41501B SMU and Pulse Generator Expander
HPSMU (High Power SMU) Specifications
•
Current Range, Resolution, and Accuracy
See Table 8-6.
•
Voltage Range, Resolution, and Accuracy
See Table 8-7.
•
Output terminal/connection
Dial triaxial connectors, Kelvin (remote sensing)
•
Voltage/Current Compliance (Limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
Voltage
Current
Compliance accuracy
•
HPSMU supplemental information
Allowable cable resistance (Kelvin connection.)
Voltage source output resistance
Voltage measurement input resistance ≥ 10
Current source output resistance
Current compliance setting accuracy (for opposite polarity)
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
0 V to ± 200 V
± 1 pA to ± 1 A
Same as current (voltage) set accuracy.
Force: maximum 0.7 Ω (100 mA to 1A)
Force: maximum 10 Ω (
Sense: maximum 10 Ω
typical 0.2 Ω (Force line. Non Kelvin
connection.)
13
Ω
13
≥ 10
Ω (1 nA range)
For 1 nA to 10 nA range:
V/I setting accuracy ± 12 % of range
For 100 nA to 1 A range:
V/I setting accuracy ± 2.5 % of range
Specifications
Hardware
≤
100 mA)
8-13