Agilent Technologies 4155C User Manual page 232

Table 8-11
Table 8-12
Specifications
Functions
Calculation Example of Measurement Accuracy using HRSMU
Current Integration
Range Time
0.5 sec
10 pA/
100 pA
1 sec
2 sec
0.1 sec
1 nA
0.5 sec
2 sec
0.1 sec
10 nA
0.5 sec
2 sec
10 sec
Calculation Example of Measurement Accuracy using MPSMU/HPSMU
Current Integration
Range Time
1 nA 0.1 sec
0.5 sec
2 sec
10 nA 0.1 sec
0.5 sec
2 sec
10 sec
Accuracy: ± (% of reading)
Maximum value is applicable when the following conditions are satisfied.
• Current compliance is smaller than the current range.
• Capacitance of the DUT and measurement path is smaller than the maximum
measurement value.
8-24
Maximum Value
100 fF/1 pF
2 pF/20 pF
76 pF/760 pF
700 pF
4.5 nF
18 nF
7 nF
45 nF
180 nF
940 nF
Maximum Value
700 pF
4.5 nF
18 nF
7 nF
45 nF
180 nF
940 nF
± (offset value)
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
Meas.
Accuracy
Reso.
± (4.2 % + 70 pF)
5 fF
± (4.3 % + 90 pF)
10 fF
± (4.3 % + 130 fF)
20 fF
± (0.84 % + 160 fF)
10 fF
± (0.85 % + 280 fF)
40 fF
± (0.93 % + 740 fF)
200 fF
± (0.84 % + 200 fF)
10 fF
± (0.85 % + 440 fF)
40 fF
± (0.93 % + 1.4 pF)
200 fF
± (1.3 % + 6.2 pF)
1 pF
Meas.
Accuracy
Reso.
± (0.91 % + 170 fF)
10 fF
± (0.94 % + 340 fF)
40 fF
± (1 % + 1 pF)
200 fF
± (0.91 % + 180 fF)
10 fF
± (0.94 % + 480 fF)
40 fF
± (1 % + 1.6 pF)
200 fF
± (1.6 % + 7.6 pF)
1 pF