EBARA ESA500W Instruction Manual page 56

(3) Turn on the power supply to the pump.
(4) The LCD controller counts down 10 seconds after placing the Earth Leakage
Breaker (ELB) into the ON position.
[ NOTE ] The pump cannot start while the measuring instruments are warming
up for 10 seconds after the ELB is placed in the ON position.
(5) Check on the WATER FLOW display of the LCD Controller that the cooling
water flow rate is 6 L/min. or more.
(6) Re-check on the PUMP N2 FLOW display of the LCD Controller that the
dilution N2 gas flow rate is within the 8.5～11.0 Pam
that the pressure gauge shows a reading of 0.09 - 0.12MPa.
(7) When the WARNING/ALARM display appears on the LCD controller or when
any abnormal symptoms are found other than the display, take action in
accordance with 10. "Troubleshooting."
Even when the cause of the WARNING/ALARM display has been removed, it
is maintained until the RESET signal is entered. Either press the RESET
button or enter an external RESET signal from the control signal connector.
In the BUZZER Enabled mode using Dip switches, it is possible to stop the
buzzer by pressing the "BZ.OFF" button when the alarm is being generated.
(8) When the pump exhaust pipe is equipped with a valve, open this valve before
starting the pump.
CAUTION
PM10U
Problems will occur when the pump is operated with the valve
closed as the exhaust pipe will be pressurized.
3
/s range. Also check
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CORPORATION
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