6. LCD Controller .............................................................................................. 25
6.1 LCD Outline ................................................................................................ 25
6.2 LCD Indication ........................................................................................ 26
6.4 Dip Switch............................................................................................... 36
7. Operation ...................................................................................................... 42
7.1 Before Starting........................................................................................ 42
7.2 START/STOP ......................................................................................... 44
8.1 Internal energies..................................................................................... 48
8.1.1 Power source....................................................................................... 48
8.1.2 Cooling water....................................................................................... 48
8.1.3 N2 gas ................................................................................................. 48
8.4 Lubricant Oil ........................................................................................... 52
8.7 Overhaul ................................................................................................. 57
10. Troubleshooting .......................................................................................... 61
PM10U
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EBARA
CORPORATION