EBARA EV-SA20 Instruction Manual
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EBARA EV-SA20 Instruction Manual

Multi-stage dry vacuum pump
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  • Page 1 Noise reduction enclosure (-15 dB(A) soundproofing performance) for the EBARA EV-SA20 & EV-SA30. Click here !
  • Page 2 BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE REFERENCE. To Facility and Tool Manufactures: Be sure to distribute this INSTRUCTION MANUAL to all end-user personal actually operation this equipment. “Model EV-SA20” in this INSTRUCTION MANUAL is EBARA model code. ISSUED BY PRECISION MACHINERY COMPANY EBARA CORPORATION...
  • Page 3 Do not reproduce or reprint any portion of this manual without permission. Manufacture reserves the right to discontinue or change any specifications or designs with out notice and without incurring obligations. MODEL EV-SA20 in this instruction manual is our model code. All rights reserved, copyright EBARA Corporation. EBARA...

  • Page 4: Environmental Basic Policies

    We will widely publicize these basic policies to regional societies and the general public and work to make Ebara’s position on the environment clear to society in general. EBARA...

  • Page 5: Foreword

    EBARA MODEL EV-SA20 DRY VACUUM PUMP by careful study of this manual. If any questions arise regarding this manual, please direct them to EBARA or your dealer. Your questions will be promptly answered and your suggestion may be considered for incorporation into our future product.

  • Page 6: Limited Warranty

    2) If the trouble is caused by operating in the manner not described in the instruction manuals or using under special condition. 3) If the trouble is caused by repair or remodeling of the pump by other than EBARA or authorization suppliers by EBARA.

  • Page 7: Safety Notice

    NOTE : is used to call attention or to emphasize essential information. The following symbols may appear on the model EV-SA20 dry vacuum pump. : DANGER - Heavy Object : WARNING - Hot Surfaces : WARNING - Hazardous Voltage...
  • Page 8 Precautions necessary for safe use of the EBARA MODEL EV-SA20 DRY VACUUM PUMP are detailed in this instruction manual, while important items concerning precautions for handling EBARA MODEL EV-SA20 DRY VACUUM PUMP are listed below. DANGER · Keep out from under the pump when it is elevated. Only qualified personnel shall unload and lift the pump.
  • Page 9 The pump cannot start while the measuring instruments are booting after the ＣＰ is placed in the ON position. · The pump will not start when an ALARM has been generated. After you have taken the remedial action, reset the pump. EBARA CORPORATION PM10U...

  • Page 10: Safety Warning Labels

    Hazardous voltage may shock, burn, or cause death. Turn power off and lockout before servicing. 3. High temperature warning Hot surface may burn or cause injury. Allow the piping and casing to cool before servicing. 4. Electric charge mark EBARA CORPORATION PM10U...
  • Page 11 P.10 Heavy weight danger Hazardous voltage warning Top View High temperature warning Front View Electric charge mark EBARA CORPORATION PM10U...

  • Page 12: Safety Interlocks

    Motor thermostat protect the pump motor from overheating due to extended current draws in excess of the motor rating. Under a persistent overload condition, motor thermostat opens a contact, which interrupts the motor run circuit. A brief cool down interval permits restarting the pump. EBARA CORPORATION PM10U...

  • Page 13: Ec Declaration Of Conformity

    P.12 EC DECLARATION OF CONFORMITY EBARA CORPORATION PM10U...

  • Page 14: Table Of Contents

    Performance Curve ................23 2.5.5 System Flow ..................24 3. Installation ......................25 3.1 Movement and Fixation................25 3.1.1 Location ....................25 3.1.2 Caster and adjustment foot ..............25 3.1.3 Pump Anchoring (Option) ..............26 3.2 Piping ......................28 EBARA CORPORATION PM10U...
  • Page 15 Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG) Appendix 3 : Overhaul / Repair Request form (JPN) Appendix 4 : Overhaul / Repair Request form (ENG) Appendix 5 : Leak Check procedure Information of Global Network EBARA CORPORATION PM10U...

  • Page 16: Introduction

    2) Check whether damage has occurred or screws/bolts have worked themselves loose in transit. CAUTION Notify EBARA immediately, when damage is discovered or when components are missing. Do not use when a leak is present as this will result in accident.

  • Page 17: Environmental Concerns

    3) To dispose the unit, follow effective laws and ordinances applicable in the area where the unit is installed. If you have any inquiries about the pump, please contact EBARA. 4) To dispose the lubricant oil and chemicals, follow effective laws and ordinances applicable in the area where the unit is installed.

  • Page 18: Product Description

    ALARM signal. This signal output is generated and the pump will stop automatically when the upper mechanical safety limit is reached during pump operation. Contact EBARA Corporation for details on checking the ALARM setting conditions. All ALARM signal are displayed on the front panel. For remote operation and monitoring, the signal is available as group output.

  • Page 19: Movement

    At least two persons, using great caution, should move the pump. Steel Plate If a moving pump should lose balance and start to tip over, do not attempt to stop it. Get away from the pump immediately. EBARA CORPORATION PM10U...

  • Page 20: Release And Shut Off Residual Internal Energy

    4) Check that the display panel is off. 2.4.2 Returning to Service 1) Remove handle stop bracket and switch circuit breaker on. 2) Restart pump and open fore-line valve only after appropriate leak checks and safety verifications are completed. EBARA CORPORATION PM10U...

  • Page 21: Detailed Specification

    P.20 2.5 Detailed Specification The following tables and figures should be consulted for pump specification, dimension and performance details. 2.5.1 Model Description □ EV-SA20- Power Supply Mark Specification 1Phase 200V 3Phase 200V EBARA CORPORATION PM10U...

  • Page 22: Specifications

    P.21 2.5.2 Specifications Table 2.1 Specification MODEL EV-SA20 Model EV-SA20-2 EV-SA20-3 (1Phase 200V) (3Phase 200V) Pumping Speed 1,670 L/min Gas ballast : OFF 3.0 Pa Ultimate Pressure Gas ballast : ON 5.0 Pa Maximum Inlet Pressure Atmospheric Maximum pure water vapor tolerance...

  • Page 23: Outline Drawing

    P.22 2.5.3 Outline Drawing EBARA CORPORATION PM10U...

  • Page 24: Performance Curve

    P.23 2.5.4 Performance Curve EBARA CORPORATION PM10U...

  • Page 25: System Flow

    P.24 2.5.5 System Flow Outlet Exhaust Gas Ballast Silencer Inlet Inlet Power Circuit Noise Protector Filter Control Inverter Connector Main Pump Motor (MP) Cooling Fan Check Check Valve Valve Fig 2.2 System Flow EBARA CORPORATION PM10U...

  • Page 26: Installation

    Fig 3.1 Caster and height-adjustment foot WARNING Be careful not to overturn the pump when pushing and pulling it sideways. The pump is narrow in comparison to its height. EBARA CORPORATION PM10U...

  • Page 27: Pump Anchoring (Option)

    Section 3.1.2. However, an earthquake may cause the pump to move or fall. To secure the pump, EBARA provides [optional] anchor brackets for Model EV-SA20 dry pump to fasten the pump body to the floor. Anchor the pump to the floor or other firm surface with these brackets.
  • Page 28 P.27 EBARA CORPORATION PM10U...

  • Page 29: Piping

    Support the piping properly and do not apply excessive force to align flange faces. EBARA recommends the insertion of a flexible bellows between the piping and the suction and exhaust flanges of the pump. Length of the flexible bellows on the suction side will vary according to the vacuum drawn.

  • Page 30: Electrical Wiring

    The pump must be connected a suitable earth point. WARNING The earthing of the pump is realized by connecting the cable with qualified electricians. The qualified electricians should have themselves a connection in the ground. EBARA CORPORATION PM10U...
  • Page 31 Use the power cable with ground. Insert the power cable in the grounding power outlet. WARNING Do not use the power cable adapter. Fig. 3.1 shows details of the front panel of model EV-SA20-2. Power connector Control connector Circuit protector...
  • Page 32 C016 20C003 100 12 Fig. 3.3 Details of the front panel of model “EV-SA20-3” WARNING Model EV-SA20-3 must be connected to electrical supply with a suitable circuit breaker (CB); 3-Pole, 15A. CB shall meet the relevant requirements of IEC 60947-1 and IEC 60947-3.
  • Page 33 Power Supply Receptacle (As seen from connecting side) Table 3.3 Receptacle and Plug Specifications Receptacle type C016 20C003 100 12 Receptacle Manufacture Amphenol Adapted plug type C016 20D003 100 12 Suitable wire AWG #14 Power capacity [kVA] EBARA CORPORATION PM10U...

  • Page 34: Control Signal Wiring

    With Pin 4-12 close, the pump rotation speed is directly proportional to the applied voltage between Pin 7-15. When 10V is applied, the pump rotation speed is maximum. [note 3] 9, 10 and 12 pins are short-circuited by internal wiring. EBARA CORPORATION PM10U...
  • Page 35 DC30V 10mA - 1A DC30V 10mA - 1A AC250V 10mA - 1A AC250V 10mA - 1A Min. Load: DC5V, 10mA Min. Load: DC5V, 10mA Surge suppressor Surge suppressor DC5-48V DC5-48V 50mA or less 50mA or less Open collector Open collector EBARA CORPORATION PM10U...
  • Page 36 NOTE When output signals are used to energize an inductive load such as a relay, be sure to insert a diode (100V / 1A class) in order to absorb the back electromotive force due to surge current. EBARA CORPORATION PM10U...

  • Page 37: Operation Panel

    LAN cable that has been on the market. The connection may cause failure of the equipment or the pump. NOTE When monitoring the operation panel, take care not to become unusual postures. EBARA CORPORATION PM10U...
  • Page 38 [min Never lit. [note 2] [note 1] If the lamp is turning off, push ESC button several times and turn on. [note 2] If the lamp is turning on, stop the pump immediately and contact us. EBARA CORPORATION PM10U...
  • Page 39 P.38 Table 4.3 shows seven-segment display character representations. Table 4.3 Seven-segment Display Character Representations Text Display Text Display Text Display Text Display none none EBARA CORPORATION PM10U...

  • Page 40: Operation Panel Display

    , or the inverter settings might be changed. Push button several times to come back to status screen, if the screen shows information other than above. If the setting is changed, the pump specification or control system can’t be guaranteed. EBARA CORPORATION PM10U...
  • Page 41 Normalized + Reset signal input. [note 1] The ALARM is described in this list are typical alarm. If the alarm other than these is displayed, please contact EBARA. [note 2] Under Over-Voltage (OV) condition the inverter retries automatically. After several times retry the condition is still bad, the data screen will display as Table 4.3 and pump will be...

  • Page 42: Operation

    (4) When the pump exhaust pipe is equipped with a valve, open this valve before starting the pump. CAUTION Operating with the closed valve on the exhaust will pressurize the exhaust and cause problems for the pump. EBARA CORPORATION PM10U...

  • Page 43: Start / Stop

    Do not exhaust the process gases until at least 30 minutes after the pump has been started. The pump casing temperature will stabilize after about 2 hours and it is recommended not to start exhausting the process gases earlier than this. EBARA CORPORATION PM10U...
  • Page 44 ALM lamp blink, a few seconds after the CP placed in the OFF position. After other a few seconds, the display and ALM lamp turns off. NOTE If the CP turns on under blinking, ALARM may occur. Input RESET command to cancel the ALARM before restart the pump. EBARA CORPORATION PM10U...

  • Page 45: Pump Speed Control Mode

    [NOTE] The pump will not start when an ALARM has been generated. [NOTE] The control mode (REMOTE / LOCAL) can not be selected during RUN lamp is ON. CAUTION Do not apply voltage more than 10V. There is possibility that the pump to break down. EBARA CORPORATION PM10U...

  • Page 46: Operation When Momentarily Power Failure Happens

    Then ALM lamp turns on and data screen displays “ ” or “ ”. In the momentarily power failure condition, pump rotor is driven by inertia due to interception of power supply. Thus, pumping performance may be decreased than guaranteed specification. EBARA CORPORATION PM10U...

  • Page 47: Gas Ballast

     Please use with a plug of gas ballast port, when you do not introduce condensable gas. Gas Ballast port Inlet Plug port Gas Ballast port (1/4” Tube Fitting) Fig. 5.4 Gas Ballast port EBARA CORPORATION PM10U...

  • Page 48: Maintenance And Inspection

    Do not remove the pump cover during operation. WARNING Be sure to check for gas leaks after you have finished pipe maintenance work. When checking for gas leaks by pressurization, please pressurize by less than 0.05 MPa. EBARA CORPORATION PM10U...

  • Page 49: Lubrication Oil

    Do not remove the pump cover during operation. closing panel silent cover Remove 5 screws (arrow), Pull 4 knobs (arrow), and remove the silent cover and remove the closing panel Fig. 6.1 How to remove the closing cover EBARA CORPORATION PM10U...
  • Page 50 Thus, be sure no to exceed the upper limit line when adding the oil. WARNING When the lubrication oil level is lower than the lower limit, serious failure may be caused. If you find out the shortage, add the oil immediately. EBARA CORPORATION PM10U...

  • Page 51: Maintenance Parts List

    Table 6.3 List of wastes during maintenance Part Equipped on Remarks Lubricant oil Inside of pump module Refer to Appendix 1, 2 for Material Safety See section 6.3 Data Sheet O-ring Connection of vacuum line Usual industrial waste EBARA CORPORATION PM10U...

  • Page 52: Repair And Service

    Overhaul is performed in EBARA. Contact EBARA Sales office or Overhaul service center. The Ebara EV-SA20 pump may require periodic overhaul based on the application. Overhauls should only be completed utilizing Ebara factory trained personnel. Please contact Ebara for information on how to return your pump.

  • Page 53: Disconnection And Transportation

    8. Disconnection and Transportation WARNING When the pump has been used for exhausting highly toxic gases such as arsenic and mercury compounds, be sure to contact EBARA Corporation before you return the pump. CAUTION In the interest of safety during the transportation, disassembly and cleaning of the pump, be sure to take note of the gases that have been handled.
  • Page 54 (6) For transportation, secure the pump by lowering the adjustment feet. Place a protective cloth around the pump to avoid shock and position protective members between the outer cover and the wires in order to distribute the load of the fastening wires. EBARA CORPORATION PM10U...

  • Page 55: Troubleshooting

    Be sure to avoid contact and keep inflammable substances out of reach. Do not remove the outer cover during operation. CAUTION Be sure to check for leaks after you have installed and maintenance the pump. EBARA CORPORATION PM10U...

  • Page 56: Troubleshooting (1) : Basic Trouble

    Ambient temperature is high ( over 40 deg C). Reduce the ambient temperature. Display appears and ALM Open the space around the pump. lamp lights. Ventilation of the pump is blocked. (see section 2.1.2) Cooling fan stopped. Replace or overhaul pump. EBARA CORPORATION PM10U...
  • Page 57 LIVINGSTONE, WEST LOTHIAN, EH54 9DE, U.K. PHONE:44-1506-460232 URL: FAX:44-1506-460222 http://www.ebara.com.sg/index.php?option=com_frontpage&Itemid=1 CHINA Service Locations: http://www.ebara-pm.eu/about-us/locations.html SHANGHAI EBARA PRECISION MACHINERY CO., LTD. KOREA ZHANGJIANG HIGH-TECHNIC PARK, NO.76 LANE 887, EBARA PRECISION MACHINERY KOREA INC. ZUCHONGZHI ROAD, SHANGHAI, 201203, CHINA PHONE:86-21-5131-7008 HEADQUARTERS FAX:86-21-5131-7048...
  • Page 58 Appendix 1 Material Safety Data Sheet of Lubricant oil(JPN) (1/4) 製品安全データシート 作成日 2002 年 08 月 27 日 MSDS No. 1863 改定日 2009 年 10 月 01 日 １．製品及び会社情報 製品名 ： BARRIERTA J100ES 会 社 名： ＮＯＫクリューバー株式会社 住 所： 東京都港区芝大門１－１２－１５ 正和ビル 担当部署：...
  • Page 59 MSDS No. 1863 (2/4) ５．火災時の措置 消火剤 ： 本製品は不燃性。 霧状の強化液、泡、二酸化炭素、粉末が有効。 特定の消火方法 ： 付近の着火源を断ち、保護具を着用して消火する。 消火を行う者の保護 ： 消火作業の際には有害なガスを吸い込まないように呼吸用保護具を着用し、 風上 から消火作業を行う。 ６．漏出時の措置 人体に対する注意事項： 暴露防止のため、保護具を着用して作業を行い、蒸気の吸入や皮膚への接触を防 止する。必要であれば、十分に換気を行う。 漏出した場所の周辺への関係者以外の立ち入りを禁止する。 付近の着火源、高温体、可燃物を取り除き、消火機材を準備する。 環境に対する注意事項： 本製品を含む廃水の公共用水域への排出又は地下浸透を防止するため、 本製品が こぼれた床面などを水で洗い流してはならない。 除去方法 ： 少量の場合はヘラ、スコップ等を使うか、土砂などに吸着させて蓋付きの空容器 に回収し、ウエス等できれいに拭き取る。 火花を発生しない安全な器具等を使用する。 多量の場合は、土砂などで流れを止めた後で回収する。 ７．取り扱い及び保管上の注意 取り扱い 技術的対策 ： 接触の恐れがある時は適切な保護具を使用する。 280℃以上に加熱したり、製品の付着した手で喫煙しないこと。 注意事項 ：...
  • Page 60 MSDS No. 1863 (3/4) ９．物理的及び化学的性質 形状 ： 液体 色 ： 無色透明 臭い ： なし 比重 ： 約 1.89 (20℃) 引火点 ： なし （不燃物） 発火点 ： なし （不燃物） 爆発限界（下限） ： なし 爆発限界（上限） ： なし 溶解性 ： 水に不溶 蒸気圧 ： 約 6.5E-5Pa (20℃) １０．安定性及び反応性...
  • Page 61 MSDS No. 1863 (4/4) １４．輸送上の注意 注意事項 ： 取り扱い及び保管上の注意の項の記載に従うこと。 容器漏れのないことを確かめ、転倒、落下、損傷のないように積み込み、荷崩れ防止を確 実に行う。 国内規制 陸上輸送 ： 消防法、労働安全衛生法等に定められている運送方法に従う。 海上輸送 ： 船舶安全法に定められている運送方法に従う。 航空輸送 ： 航空法に定められている運送方法に従う。 国連分類 ： 非該当 国連番号 ： 非該当 １５．適用法令 労働安全衛生法 表示対象物質： 非該当 通知対象物質： 非該当 その他： ＰＲＴＲ法 第一種指定化学物質： 非該当 第二種指定化学物質： 非該当 毒物及び劇物取締法 ： 非該当...
  • Page 62 Appendix 2 Material Safety Data Sheet of Lubricant oil(ENG) Material Safety Data Sheet BARRIERTA J100ES September 10, 2002 Product name: Date: February 20, 2009 Revision Date: MSDS No. 1863 Page 1 of 5 1. Product and company identification Product name: BARRIERTA J100ES NOK KLÜBER CO.,LTD Company: 955-4, Aza Ohishi, Isohara, Isoharamachi, Kitaibaraki city, Ibaraki 319-1541, Japan...
  • Page 63 Product name: BARRIERTA J100ES MSDS No. 1863 Page 2 of 5 5. Fire-fighting measures Suitable extinguishing media The product itself does not burn. Use extinguishing measures that are appropriate to local circumstances and the surrounding environment. Special hazards In case of fire the following can be released: traces of fluorinated products Special protective equipment for firefighters Standard procedure for chemical fires.
  • Page 64 Product name: BARRIERTA J100ES MSDS No. 1863 Page 3 of 5 8. Exposure controls/personal protection Additional advice on system design not applicable Ingredients and specific control parameters None Personal protective equipment Respiratory protection No special protective equipment required. Hand protection Wear chemical-resistant gloves.
  • Page 65 Product name: BARRIERTA J100ES MSDS No. 1863 Page 4of 5 10. Stability and reactivity Stability Stable Conditions to avoid None Materials to avoid Strong bases, alkali metals, alkaline earth metals, Lewis acids Hazardous decomposition products >280 C traces of fluorinated products Additional information None 11.
  • Page 66 Product name: BARRIERTA J100ES MSDS No. 1863 Page 5 of 5 14. Transport information not applicable UN class : not applicable UN No.: Advice on transportation Not classified as dangerous in the meaning of transport regulations. 15. Regulatory information Please refer to the law and local regulations, etc. in each country. 16.
  • Page 67 Appendix 3 Material Safety Data Sheet of Lithium Battery...
  • Page 69                                                                                                         Doc.No.7250-S32211Rev.2 EBARA CORPORATION  ...
  • Page 70 • Obtain an RMA number from the EBARA Service department and post on all bags, containers, and packing list along with a copy of the Environmental Health &Safety Clearance Form. See next page for sample of the form.
  • Page 71 Environmental Health & Safety Clearance Form in US (Form #-0008 02/12/03)
  • Page 72 Appendix 6 Information of typical hazardous materials Information of typical hazardous gas The table below lists the typical gases used in a semiconductor-processing tool. Personnel involving operations, maintenance and services of the process tools and pumps must fully understand properties and hazardous nature of the gases used in those devices. Many of those processing gases are inclined to explosive reaction when contacted with other chemicals or gases.
  • Page 73 APPENDIX 6 Typical Hazardous Gas Information 1. Etching process Combustion Global Allowable Flammable Toxic Corrosive Support Warming Level* ○ ○ ○ 10ppm ○ ○ 3ppm ○ ○ ○ 0.5ppm 5ppm ○ ○ as HCl ○ ○ 3ppm ○ ○ 0.1ppm ○...
  • Page 74 Appendix 7 Leak Check procedure Typical Leak Check Procedure NOTE: This general procedure is not a substitute for user's work instructions or leak detector operations manual. Read and follow the instructions for your leak detection apparatus. Perform leak check after initial system assembly and after any breach of the system for maintenance. Check pump down time (that is time to go from atmosphere to target pressure) of fore line to confirm the absence of gross leaks.

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