERVED (−)
EMO STATUS (−)
PUMP N2 WARNING STATUS (−)
RESERVED (−)
LOW SPEED CONTROL
BACK PRESSURE HIGH WARNING STATUS
RESERVED (−)
RESERVED (−)
Screw lock size : M2.6
Contact pin surface : Au
I/O Signal type
IN
(+) IN
IN
IN
IN
OUT
OUT
Abnormality：CLOSE, Alternate ※1
OUT
(+) OUT
(+) OUT
Abnormality：CLOSE, Alternate ※1
OUT
OUT
(−)
(−)
RESET：CLOSE
LOW SPEED：CLOSE, Alternate
Abnormality：OPEN, Alternate
LOW SPEED：CLOSE, Alternate
EBARA
CORPORATION