Agilent Technologies 4156b User Manual
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Agilent Technologies 4156b User Manual

Precision semiconductor parameter analyzer
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User's Guide
Volume 2
Measurement and Analysis
Agilent 4155B Semiconductor Parameter Analyzer
Agilent 4156B Precision Semiconductor Parameter Analyzer
Agilent Part No. 04156-90200
Printed in Japan
May 2000
Edition 5

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  • Page 1 User’s Guide Volume 2 Measurement and Analysis Agilent 4155B Semiconductor Parameter Analyzer Agilent 4156B Precision Semiconductor Parameter Analyzer Agilent Part No. 04156-90200 Printed in Japan May 2000 Edition 5...
  • Page 2 If Agilent Technologies receives notice of such defects during the warranty period, Agilent Technologies will, at its option, either repair or replace products which prove to be defective.
  • Page 3 To the extent allowed by local law, the remedies in this warranty statement are customer’s sole and exclusive remedies. Expect as indicated above, in no event will Agilent Technologies or its suppliers be liable for loss of date or for direct, special, incidental, consequential (including lost profit or date), or other damage, whether based in contract, tort, or otherwise.
  • Page 4 INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 1010-1. Agilent 4155B/4156B/41501B are INDOOR USE products. NOTE LEDs in Agilent 4155B/4156B/41501B are Class 1 in accordance with IEC 825-1. CLASS 1 LED PRODUCT. • GROUND THE INSTRUMENT This is Safety Class I instrument.
  • Page 5 Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.
  • Page 6 • Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 7 Printing History Edition 1: August 1997 Edition 2: September 1997 Edition 3: October 1998 Edition 4: January 2000 Edition 5: May 2000 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 8 This chapter provides problem-solving information that you may encounter. Text Conventions The following text conventions are used in this manual: Represents text that appears on screen of the 4155B/4156B. Screen Text Italic Refers to a related document, or is used for emphasis.

  • Page 9: Table Of Contents

    Stress Stop Function at Abnormal Status ......3-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 10 Trigger Input ..........3-41 Contents - 2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 11 Using Test Fixture ..........4-4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 12 To Set up dc Output ..........4-57 Contents - 4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 13 To Display Marker at Specified Point ....... 5-37 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 14 Green front-panel key usage ........6-88 Contents - 6 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 15 @CY2 ............7-21 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 16 Scaling Functions ..........7-41 Contents - 8 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 17 If Errors Occur when You Perform Self-calibration or Diagnostics ..8-14 If Errors Occur when You Operate the 4155B/4156B ....8-20 If a Measurement Data Status is Displayed .

  • Page 18: Edition

    Contents Contents - 10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 19: Measurement Units

    Measurement Units Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 20: Edition

    For the following units, a simplified circuit diagram is shown, and where applicable, the output and measurement ranges are provided. • “Ground Unit (GNDU)” • “Source/Monitor Unit (SMU)” • “Voltage Source Unit (VSU)” • “Voltage Monitor Unit (VMU)” • “Pulse Generator Unit (PGU)” Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 21: Ground Unit (Gndu)

    The GNDU is a 0 V constant source that provides a measurement ground reference, and can sink up to ±1.6 A. Figure 1-1 shows a simplified GNDU circuit diagram. Figure 1-1 Simplified GNDU Circuit Diagram Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 22: Source/Monitor Unit (Smu)

    SMU can output constant or pulsed source. (Only one SMU can be set to pulsed source.) Figure 1-2 shows a simplified SMU circuit diagram. Figure 1-2 Simplified SMU Circuit Diagram Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 23 Maximum output power: 2 W. • Minimum current measurement range: 10 pA with 1 fA resolution. • Only the 4156B has HRSMUs. The 4156B has four HRSMUs. • MPSMU (medium power SMU) • Force and measure: up to ±100 V or ±100 mA.

  • Page 24: Agilent 4155B/4156B User's Guide Vol.2, Edition 5

    0 £ ½V½ £ 20 V 20 V 1 mV ±100 mA 0 £ ½V½ £ 40 V 40 V 2 mV ±50 mA 0 £ ½V½ £ 100 V 100 V 5 mV ±20 mA Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 25 0 £ ½I½ £ 20 mA 10 mA 100 mA ± 100 V 20 mA < ½I½ £ 50 mA 10 mA ± 40 V 50 mA < ½I½ £ 100 mA 10 mA ± 20 V Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 26: Agilent 4155B/4156B User's Guide Vol.2, Edition 5

    Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the column of Integration Time 80 ms to 560 ms. c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 27 0 £ ½V½ £ 20 V 20 V 1 mV ±100 mA 0 £ ½V½ £ 40 V 40 V 2 mV ±50 mA 0 £ ½V½ £ 100 V 100 V 5 mV ±20 mA Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 28 0 £ ½I½ £ 20 mA 10 mA 100 mA ± 100 V 20 mA < ½I½ £ 50 mA 10 mA ± 40 V 50 mA < ½I½ £ 100 mA 10 mA ± 20 V 1-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 29 Measurement resolution depends on the integration time setting. For Knob sweep measurement, see the column of Integration Time 80 ms to 560 ms. c. This column is applied to the sampling measurement that initial interval is set to 480 ms or shorter. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-11...
  • Page 30 0 £ ½V½ £ 40 V 40 V 2 mV ±500 mA 0 £ ½V½ £ 100 V 100 V 5 mV ±125 mA 0 £ ½V½ £ 200 V 200 V 10 mV ±50 mA 1-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 31 50 mA < ½I½ £ 125 mA 100 mA ± 100 V 125 mA < ½I½ £ 500 mA 100 mA ± 40 V 500 mA < ½I½ £ 1 A 100 mA ± 20 V Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-13...
  • Page 32 • Measurement range differs from compliance range (lowest range that includes compliance). • Ranging mode is set to auto range or limited auto range. • Multi-channel measurement is set. 1-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 33 If SMU is pulsed constant source, I is peak or base current, whichever has larger absolute value. If SMU is pulsed sweep source, I is start or stop value, whichever has larger absolute value. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-15...

  • Page 34: Voltage Source Unit (Vsu)

    VSU can force up to ±20 V. • Only range available is 20 V range with 1 mV resolution, so output range is automatically set to 20 V. • Current compliance is automatically set to ±100 mA. 1-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 35: Voltage Monitor Unit (Vmu)

    Grounded mode uses one VMU. Differential mode uses two VMUs. Figure 1-7 shows a simplified VMU circuit diagram. Figure 1-7 Simplified VMU Circuit Diagram VMU can measure up to 20 V. Table 1-13 shows the voltage measurement range of VMU. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-17...
  • Page 36 After a long time charge, connecting DUT to the measurement terminal may damage the DUT by the discharging. For the details of how to prevent this damage, refer to “If Measurement Damages the Device under Test” in Chapter 8. 1-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 37 1. Connect SMU to the DUT. 2. Force very low current (under 1 pA) to the DUT from SMU. 3. Measure voltage by SMU. 4. Compare the voltage measured by SMU and VMU. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-19...

  • Page 38: Pulse Generator Unit

    Maximum peak-to-peak voltage is 40 V. b. If pulse width £ 1 ms, pulse duty is £ 50 %, and average current output is £ ±100 mA, the peak current output can be up to ±200 mA. 1-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 39 The pulse period, pulse width, and delay time must be set in the same range. Also, if you use two PGUs, both PGUs are set to the same pulse period value. So, these three parameters must be set in the same range for both PGUs. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 1-21...
  • Page 40 PGUs output trigger signal to synchronize with external pulse generators. If an 41501A/B has PGUs, the 41501A/B has a trigger output terminal. For details of trigger functions, refer to “Trigger Function” in Chapter 3. 1-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 41: Measurement Mode

    Measurement Mode Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 42 Measurement Mode This chapter explains measurement modes of Agilent 4155B/4156B. The 4155B/4156B has the following two measurement modes: • “Sweep Measurement Mode” • “Sampling Measurement Mode” Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 43: Sweep Measurement Mode

    Only SMUs and VSUs can be sweep sources (VAR1, VAR2, and VAR1'). The 4155B/4156B provides three types of sweep measurement: • “Basic Sweep Measurement”...

  • Page 44: Basic Sweep Measurement

    Double Source channel sweeps the output from user specified start value to stop value, then from stop value to start value. You can select any combination of LIN/LOG and SWEEP MODE as shown in the following table: Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 45 Linear or logarithmic sweep. For logarithmic sweep, select the number steps in one decade as follows: LOG10 10 steps in one decade. LOG25 25 steps in one decade. LOG50 50 steps in one decade. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 46 Time required for DUT to settle after stepping the output. Allowable range: 0 to 65.535 s. Resolution: 100 ms Refer to “CHANNELS: CHANNEL DEFINITION screen” and “MEASURE: MEASURE SETUP screen” in Chapter 6 for setting up these parameters. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 47: Subordinate Sweep Measurement

    VAR2 function for desired secondary sweep source (SMU or VSU). Subordinate sweep measurement has the following restriction: • For the secondary sweep source, only single sweep mode and linear staircase mode are available. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 48 (Optional) Power compliance value of secondary sweep source. This parameter applies to SMU only. Allowable range of power compliance depends on the power compliance range of sweep source. For details, refer to Chapter 3. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 49: Synchronous Sweep Measurement

    • single/double sweep mode • VAR1 and VAR1' must be same V/I output mode. For example, if VAR1 is set to V mode, then VAR1' must be set to V or VPULSE mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 50 The relationship between the output of primary and synchronous sweep sources is determined by the following equation: synchronous output = primary output ´ ratio + offset The synchronous output determined by above equation must not exceed the output range of synchronous sweep source. 2-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 51: Pulse Sweep Measurement

    SMU pulse source. Measurements are made during the pulse output. The pulse output of PGU is not synchronized with any other source. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-11...
  • Page 52 • Measurement range differs from compliance range (lowest range that includes compliance). • Ranging mode is set to auto range or limited auto range. • Multi-channel measurement is set. 2-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 53 If the measurement settings do not meet the following conditions, pulse width setting of SMU may be insufficient to make measurement. If so, the pulse width is automatically changed to be appropriate. Number of Meas. Channels: Integration Time: Short Ranging Mode: Fixed Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-13...

  • Page 54: Sampling Measurement Mode

    For a sampling measurement, you can monitor current or voltage changes at a DUT while forcing constant current, constant voltage, or pulsed constant bias. The 4155B/4156B provides the following three types of sampling measurement according to the sampling interval: •...

  • Page 55: Sampling Interval And Measurement Time

    • range changing time at measurement start (when using measurement range less than the compliance value) • time required for the compensation: getting compensation data and compensating measurement data (when the automatic compensation is set and executed) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-15...
  • Page 56 Hold Time Sampling Sampling Sampling Interval Interval Interval Trigger Trigger Trigger Trigger Trigger Total Sampling Time (TOTAL SAMP. TIME) (TOTAL SAMP. TIME is one of the stop condition.) Starts Sampling Stops Sampling 2-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 57 MEASURE: SAMPLING SETUP screen. However the measurement will be immediately stopped if a sampling completion condition is satisfied before reaching the maximum number. For the sampling completion condition, see “Sampling Completion” on page 2-20. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-17...

  • Page 58: Sampling Measurement Data

    Hold time. Tinterval : Sampling interval. @INDEX : Data index. Number of triggers between two nearest measurement points. This value is 0 if the sampling interval is enough longer than the measurement time. 2-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 59 Measurement Time Measurement time is sum of the measurement time by all units. To execute sampling measurement with the specified sampling interval, the sampling interval must be enough longer than the measurement time. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-19...

  • Page 60: Sampling Completion

    TOTAL SAMP.TIME to auto enables this sampling completion condition. • Stop front-panel key The Stop front-panel key is pressed. • GPIB Command The 4155B/4156B receives GPIB command to stop sampling. • Emergency Condition An emergency condition occurs on the 4155B/4156B. • Interlock Open Interlock terminal opens due to high voltage.
  • Page 61 THRESHOLD value. Target value of the count the event occurs (true). When the EVENT NO. count of true is this value, sampling is immediately stopped. Allowable range: 1 to 200. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-21...

  • Page 62: Source Output Sequence And Time Origin

    SEQUENCE screen. The following two modes are available for the field. • SIMULTANEOUS mode All source unit starts output at same timing. This timing is defined as the Time Origin. See figure below. 2-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 63 See figure below. If there is pulse bias sources (PGUs), they start to force pulse base value in the order shown above, and start to force pulse bias at the Time Origin. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-23...

  • Page 64: Linear Sampling Measurement

    INITIAL INTERVAL, and continues sampling measurement. To store new measurement data, linear sampling mode discards a data every couple of nearest data as shown above. Data is updated every measurement. 2-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 65 INITIAL INTERVAL NO.OF SAMPLES 1 ´ 10 sec, AUTO, or NO LIMIT. AUTO Enables the number of sampling points sampling completion condition. NO LIMIT Disables the total sampling time sampling completion condition Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-25...
  • Page 66 AUTO or LIMITED, range changing makes long measurement time. Integration time is an element of the measurement time. If automatic measurement data compensation is executed, the measurement time will be more than two times the integration time. 2-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 67: Thinned-Out Sampling Measurement

    To store new measurement data, thinned-out sampling mode discards a data every couple of nearest data as shown above. Data is updated every measurement. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-27...
  • Page 68 • Allowable range when INITIAL INTERVAL 0 to 655.35 s with 100 ms resolution. • Allowable range when <2 ms: INITIAL INTERVAL - 30 ms to 655.35 s with 100 ms resolution. 2-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 69 AUTO or LIMITED, range changing makes long measurement time. Integration time is an element of the measurement time. If automatic measurement data compensation is executed, the measurement time will be more than two times the integration time. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-29...

  • Page 70: Logarithmic Sampling Measurement

    Starts Sampling Hold Time Sampling Interval Discard Data of second decade Data of first decade TIME Measurement This is the example to plot LOG10 data. 1/10 decade @TIME First decade Second decade 2-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 71 There are 90 sampling points in this range. Number of data can 200 ms to 2 s remain is only 10. They can plot the data on the X-axis in almost the same interval. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-31...
  • Page 72 Tlog - sampling interval. Actual measurement point. Tprev Discard Tprev Tlog Stored in @TIME Sampling Interval Ttarget < Tlog Ttarget A > B TIME Measurement A= | Ttarget - Tprev | B = | Tlog - Ttarget | 2-32 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 73 3rd decade 1.300 to 4.00 ( 300 m +1 to 3+1 ) 4th decade 4 to 31 ( 3+1 to 30+1 ) 5th decade 31 to 301 ( 30+1 to 300+1 ) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 2-33...
  • Page 74 AUTO or LIMITED, range changing makes long measurement time. Integration time is an element of the measurement time. If automatic measurement data compensation is executed, the measurement time will be more than two times the integration time. 2-34 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 75: Measurement Functions

    Measurement Functions Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 76 Measurement Functions This chapter explains functions that can be used in measurements. Agilent 4155B/4156B has the following useful measurement functions. • “Stress Force Function” • “Knob Sweep Function” • “Operation States” • “Standby Function” • “Output Sequence” • “Trigger Function”...

  • Page 77: Stress Force Function

    Stress Force Function Stress Force Function The 4155B/4156B can force both dc stress and ac stress (pulsed stress) as shown in the following figure. Stress is defined as the bias that the 4155B/4156B can monitor the bias output time correctly. To start stress force, press Stress front-panel key.

  • Page 78: Stress Output Channels

    To set a unit to the stress channel, select SYNC in the FCTN field for the unit. If you select NSYNC, the 4155B/4156B does not monitor the bias output time for the unit. The unit is called as non-stress channel or bias channel in this manual.
  • Page 79 • gate trigger while stress is forced The 4155B/4156B can output a gate trigger while stress channels are forcing stress. For details about this gate trigger, refer to “Trigger Function” on page 3-39.

  • Page 80: Stress Mode

    You specify the total stress time directly in seconds. Allowable range is 500 ms to 1 year (3.1536´10 setting resolution: When the specified time is 10 s or less: 100 ms • • When the specified time is more than 10 s: 10 ms Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 81: Stress Force Sequence

    If you set delay time for pulse stress, finish of stress force time is after the period of the last pulse. (See Figure 3-1 on page 3-9.) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 82 Figure 3-1 shows an example of output sequence when forcing stress. Figure 3-1 assumes the output sequence is set on the MEASURE: OUTPUT SEQUENCE screen as follows. 1. PGU1 2. SMU1 3. PGU2 4. SMU2 5. SMU3 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 83 The stress force channels (PGU1, PGU2, and SMU3) start stress and stop stress at the same time. • output sequence from stress state to the idle state: 1. SMU3 2. SMU2 3. PGU2 4. SMU1 5. PGU1 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 84: Stress Stop Function At Abnormal Status

    Stress Stop Function at Abnormal Status On the STRESS: STRESS SETUP screen, you can select whether the stress stops or continues when an abnormal status occurs. When an 4155B/4156B is stopped by the stress stop function, a message is displayed in the message display area.

  • Page 85: Knob Sweep Function

    To start the knob sweep measurement, press the green key and then the Single front-panel key. The 4155B/4156B starts knob sweep measurement, and repeats measurements continuously until this function is stopped. You can change the measurement setups even while the measurements are being performed.

  • Page 86: Normal Sweep And Knob Sweep Measurements

    80 ms Integration Time short, medium, or long Measurement range is automatically set according to specified compliance value. Settings on the MEASURE: OUTPUT SEQUENCE screen also apply to knob sweep measurement. 3-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 87: Features Of Knob Sweep Function

    To decrease the source value toward 0, rotate the rotary knob in counterclockwise. When measurement curves reach 0, the curves remain at 0 even if you continue to rotate the rotary knob counterclockwise. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-13...
  • Page 88 Measurement Resolution When performing knob sweep measurement, measurement resolution of each measurement unit is worse than the measurement resolution of normal sweep measurements. For details of measurement resolution, refer to Chapter 1. 3-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 89 For details about compliance range, refer to “Compliance Range” on page 3-56. If VMU is the measurement channel: 20 V range is used for the grounded measurement mode, and the 2 V range is used for the differential measurement mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-15...

  • Page 90: Knob Sweep Screen

    KNOB SWEEP screen To start the knob sweep measurement, press the green key and then the Single front-panel key. The 4155B/4156B displays KNOB SWEEP screen, and starts measurements. To stop the knob sweep measurement, press the Stop front-panel key or a PAGE CONTROL group key.

  • Page 91: Y-Axis Assign Softkey

    Knob sweep measurement setup cannot be directly stored into a file. This function allows you to save the setup as a normal-sweep measurement setup file. But the setup data cannot be retrieved to the knob sweep mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-17...

  • Page 92: Display Setup Softkey

    • setting Pressing this softkey toggles the polarity in the following order: + ® - ® +/- ® + • default polarity of VAR1 compliance value on the MEASURE: SWEEP SETUP screen 3-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 93 : NORMAL GRID Selects grit on or off. This softkey displays present setting. • setting Pressing this softkey toggles the grid on or off in the plotting area. • default : ON Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-19...

  • Page 94: Var1 Setup Softkey

    SETUP screen are same, default value is same as polarity of stop and start value. If polarity of VAR1 stop and start value on MEASURE: SWEEP SETUP screen are different, default value is BIPOLAR. 3-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 95 Edit key group. • setting range : 2 to 1001 • default : 101 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-21...
  • Page 96 Edit key group. setting range : 500 ms to 100 ms with 100 ms resolution • default : 500 ms • 3-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 97: Var2 Setup Softkey

    Edit key group. • setting range Depends on the measurement unit. See Chapter 1. • default VAR2 step value on MEASURE: SWEEP SETUP screen Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-23...
  • Page 98 Edit key group. • setting range Setting range depends on the measurement unit. See Chapter 1. • default VAR2 compliance value on MEASURE: SWEEP SETUP screen 3-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 99: Const Setup Softkey

    You can change the compliance value by using the rotary knob, numeric keys, or arrow keys in the Edit key group. • setting range Each setting range depends on the measurement unit. See Chapter 1. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-25...

  • Page 100: Analysis Of The Knob Sweep Measurement Results

    DATA VAR softkey to ON. After getting the measurement data on the knob sweep mode, and quitting the knob sweep mode as described above, the results of user function will be displayed on the GRAPH/LIST screen. 3-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 101: Standby Function

    To start the standby output, press Standby front-panel key. Then the indicator is lit. However, if no units are defined as the standby channel, the 4155B/4156B cannot be in the standby state. To stop the standby output, press Standby front-panel key. The indicator is off.

  • Page 102: Available Units And Output Values

    For example, if previous state was measurement state and latest value of VAR1 was stop value, the stop value is output for VAR1 during standby. 3-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 103: Output Sequence Of Standby Channels

    SEQUENCE screen. Example output sequence setup is shown in the following table, and Figure 3-2 shows timing diagram of this example: Unit Output Sequence STBY SMU1 SMU3 SMU4 PGU1 PGU2 SMU2 Figure 3-2 Example of the Output Sequence of the Standby Channels Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-29...

  • Page 104: When Getting Setup File

    Measurement Functions Standby Function When Getting Setup File Usually, the 4155B/4156B is in the idle state after getting setups from a file or an internal memory. But if all of the following must be true, the 4155B/4156B keeps the standby state: •...

  • Page 105: Operation States

    In the idle state, the 4155B/4156B is not doing anything: no measurements, forcing current or voltage, forcing stress. An 4155B/4156B is in the idle state after applying power. In this state, output switches of all the measurement units are on, and all of the units output 0 V. In this state, you can modify any setting items on the setup screens.

  • Page 106: Stress Force State

    Measurement Functions Operation States Stress Force State In the stress force state, the 4155B/4156B outputs stress. The output switches are off for units that do not have entries in the CHANNELS table of the STRESS: CHANNEL DEFINITION screen. Standby State...
  • Page 107 Operation States • From measurement/stress states to standby state: If you perform measurements or force stress from the standby state, then the 4155B/4156B returns to the standby state after one of the following conditions occurs: • Measurement is finished. •...

  • Page 108: Output Sequence

    Output Sequence When you perform measurements or force stress, or when you use the standby function, you can specify an output sequence for the source channels. The 4155B/4156B has two output sequence modes: • sequential mode The source channels output in the order that you specify in the OUTPUT SEQUENCE table on the MEASURE: OUTPUT SEQUENCE screen.

  • Page 109: Sequential Mode

    When returning to the idle state, the units operate as shown below: 1. Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table. 2. Disabled units keep 0 V output, and turn the output switch on. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-35...
  • Page 110 Units available: SMU1 to SMU 4, VSU1 to VSU2. • Units disabled: SMU4 and VSU2. • Output sequence: No change from the default setting. Figure 3-4 Output Sequence Example for the Sequential Mode 3-36 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 111: Simultaneous Mode

    When returning to the idle state, the units operate as shown below: 1. Output channels stop the output in the opposite order of the OUTPUT SEQUENCE table. 2. Disabled units keep 0 V output, and turn the output switch on. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-37...
  • Page 112 Units available: SMU1 to SMU 4, VSU1 to VSU2. • Units disabled: SMU4 and VSU2. • Output sequence: No change from the default setting. Figure 3-5 Default Output Sequence Example for the Simultaneous Mode 3-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 113: Trigger Function

    Trigger Function Trigger function is used to perform measurements synchronized with the measurements or source outputs by external instruments.. Connection The following figure shows the connection between an 4155B/4156B and an external instrument. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-39...
  • Page 114 The trigger output function is not available for sampling measurements. • When you perform knob sweep measurements, the trigger function is not available. • For the electrical specifications of trigger signals, refer to User's Guide General Information. 3-40 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 115: Trigger Input

    Examples of Externally Triggered Measurements After you press the Single, Repeat, or Append front-panel key, the 4155B/4156B waits for the trigger signal only once. When the 4155B/4156B receives the trigger signal, the 4155B/4156B starts measurements. For staircase sweep measurements, you can specify the step delay time shown in Figure 3-6.

  • Page 116: Trigger Output

    Gate Trigger Output The 4155B/4156B can output gate triggers when forcing stress. When stress forcing starts, the trigger signal changes to the active level. When stress forcing finishes, the trigger signal changes to the non-active level.
  • Page 117 Trigger Function Trigger output delay time for pulsed sweep measurements. When using an SMU as a pulse source, the 4155B/4156B can output edge triggers at each pulse leading edge. Trigger output delay time (TRIG OUT DELAY) specifies how much to delay the trigger after the leading edge. So, you set the trigger output delay time to wait until the 4155B/4156B outputs a stable pulse peak value.
  • Page 118 Resolution: 100 ms Trigger output delay time is shown as T2 in the following figure. If the specified T2 is shorter than the measurement time of the 4155B/4156B, the 4155B/4156B waits until the measurement completes, then outputs the next step.
  • Page 119 Trigger Function Trigger output function of PGU Using the Agilent 41501A/B contains PGUs, the 4155B/4156B can output a gate trigger through the 41501A/B Ext Pulse Generator Trig Out terminal. The trigger signal is synchronized with the PGU output pulses, and you cannot control trigger timing.

  • Page 120: Smu/Pg Selector Control

    SMU/PG Selector Control SMU/PG Selector Control The 4155B/4156B can control the 16440A SMU/Pulse Generator Selector to automatically switch units that are connected to a DUT pin. You set up this automatic control using the SMU/PG SELECTOR field on the STRESS: CHANNEL DEFINITION screen.

  • Page 121: Setup And Switching Conditions

    If you need to switch PGU many times, use PGU OPEN, not OPEN to disconnect PGU. Restrictions using Selector • 41501A/B Expander equipped with PGU must be connected to 4155B/4156B. • Kelvin connection is not available. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 122: R-Box Control

    • 10 kW • You can select the resistance values on the 4155B/4156B setup screen. The LEDs on the 16441A R-Box indicate the present resistance value. Connections Following table is the parts list of cables for connecting the 16441A R-Box.
  • Page 123 The following figure shows the 16441A R-Box connections using non-Kelvin connections. Kelvin Connections The following figure shows the 16441A R-Box connections using Kelvin connections. Only 0 ohm is available for the Kelvin connection. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-49...

  • Page 124: Setups

    SMU that is set to standby channel • SMU that is set to COMMON output mode If the 4155B/4156B is on and an emergency occurs, the resistance value changes to 1 MW. There is a possibility that the 4155B/4156B cannot perform measurement circumstances.

  • Page 125: Circuit Diagram

    Switching Conditions of the 16441A R-Box Switches Settings 10 kW 100 kW 1 MW Resistance is switched before and after measurement state. In the standby state, the stress state, and the idle state, 0 W is connected. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-51...
  • Page 126 Measurement Functions R-BOX Control Figure 3-8 Simplified Circuit Diagram of the 16441A R-Box 3-52 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 127: Measurement Ranging Mode

    (1nA) ranging is set for current measurement mode channel automatically. For sampling measurement (initial interval < 2 ms) , an error occurs if fixed range is not set. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-53...

  • Page 128: Auto Ranging

    10 % and 114 % of the range, then the unit performs the measurement. • 10 pA The unit changes to the next higher range when the measurement value exceeds 104 % of the present range. 3-54 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 129: Limited Auto Ranging

    10 % and 114 % of the range, then the unit performs the measurement. • 10 pA The unit changes to the next higher range when the measurement value exceeds 104% of the present range. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-55...

  • Page 130: Compliance Range

    The monitor unit measures at the lowest range that includes I compliance. Fixed Range The monitor unit measures at the specified range only. For current measurement, if specified range is greater than the lowest range that includes I compliance, an error occurs. 3-56 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 131: Compliance

    Polarity and Output Area • Polarity of Voltage compliance The 4155B/4156B automatically sets V compliance polarity to the same polarity as the output current, regardless of the specified V compliance polarity. There is no compliance for the opposite polarity. •...
  • Page 132 0 to 100 V 100 mA (20 mA < | I | £ 50 mA) 0 to 40 V 100 mA (50 mA < | I | £ 100 mA) 0 to 20 V 3-58 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 133 100 fA to 20 mA MPSMU 1 pA to 100 mA 20 V 1 pA to 100 mA 40 V 1 pA to 50 mA 100 V 1 pA to 20 mA Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-59...
  • Page 134 100 mA < | I | £ 1 mA 100 nA 1 mA < | I | £ 10 mA 1 mA 10 mA < | I | £ 100 mA 10 mA 3-60 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 135: Power Compliance

    If you specify I compliance and power compliance for a V sweep source, the 4155B/4156B changes the I compliance at every voltage step. The I compliance is set to the smaller value of I compliance and Icomp value below. See Figure 3-10 (a).
  • Page 136 If you specify power compliance, SMUs can be swept at their maximum output limits because the 4155B/4156B changes the V (or I) output range and I (or V) compliance range during a V (or I) sweep. Figure 3-11 shows an example of the difference in SMU output when power compliance is set and when power compliance is not set.

  • Page 137: Integration Time

    Integration Time To reduce measurement errors caused by line frequency noise or any other environmental noise source, the 4155B/4156B takes a number of measurement samples and averages them to obtain a measurement data. The number of measurement samples taken during each measurement depends on integration time.

  • Page 138: Medium

    2 PLC to 100 PLC with 1 PLC resolution Integration time Initial setting 16 PLC When an 4155B/4156B measures current in 1 nA or lower ranges by using HRSMU, integration time of HRSMU is automatically changed to longer integration time (maximum 100 PLC) than specified. 3-64...

  • Page 139: Smu Filter

    • sweep measurement When you perform sweep measurements, the SMU filter conditions are automatically set as follows: For a pulsed SMU Filter is off. For non-pulsed SMUs Filters are on. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-65...

  • Page 140: Zero Offset Cancel

    Measurement Functions Zero Offset Cancel Zero Offset Cancel The 4155B/4156B has zero offset cancel function. This function allows you to minimize measurement error (offset) caused by resistance and leakage current of cables, prober, and so on. You can use the zero offset cancel function for: low current measurement (measurement range £10 nA) by SMUs.
  • Page 141 ±4 % of range Differential Voltage 0.2 V less than ±1 % of range Measurement a. If VMU2 grounded mode measurement value is greater than or equal to ±20 V, error occurs. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3-67...

  • Page 142: To Perform Offset Cancel

    1 nA range, OFF is displayed in the unit's ZERO CANCEL field. Because it is possible that auto range will use range lower than 1 nA. 3-68 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 143: Making A Measurement

    Making a Measurement Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 144 “Sampling Measurements” • “Stress Force” For details about entry fields on the 4155B/4156B setup screen, refer to Chapter 6. To satisfy the specifications of the 4155B/4156B and the 41501A/B, you need minimum 40 minutes warm-up before performing measurements. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 145: Connecting Dut

    This section describes how to connect device under test (DUT) to the 16442A test fixture, and how to connect cables to the connector plate. For connecting the test fixture or the connector plate to the 4155B/4156B, see User's Guide General Information. If you use a wafer prober, see wafer prober manuals.

  • Page 146: Using Test Fixture

    Connecting DUT Using Test Fixture 1. Press the Stop front-panel key to set your 4155B/4156B to idle state. If the standby indicator is lit, press the Standby front-panel key. 2. Select a proper socket module for your DUT, then set the module on the test fixture.
  • Page 147 For example, you can use the following connections as Kelvin connections on the test fixture. The Kelvin connection is available for the 4156B’s HRSMU and 41501A/B’s HPSMU. Examples: Kelvin Connection SMU(±200V= 1A Max)

  • Page 148: Using Connector Plate

    The potential of the guard terminal is equal to the output voltage. CAUTION Never connect the guard terminal to any other output, including circuit common, frame ground, or the terminals of any other unit. Doing so may damage the unit. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 149 Therefore, the current measured by SMU is same as current at measurement point because no current is leaked. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 150 To cancel the effect of this resistance, you can use Kelvin connections (4-wire), which means the force and sense lines are extended separately to the DUT. The Kelvin connection is available for the 4156B’s HRSMU and the 41501A/B’s HPSMU. Connect the probing needles to the terminals of the connector plate by using test leads or coaxial cables.
  • Page 151 So output error is not significant if the sense line wiring has a residual resistance of 10 W or less. Therefore, the specified voltage appears at the sense point (point where sense line contacts force line) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 152: Sweep Measurements

    “To Set up Primary Sweep” • “To Set up Secondary Sweep” • “To Set up Synchronous Sweep” • “To Set up Constant Output” • “To Set up SMU Pulsed Output” • “To Set up PGU Output” 4-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 153 5. Executing the measurement. The following tasks are described: • “To Use Standby Function” • “To Execute Calibration” • “To Use Offset Cancel Function” • “To Execute or Stop Measurement” Results. For example, displayed graphically. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-11...

  • Page 154: To Define Measurement Units

    VAR1 : Primary sweep output function (for SMU and VSU). • VAR2 : Secondary sweep output function (for SMU and VSU). • VAR1' : Synchronous sweep output function (for SMU and VSU). 4-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 155 SMU3 is connected to emitter. SMU1 is set to current source (I mode) and secondary sweep (VAR2) function. SMU2 is set to voltage source (V mode) and primary sweep (VAR1) function. SMU3 is set to COMMON. Example: Channel Definition: Sweep Measurement Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-13...

  • Page 156: To Set Up Primary Sweep

    NO OF STEP is automatically calculated from START, STOP, and STEP values. You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. 4-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 157 Making a Measurement Sweep Measurements Example The following example shows the primary sweep conditions (VAR1 parameters): Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-15...

  • Page 158: To Set Up Secondary Sweep

    The STOP value is automatically calculated from START, STEP, and NO OF STEP values. You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. 4-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 159 Making a Measurement Sweep Measurements Example The following example shows the secondary sweep conditions (VAR2 parameters): Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-17...

  • Page 160: To Set Up Synchronous Sweep

    Only for SMU. Enter the compliance value, and power compliance (ON or OFF) for the synchronous sweep source. You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. 4-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 161 Making a Measurement Sweep Measurements Example The following example shows the synchronous sweep conditions (VAR1' parameters): Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-19...

  • Page 162: To Set Up Constant Output

    You cannot change UNIT, NAME, and MODE in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. Example The following example shows the constant output conditions (CONSTANT parameters): 4-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 163: To Set Up Smu Pulsed Output

    Enter the pulse width value. 4. SMU PULSE: BASE Enter the pulse base value. You cannot change UNIT and NAME in this screen. To change the values, go to the CHANNELS: CHANNEL DEFINITION screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-21...
  • Page 164 The pulse peak values are the sweep output values calculated from the sweep start, stop, step values, and so on. • Figure (b) When the function (FCTN) is set to CONST. The pulse peak value is the output value of the constant output source. 4-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 165 Making a Measurement Sweep Measurements Example The following shows an example setup of SMU pulsed output on the MEASURE: SWEEP SETUP screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-23...

  • Page 166: To Set Up Pgu Output

    Or enter the number of pulses to output (for sampling measurement only). For the pulse period and pulse count values, the values you set for PGU1 are also used for PGU2. The following figure shows the relation between pulse waveform and setup parameters. 4-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 167 Desired output voltage value in SOURCE field on MEASURE: PGU SETUP screen. Example The following example shows setup of PGU pulsed output on the MEASURE: PGU SETUP screen. You cannot set compliance for a PGU, which has a 100 mA current limit. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-25...

  • Page 168: To Use Standby Function

    ON units are returned to same output value as before measurement or stress. If Standby indicator is ON, then pressing the Standby key disables the Standby function, and Standby output stops. Pressing the Stop key has no affect on the Standby state. 4-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 169: To Define A User Function

    • Built-in functions such as DELTA and SQRT. For details about expressions, numerical operators, and built-in functions, refer to Chapter 7. Example The following figure shows an example setup to define Hfe. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-27...

  • Page 170: To Display Graphics Results

    X and Y intercepts and gradient of the analysis lines. To set up variable to be displayed on the GRAPHICS screen In DATA VARIABLES fields, select secondary softkey for desired variable. 4-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 171 Making a Measurement Sweep Measurements Example The following figure shows an example to set up both Y1 and Y2 axes, and to set grid to ON. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-29...

  • Page 172: To Display List Results

    To set up variable to be displayed on the LIST page In DATA VARIABLES fields, select secondary softkey for desired variable. Example Following figure is an example setup to display VE, IC, and IB on LIST screen. 4-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 173: To Execute Calibration

    4. Press green key, then Stop key to measure the zero offset data. Then this measured data is used to compensate the measurement results when measurement is performed. For more details about the zero offset cancel function, refer to “Zero Offset Cancel” in Chapter 3. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-31...

  • Page 174: To Execute Or Stop Measurement

    Most recent measurement results are displayed on GRAPHICS or LIST screen. Append Executes measurement one time. Does not clear GRAPHICS or measurement LIST screen. That is, measurement results are added to the existing results. 4-32 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 175: To Use R-Box

    Making a Measurement Sweep Measurements To Use R-Box 1. Connect the 16441A R-Box to the 4155B/4156B and to the 16442A Test Fixture or connector plate on your shield box. For details about connections, refer to “R-BOX Control” in Chapter 3.
  • Page 176 ( 1 MW) characteristics. Connect the resistance of the 16441A as shown in following figure. 16441A R-Box Example The following figure shows an example setup to connect 10 kW resistance to SMU1 and SMU2. 4-34 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 177: Knob Sweep Measurements

    • to determine a parameter value for normal sweep • to quickly make a rough measurement of a DUT characteristics The following figure shows the KNOB SWEEP screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-35...

  • Page 178: To Execute Knob Sweep Measurement

    Y-AXIS REGION Selects the Y-axis display range from +, -, or +/-. X-AXIS DISPLAY Selects the X-axis direction from NORMAL or REVERSE. Y-AXIS DISPLAY Selects the Y-axis direction from NORMAL or REVERSE. Sets grid on or off. GRID 4-36 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 179 Note that the power compliance function is not available for the knob sweep measurement. So the POWER COMP column is set to OFF. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-37...
  • Page 180 If the power compliance function (POWER COMP) has been set: The function does not work. Same as POWER COMP = OFF. Example The following figure shows an example to set both X axis and Y axis display regions to positive. 4-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 181: To Stop Knob Sweep Measurement

    To Stop Knob Sweep Measurement To stop the knob sweep measurement, press Stop front-panel key. This returns the 4155B/4156B operation state to the previous state. For example, if the knob sweep measurement starts from the idle state, the operation state returns to the idle state.

  • Page 182: Sampling Measurements

    The following tasks are described: • To Set up Sampling Parameters • To Set up Constant Output • To Define Measurement Stop Conditions • To Set up PGU Pulsed Output (see previous section) 4-40 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 183 After Measurements (see previous section) • To Execute Calibration (see previous section) • To Cancel Zero Offset (see previous section) • To Execute or Stop Measurement (see previous section) Results. For example, displayed graphically. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-41...

  • Page 184: To Define Measurement Units

    First character must be alphabet character. To disable a unit Move the pointer to the row of the unit, then select the DELETE ROW secondary softkey. The settings in the row are deleted. 4-42 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 185 Making a Measurement Sampling Measurements Example The following figure shows an example setup to define sampling measurement units. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-43...

  • Page 186: To Set Up Sampling Parameters

    This softkey is available only for the linear sampling. For details about sampling completion conditions, see “To Define Stop Conditions” on page 4-47. 4-44 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 187 The following figure shows the relation between the sampling parameters and sampling measurement. You can set a hold time by entering a number (units: seconds) in the HOLD TIME field. Example The following figure shows example setup of the sampling parameters. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-45...

  • Page 188: To Set Up Constant Output

    To set up compliance value for constant output Set desired value in the COMPLIANCE field of the CONSTANT table. For details about compliance, see “Compliance” in Chapter 3. Example The following example shows the constant output conditions: 4-46 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 189: To Define Stop Conditions

    Stop key in the MEASUREMENT key group is pressed. • Specified total sample time has elapsed. • The 4155B/4156B receives GPIB command to stop sampling. • An emergency condition occurs on the 4155B/4156B. • Interlock terminal opens due to high voltage. (See Chapter 2 of User's Guide General Information.)
  • Page 190 Making a Measurement Sampling Measurements Example The following figure shows an example setup of stop condition. 4-48 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 191: Stress Force

    Making a Measurement Stress Force Stress Force This section covers the tasks for stress forcing. Two types of stress can be forced by the 4155B/4156B: • dc stress • Dc voltage stress can be forced from SMUs, VSUs, or PGUs.
  • Page 192 “To Set up ac (Pulse) Output” on page 4-55 • “To Set up dc Output” on page 4-57 4. Executing the stress forcing. The following task is described in “To Force Stress” on page 4-58. 4-50 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 193: To Set Up Stress Source Channels

    1. Perform first 3 steps described above. 2. In the FCTN field, select NSYNC secondary softkey. If you use two PGUs as pulsed sources (VPULSE), both must be SYNC or both NSYNC. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-51...
  • Page 194 Making a Measurement Stress Force Example The following figure shows an example setup to set two PGUs to ac stress source. 4-52 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 195: To Set Up Stress Condition/Timing

    Abnormal status means the following: • SMU reaches its compliance setting. • Current of VSU exceeds ±100 mA. • SMU or VSU oscillates. • A/D converter overflow occurs. • Average current of PGU exceeds ±100 mA. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-53...
  • Page 196 If so, the ACCUMULATED STRESS field on the STRESS: STRESS FORCE screen also changes to the new value. Example The following figure shows an example setup of stress condition. 4-54 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 197: To Set Up Ac (Pulse) Output

    To set output impedance of PGU1 or PGU2 In the IMPEDANCE field, select: • LOW secondary softkey to set output impedance to low (approximately zero). 50 ohm secondary softkey to set output impedance to 50 W. • Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-55...
  • Page 198 Making a Measurement Stress Force Delay time The following figure shows the meaning of delay time. Example The following figure shows an example to set up ac stress. 4-56 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 199: To Set Up Dc Output

    Modify the UNIT, NAME, and MODE fields on the STRESS: CHANNEL DEFINITION screen. Example The following figure shows an example setup to set source (SMU1) to 5.00 V and compliance (SMU1) to 1.00 mA. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-57...

  • Page 200: To Force Stress

    To reset ACCUMULATED STRESS value to 0 s Select RESET ACCUM STRESS secondary softkey. To change ACCUMULATED STRESS value On the STRESS: STRESS SETUP screen, enter the desired value in the ACCUMULATED STRESS field. 4-58 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 201 Making a Measurement Stress Force Example The following figure shows an example of STRESS: STRESS FORCE screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-59...

  • Page 202: To Use Selector

    PGU secondary softkey to connect PGU to DUT during stress force state. • OPEN secondary softkey to disconnect SMU, PGU, and DUT during stress force state. • PGU OPEN secondary softkey to disconnect PGU from DUT by semiconductor switch during stress force state. 4-60 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 203 Normally, the relay switch has three states: SMU is connected to DUT, PGU is connected to DUT, and neither is connected to DUT. The semiconductor switch, which is in the PGU line, is used for high-speed switching. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 4-61...
  • Page 204 Making a Measurement Stress Force Example Following shows an example setup that connects two SMUs to DUT during measurement state, and connects two PGUs to DUT during stress force state. 4-62 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 205: Analyzing Measurement Results

    Analyzing Measurement Results Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 206 Analyzing Measurement Results Agilent 4155B/4156B can analyze measurement results of the GRAPH/LIST screen group by using lines, markers, and cursors. You can perform manual or automatic analysis. For automatic analysis function, you set up the DISPLAY: ANALYSIS SETUP screen before starting measurements. Then, after the measurements are performed, the lines and markers are positioned automatically according to the setup.

  • Page 207: Manual Analysis

    • “To Scroll the LIST screen” on page 5-24 LIST screen: • “To Display or Move Marker on LIST screen” on page 5-25 • “To Change Variables of LIST screen” on page 5-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 208: To Specify A Measurement Point On Curve

    Select MARKER SKIP secondary softkey. Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP secondary softkey. To move marker fast Press Fast front-panel key of the MARKER/CURSOR key group while rotating rotary knob. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 209 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to desired measurement point and to set the Y1 axis marker to active. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 210: To Specify Between Measurement Points On Curve

    Select MARKER SKIP secondary softkey. Marker moves to next VAR2 step curve or next append curve every time you select MARKER SKIP. To move marker fast Press Fast front-panel key of the MARKER/CURSOR key group while rotating rotary knob. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 211 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to move marker to points between measurement points by setting INTERPOLATE softkey to ON. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 212: To Display Or Move Cursor

    Set CURSOR secondary softkey to OFF. To move cursor fast Press arrow keys and Fast key of the MARKER/CURSOR key group simultaneously. Example The following figure shows an example to display a short cursor. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 213: To Adjust Display Range To Measurement Curve Automatically

    If no cursor is displayed before step 3, performing step 3 displays a long cursor at the center of the plotting area, then zoom is performed. To return to original scaling Select CANCEL SCALING secondary softkey. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 214: To Center Display At Cursor Location

    When lines are displayed and when ON is set in the LINE PARAMETER field on the DISPLAY: DISPLAY SETUP screen, their X and Y intercepts and gradients are also displayed in the plotting area. 5-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 215 2. Set DATA VAR secondary softkey to OFF. To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey. Example The following figure shows an example to draw a line through two specified points. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-11...

  • Page 216: To Draw Line Through Specified Point With Specified Gradient

    Use the following procedure: 1. Select DISPLAY SETUP primary softkey. 2. Set DATA VAR secondary softkey to OFF. To move the selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey. 5-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 217 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a line through specified point with specified gradient. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-13...

  • Page 218: To Draw Tangent To Specified Point Of Measurement Curve

    1. Select DISPLAY SETUP primary softkey. 2. Set DATA VAR secondary softkey to OFF. To move marker between two adjacent measurement points See “To Specify between Measurement Points on Curve” on page 5-6. 5-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 219 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to draw a tangent to a specified measurement point. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-15...

  • Page 220: To Draw Regression Line For Specified Region

    To select the cursor you want to move, use the SELECT CURSOR secondary softkey. The range used for calculating the regression line is defined by the position of the two cursors as shown in the following figure. 5-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 221 2. Set DATA VAR secondary softkey to OFF. To move selected cursor to the selected marker position Select CURSOR TO MARKER secondary softkey. Example The following figure shows an example to draw a regression line for the specified region. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-17...

  • Page 222: To Display And Select A Line

    1. Select DISPLAY SETUP primary softkey. 2. Set GRID secondary softkey to ON. Grid is displayed. Selecting GRID secondary softkey toggles between ON and OFF. To turn off grid Set GRID secondary softkey to OFF. 5-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 223: To Change Data Variable On Graph

    4. Select EXIT primary softkey to exit the RE-SETUP GRAPH mode. To exit without changing data variable Select CANCEL primary softkey. Example The following figure shows an example setup to change the data variable to be displayed. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-19...

  • Page 224: To Change Range Of X Or Y Axis Scale

    4. Select EXIT primary softkey to exit RE-SETUP GRAPH mode. To exit without changing range of X or Y axis scale Select CANCEL primary softkey. Example The following figure shows an example setup to change maximum value of Y1 axis. 5-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 225: To Change Variable Assigned To X, Y1, Or Y2 Axis

    To exit without changing variable assigned to X, Y1, or Y2 axis Select CANCEL primary softkey. Example The following figure shows an example setup to change the variable that is assigned to Y1 axis. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-21...

  • Page 226: To Overlay An Internal Memory Measurement Curve Onto Plotting Area

    To change the present scale to the same scale as overlay curve Select SCALE TO OVERLAY secondary softkey. To return to the original scale, you need to select SCALING primary softkey, then select CANCEL SCALING secondary softkey. 5-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 227 Analyzing Measurement Results Manual Analysis Example The following figure shows an example to overlay a measurement curve (that is stored in internal memory 1) onto the presently displayed measurement curve. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-23...

  • Page 228: To Scroll The List Screen

    When marker is displayed, marker does not move during scrolling. To scroll list fast Press Fast key of the MARKER/CURSOR key group while pressing an arrow key of the MARKER/CURSOR key group. 5-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 229: To Display Or Move Marker On List Screen

    To move marker to next append data Select NEXT APPEND secondary softkey. Marker moves to next append data every time you select NEXT APPEND secondary softkey. Example The following figure shows an example to display marker. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-25...

  • Page 230: To Change Variables Of List Screen

    3. Select EXIT primary softkey to exit RE-SETUP LIST mode. To exit without changing LIST variables Select CANCEL primary softkey. Example The following figure shows an example to change the LIST variables. 5-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 231: Automatic Analysis

    If you define both the automatic marker positioning and automatic line drawing functions, the functions are executed in the following order: 1. Automatic line drawing for LINE1. 2. Automatic line drawing for LINE2. 3. Automatic marker positioning. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-27...

  • Page 232: To Draw Line By Specifying Two Points

    If you selected AFTER, select secondary softkey to enter desired data variable in field (7). e. If you selected AFTER, enter desired expression in field (8). 9. Specify the other point by step 5, then step 6 or 7. 5-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 233 The following figure shows an example setup to automatically draw a line through two specified points. One point is specified by X-Y coordinate mode and other point is specified by data condition mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-29...

  • Page 234: To Draw Line By Specifying Gradient And One Point

    If you selected AFTER, select secondary softkey to enter desired data variable in field (7). e. If you selected AFTER, enter desired expression in field (8). 9. In the Gradient field, enter gradient expression. 5-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 235 Move the pointer to field (1), then select DISABLE secondary softkey. Setup fields disappear. Example The following figure shows an example setup to automatically draw a line through the specified point with the specified gradient. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-31...

  • Page 236: To Draw Tangent To Specified Measurement Point

    To specify a point between two measurement points Set Interpolate field to ON. To disable (clear) the settings Move the pointer to field (1), then select DISABLE secondary softkey. Setup fields disappear. 5-32 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 237 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically draw a tangent line to a specified measurement point. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-33...

  • Page 238: To Draw Regression Line By Specifying Two Points

    If you selected AFTER, select secondary softkey to enter desired data variable in field (7). e. If you selected AFTER, enter desired expression in field (8). 9. Specify the other point by step 5, then step 6 or 7. 5-34 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 239 To specify a point between two measurement points Set Interpolate field to ON. To disable (clear) the settings Move the pointer to field (1), then select DISABLE secondary softkey. Setup fields disappear. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-35...
  • Page 240 The following figure shows an example setup to automatically draw a regression line. The range for the regression calculation is specified by two points. One point is specified by X-Y coordinate mode and other point is specified by data condition mode. 5-36 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 241: To Display Marker At Specified Point

    For the meaning of expression that you can enter in step 4 and 7, see “Expression” in Chapter 7. To specify a point between two measurement points Set Interpolate field to ON. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5-37...
  • Page 242 Analyzing Measurement Results Automatic Analysis Example The following figure shows an example setup to automatically display marker at specified point. 5-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 243: Screen Organization

    Screen Organization Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 244 Screen Organization This chapter is a reference for operating Agilent 4155B/4156B by using the front-panel controls. The 4155B/4156B is operated by setup screens and results screen displayed on the screen. The following sections explain these setup screen structure. • “Screen Structure”...

  • Page 245: Screen Structure

    Screen Organization Screen Structure Screen Structure The 4155B/4156B has seven screen groups that have a total 22 setup screens as shown in Figure 6-1. Figure 6-1 Screen Structure of 4155B/4156B Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 246 For details about the System screen Group, refer to "System Screen Organization" in User's Guide General Information. To display the KNOB SWEEP screen, press: 1. the front-panel green key 2. Single key For details about the KNOB SWEEP screen, see “Knob Sweep Function” in Chapter Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 247: Channels Screen Group

    Select CHANNEL DEF softkey to move to CHANNELS: CHANNEL DEFINITION screen. • Select USER FCTN softkey to move to CHANNELS: USER FUNCTION DEFINITION screen. • Select USER VAR softkey to move to CHANNELS: USER VARIABLE DEFINITION screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 248: Channels: Channel Definition Screen

    SWEEP secondary softkey to set sweep measurement. • SAMPLING secondary softkey to set sampling measurement. To change settings (except for system screen group) to default initial settings, select DEFAULT MEASURE SETUP secondary softkey. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 249 Application setup data in internal memories MEM secondary softkeys indicate that setup or measurement result data is in the internal memory. When you turn on the 4155B/4156B without a diskette or network disk, the following secondary softkeys are displayed: MEM1 M...
  • Page 250 CHANNELS Screen Group CHANNELS UNIT. This column lists all the units that are installed in the 4155B/4156B. VNAME. VNAME field assigns a variable name for voltage that will be forced or measured. You can use this name as a reference on the other screens. If channel does neither V force nor V measurement, you can omit VNAME.
  • Page 251 SMUs to VPULSE or IPULSE, or cannot set one SMU to VPULSE and another SMU to IPULSE. • For sampling measurement, you cannot set VPULSE or IPULSE for SMUs. You can set VPULSE for PGUs. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 252 See “Types of Operation State” in Chapter 3 for more information on the standby state. Restrictions: • If both PGUs are set to VPULSE, the STBY setting of both PGUs must be the same. • For STBY=ON channel, SERIES RESISTANCE setting must be 0 ohm. 6-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 253 To use Kelvin connection for HRSMU or HPSMU, you must select 0 W. • For STBY channels, you can set 0 W only. • For COMMON channels, you can set 0 W only. • Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-11...

  • Page 254: Channels: User Function Definition Screen

    NAME must be 6 or less alphanumeric characters. First character must be alphabet character. • NAME must be different from other names. The alphabet characters are case sensitive. For example, HFE is different from Hfe. 6-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 255 CHANNELS: CHANNEL DEFINITION screen. For syntax, see “Expression” in Chapter 7. For example, to define a user function for mutual conductance gm of an FET, define gm on this screen as follows: Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-13...

  • Page 256: Channels: User Variable Definition Screen

    NAME must be 6 or less alphanumeric characters. First character must be alphabet character. • NAME must be different from other names. The alphabet characters are case sensitive. For example, HFE is different from Hfe. 6-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 257 10001 or less (total for all measurement data and user variables). You can enter the size by using the keyboard or front-panel keys. To delete a user variable, select DELETE ROW softkey to delete the NAME, UNIT, and SIZE entries. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-15...

  • Page 258: Measure Screen Group

    Select PGU SETUP softkey to move to MEASURE: PGU SETUP screen. • Select MEASURE SETUP softkey to move to MEASURE: MEASURE SETUP screen. • Select OUTPUT SEQ softkey to move to MEASURE: OUTPUT SEQUENCE screen. 6-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 259: Measure: Sweep Setup Screen

    SWEEP MODE field sets single or double sweep mode. In this field, select: • SINGLE secondary softkey to specify the single sweep mode. • DOUBLE secondary softkey to specify the double sweep mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-17...
  • Page 260 To disable the power compliance function, select the OFF secondary softkey. If an SMU is set to VPULSE or IPULSE mode and if the SMU is set to VAR1, you cannot set power compliance for the VAR1 SMU. 6-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 261 OFF secondary softkey. If an SMU is set to VPULSE or IPULSE mode and if the SMU is set to VAR1', you cannot set power compliance for the VAR1' SMU. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-19...
  • Page 262 SMUs, or when 10k ohm, 100k ohm, or 1M ohm is selected in the SERIES RESISTANCE field. If power compliance is set for an SMU, the CONT AT ANY secondary softkey is not displayed. 6-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 263 CONSTANT fields. To show other units, select NEXT UNIT secondary softkey. To scroll the units, put field pointer in most right or left column, then press the right arrow or left arrow MARKER/CURSOR front-panel key. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-21...

  • Page 264: Measure: Sampling Setup Screen

    LOG10, LOG25, or LOG50 secondary softkey to specify the logarithmic sampling mode. The number specifies how many samples to take per decade. • Select THINNED-OUT softkey to specify the thinned-out sampling mode, which discards less recent samples. 6-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 265 FILTER This field specifies SMU filter to ON or OFF. If this field is set to ON, overshoot is decreased, but settling time takes several ms. Be aware of this if you set initial interval to a short time. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-23...
  • Page 266 NAME value is less than absolute |Val|<|Th| THRESHOLD value. • EVENT NO. EVENT NO. specifies sampling to stop if event occurs EVENT NO. times. EVENT NO. can be an integer from 1 to 200. 6-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 267 CONSTANT fields. To show other units, select NEXT UNIT secondary softkey. To scroll units, put field pointer in most right or left column, then press the right arrow or left arrow MARKER/CURSOR front-panel key. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-25...

  • Page 268: Measure: Pgu Setup Screen

    PERIOD field specifies the pulse period of the PGU. Note that the pulse period of PGUs is independent from that of the SMUs. • WIDTH WIDTH field specifies the pulse width. The pulse width must be less than the pulse period. 6-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 269 IMPEDANCE field specifies the PGU output impedance. In this field, select: LOW secondary softkey to set output impedance to about 0 W. • 50 ohm secondary softkey to set output impedance to 50 W. • Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-27...
  • Page 270 CHANNEL DEFINITION screen, this field is automatically set to free run mode. CONSTANT UNIT and NAME are defined on CHANNELS: CHANNEL DEFINITION screen. In the SOURCE field, you specify the output value. 6-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 271: Measure: Measure Setup Screen

    User Comment In this field, you can enter a desired comment. The comment you enter here is also displayed in the CHANNELS, MEASURE, DISPLAY, and GRAPH/LIST screen groups. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-29...

  • Page 272: Measurement Range

    CANCEL fields. If zero offset cancel mode is set to ON, then ON or OFF appear automatically in each field depending on the measurement range. For details, see “Zero Offset Cancel” in Chapter 3. 6-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 273 For details, see “Integration Time” in Chapter 3. WAIT TIME For each unit, the 4155B/4156B automatically uses a wait time that depends on the range value. This is the default wait time. In the WAIT TIME field, the value you specify is multiplied times the default wait time.

  • Page 274: Measure: Output Sequence Screen

    CHANNEL DEFINITION screen are shown. To change the output order of the units, enter unit names in desired order by selecting secondary softkeys. For details about default sequence, see “Sequential Mode” in Chapter 3. 6-32 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 275 • Select TRIG OUT secondary softkey to enable the following functions: • For a normal (non-pulse) sweep measurement, the 4155B/4156B outputs an edge-trigger signal when a measurement starts for each step. • For a pulsed sweep measurement, the 4155B/4156B outputs an edge-trigger signal synchronized with the pulse leading edge.
  • Page 276 External Instrument” in Chapter 3. When you set TRIG IN in the FUNCTION field, this field has no meaning, so "-----" is displayed. • POLARITY In the POLARITY field, select secondary softkeys to select trigger polarity as follows: POSITIVE or NEGATIVE. 6-34 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 277: Display Screen Group

    ANALYSIS PREV NEXT SETUP SETUP PAGE PAGE • Select DISPLAY SETUP softkey to move to the DISPLAY: DISPLAY SETUP screen. • Select ANLYSIS SETUP softkey to move to DISPLAY: ANALYSIS SETUP screen. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-35...

  • Page 278: Display: Display Setup Screen For Graphic Results

    GRAPHICS secondary softkey to change to graphics mode. GRAPHICS In the GRAPHICS area, you set up the X, Y1, and Y2 axes. You must set up the X and Y1 axes. Y2 axis is optional. 6-36 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 279 Even if the setup data variables are defined using variables that are not set in the NAME field of the GRAPHICS table, the variables are automatically measured after pressing a measurement front-panel key. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-37...

  • Page 280: Display: Display Setup Screen For List Results

    You can enter up to eight variable names. When the pointer is located in NAME field, you can select desired variable names in secondary softkey area. 6-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 281 Even if the setup data variables are defined using variables that are not set in the NAME field of the LIST table, the variables are automatically measured after pressing a measurement front-panel key. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-39...

  • Page 282: Display: Analysis Setup Screen

    “Line Drawing” in Chapter 7. User Comment In this field, you can enter a desired comment. This comment is also displayed in the CHANNELS, MEASURE, DISPLAY, and GRAPH/LIST screen groups. 6-40 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 283 ] LINE ON [Y1] between a point [AT X: [0 Y: [0 and a point [WHERE] [DGM ] = [MAX(DGM)*0.01 [AFTER] [DGM ] = [MAX(DGM) On GRAPH/LIST: GRAPHICS screen, LINE secondary softkey must be ON. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-41...
  • Page 284 ] = [MAX(DGM)*0.01 [AFTER] [DGM ] = [MAX(DGM) Gradient: [ In a field after Gradient:, you enter a gradient value or expression. On GRAPH/LIST: GRAPHICS screen, LINE secondary softkey must be ON. 6-42 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 285 LINE1: [TANGENT ] LINE ON [Y1] between a point where [DGM ] = [MAX(DGM)*0.01 [AFTER] [DGM ] = [MAX(DGM) On GRAPH/LIST: GRAPHICS screen, LINE secondary softkey must be ON. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-43...
  • Page 286 LINE1: [REGRESSION] LINE ON [Y1] between a point [AT X: [0 Y: [0 and a point [WHERE] [DGM ] = [MAX(DGM)*0.01 [AFTER] [DGM ] = [MAX(DGM) 6-44 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 287 You can also use the interpolation mode for the automatic analysis function by selecting the ON secondary softkey in the Interpolate field. When interpolation mode is on, you can position marker between measurement points. Select OFF to turn interpolation mode to off. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-45...

  • Page 288: Graph/List Screen Group

    For sweep measurements: AXIS MARKER SPREAD SWEEP TIMING CONST SHEET SETUP SETUP SETUP SETUP For sampling measurements: AXIS MARKER SPREAD SAMPLING STOP CONST SHEET SETUP SETUP COND SETUP 6-46 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 289: Graph/List: Graphics Screen

    In this area, measurement curves are drawn according to measurement results. You can analyze measurement results by using lines or marker in this area. If you use lines, the X and Y intercept points and gradient are displayed. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-47...
  • Page 290 For Y1 axis, marker is a circle (o). For Y2 axis, marker is an asterisk (*). Active marker is highlighted for the axis that is selected by AXIS softkey. The 4155B/4156B remembers the location of marker. That is, when marker is turned off, then redisplayed, it appears at its previous location.
  • Page 291 If the pointer is in a CURSOR coordinate field, the following softkey appears: • Select MIN/MAX secondary softkey to move cursor to minimum axis point. If cursor is at minimum point, cursor moves to maximum point. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-49...
  • Page 292 OFF, SHORT, and LONG, which is shown on the CURSOR softkey. • AUTO ANALYSIS softkey Select AUTO ANALYSIS secondary softkey to redisplay the auto-analysis that was originally displayed after the measurement was finished. 6-50 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 293 If present mode is gradient mode, ON is displayed on the GRAD MODE softkey. For gradient line mode, GRAD VALUE secondary softkey is displayed. If line mode is gradient mode, selecting GRAD MODE softkey changes to normal mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-51...
  • Page 294 Select MARKER SKIP secondary softkey to move the marker to the next measurement curve that was added by VAR2 variable or append measurement. This softkey is displayed only when line mode is tangent. 6-52 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 295 Both marker and cursor must be displayed. • CANCEL SCALING softkey Select CANCEL SCALING secondary softkey to redraw the plotting area with the original settings (most recent DISPLAY: DISPLAY SETUP screen settings or RE-SETUP GRAPH settings). Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-53...
  • Page 296 Select DATA VAR secondary softkey to toggle on or off the display of data variable values. The present status of the display of the data variable display is shown on the DATA VAR softkey. 6-54 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 297 • SCALE TO OVERLAY softkey Select SCALE TO OVERLAY secondary softkey to force the present scaling values to that of overlaid plane even if unit of axis is different. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-55...
  • Page 298 Select VAR2 START secondary softkey to change the start value of the secondary sweep VAR2. The present start value is shown on this softkey and in the data entry area. Then you can change the value. 6-56 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 299 Then you can change the value. Then selecting COMP softkey again displays the power compliance value in the data entry area. You can change the value. To disable the power compliance, enter 0 (zero) or OFF. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-57...
  • Page 300 Select PULSE WIDTH secondary softkey to change the pulse width of SMU pulse. The present pulse width is shown on this softkey and in the data entry area. Then you can change the value. 6-58 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 301 The present hold time is shown on this softkey and in the data entry area. Then you can change the value. You can change the hold time while measurement is being performed. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-59...
  • Page 302 Select EVENT NUMBER secondary softkey to change the event number of stop condition. The present event number is shown on this softkey and in the data entry area. Then you can change the value. 6-60 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 303 Then selecting the same softkey again displays the present compliance in the data entry area. You can change the compliance. Use the following methods to change the value: • Enter number by using numeric keys. • Change number by rotating rotary knob. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-61...

  • Page 304: Graph/List: List Screen

    5 steps, then the first VAR2 step is index 1 to 5, second VAR2 step is index 6 to 10, and so on. If you have appended measurements, index number for each append measurement starts at 1. 6-62 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 305: Measurement Results

    If you set up a data variable that uses a line or marker read-out function, selecting this softkey changes displayed data variable value according to read-out function. This softkey is displayed only if Y2 axis is set up. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-63...
  • Page 306 GRAPH/LIST: GRAPHICS screen, the marker also moves on the GRAPH/LIST: LIST screen. The 4155B/4156B remembers the location of marker. So, if you turn marker display OFF, then the marker appears at the same location when you turn marker ON again.
  • Page 307 Select MARKER SKIP secondary softkey to move the marker to the next VAR2 value or to the next appended measurement data. • NEXT APPEND softkey Select NEXT APPEND secondary softkey to move the marker to the next appended measurement data. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-65...
  • Page 308 Select ALL secondary softkey to specify all result data. • UNIT Specify whether to include units (for example, V or ms). • ON secondary softkey to include units. • OFF secondary softkey to not include units. 6-66 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 309 When the pointer is located in the data variable display area, allowable variable names are shown in the secondary softkey area. Measurement units change automatically according to variable you select. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-67...
  • Page 310 You can change the value. Then selecting COMP softkey again displays the present power compliance value in the data entry area. You can change the value. To disable the power compliance, enter 0 (zero) or OFF. 6-68 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 311 You can change the value. Then selecting COMP softkey again displays the power compliance value in the data entry area. You can change the value. To disable the power compliance, enter 0 (zero) or OFF. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-69...
  • Page 312 Select PULSE WIDTH secondary softkey to change the pulse width of SMU pulse. The present pulse width is shown on this softkey and in the data entry area. Then you can change the value. 6-70 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 313 The present hold time is shown on this softkey and in the data entry area. Then you can change the value. You can change the hold time while measurement is being performed. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-71...
  • Page 314 Select EVENT NUMBER secondary softkey to change the event number of stop condition. The present event number is shown on this softkey and in the data entry area. Then you can change the value. 6-72 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 315 Then selecting the same softkey again displays the compliance value in the data entry area. You can change the compliance. Use the following methods to change the value: • Enter number by using numeric keys. • Change number by rotating rotary knob. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-73...

  • Page 316: Stress Screen Group

    STRESS Screen Group STRESS Screen Group STRESS screen group has the following screens: Stress channel definition: For defining the stress channels of the 4155B/4156B, setting up SMU/PG selector, and setting up the trigger. Stress setup: For setting the stress parameters.

  • Page 317: Stress: Channel Definition Screen

    CHANNELS table defines the mode, name, and function for the stress state. • UNIT This column lists all the source units that are installed in the 4155B/4156B. • NAME of MEASURE Source name that was defined for the measurement state (on CHANNELS: CHANNEL DEFINITION screen).
  • Page 318 4. Select the secondary softkey of the desired unit. The selected unit appears at the pointer. Perform steps 3 and 4 until you assign units as desired. Make sure that the same unit is not assigned to multiple rows. Then select EXIT CHANNEL ASSIGN softkey. 6-76 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 319 • If both PGUs are set to pulsed source (VPULSE), you cannot set one PGU to SYNC and other PGU to NSYNC. Both must be set to SYNC or both to NSYNC. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-77...
  • Page 320 DISABLE secondary softkey to disable the trigger function. • POLARITY In this field, select: • POSITIVE secondary softkey to set positive logic for the output trigger. • NEGATIVE secondary softkey to set negative logic for the output trigger. 6-78 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 321: Stress: Stress Setup Screen

    PGU set to VPULSE and SYNC. In the next field, FREE RUN secondary softkey appears. Select the FREE RUN softkey to force stress continuously. Entering 0 (zero) also sets to free run mode. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-79...
  • Page 322 Select STOP AT ANY ABNORM secondary softkey (stress will stop if any abnormal status occurs). • Select STOP AT COMPLIANCE secondary softkey (stress will stop only if SMU reaches its compliance setting). 6-80 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 323 This field specifies pulse width, which must be less than pulse period. • DELAY TIME This field specifies the delay time from the pulse start time. The delay time must be less than or equal to the pulse period. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-81...
  • Page 324 To show other units, select NEXT UNIT secondary softkey. To scroll units, put field pointer in most right or left column, then press the left arrow or right arrow MARKER/CURSOR front-panel keys. 6-82 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 325: Stress: Stress Force Screen

    STRESS screens. Select CHANGE COMMENT secondary softkey to enter or edit the comment in this field. When you select this softkey, you can enter or edit the comment in the data entry area. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-83...
  • Page 326 To reset accumulated stress on both screens to 0, select RESET ACCUM STRESS secondary softkey. To change to non-zero value, change accumulated stress on STRESS: STRESS SETUP screen. 6-84 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 327: Screen Operation

    Softkeys related to the field appear when you move the pointer to the field. The 4155B/4156B has three types of fields. The following describes the methods for entering or editing input data of these field types: Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 328 Then, press Enter front-panel key (value is entered into the numeric data field at the pointer location). • Rotate the rotary knob to increase or decrease the value. Rotate clockwise to increase value. Rotate counterclockwise to decrease value. 6-86 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 329: Blue Front-Panel Key Usage

    Lowercase blue-key shift non-shift blue key Uppercase blue-key shift Lowercase blue-key shift green key, then blue key Lowercase blue-key shift Uppercase blue-key shift green key, then blue key Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-87...

  • Page 330: Green Front-Panel Key Usage

    Calculates any expression entered in the data entry area. The front-panel green key can also be used to perform dump (Plot/Print key), knob sweep (Single key), and zero offset cancel (Stop key) operations. 6-88 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 331: Edit Front-Panel Keys

    The key buffer stores the 10 most recent entries from the data entry area. You can recall the stored entries using Recall key, as described above. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 6-89...

  • Page 332: Status Indicators

    Screen Organization Status Indicators Status Indicators The status indicators indicates the present status of the 4155B/4156B. The display contains the following status indicators. (1) indicates the following status: The 4155B/4156B is waiting for trigger input from an external instrument. The 4155B/4156B is drawing a measurement curve.

  • Page 333: Data Variable And Analysis Function

    Data Variable and Analysis Function Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 334 Data Variable and Analysis Function This chapter explains the display and analysis functions of Agilent 4155B/4156B: • “Data Variable” • “Expression” • “Built-in Function” • “Read Out Function” • “Analysis Function” Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 335: Data Variable

    VNAME or INAME columns of CHANNELS: CHANNEL DEFINITION screen. For a voltage MODE, the measurement result name is specified in the INAME column. For a current MODE, measurement result name is specified in VNAME column. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 336 The index number of the first data is 1. For a subordinate sweep measurement, the index number continues to increment by 1 between secondary sweep steps, that is, • last data of a primary sweep: index • first data of next primary sweep: index+1 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 337: User Function

    For the syntax of an expression, refer to “Expression” on page 7-8. Example To define a user function for mutual conductance gm of an FET, define gm on the CHANNELS: USER FUNCTION DEFINITION screen as follows: NAME UNIT DEFINITION DELTA(Id)/DELTA(Vg) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 338: User Variable

    ASSIGN @Hp4155 TO 800 OUTPUT @Hp4155;":FORM:DATA ASC" OUTPUT @Hp4155;":TRAC:DEF 'UVAR1',5" OUTPUT @Hp4155;":TRAC:DATA 'UVAR1',1.1,1.2,1.3,1.4,1.5" Format of data to be transferred is ASCII format. Defines the name of user variable and number of data. Transfers the data. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 339: Syntax Of Data Variable Name

    So, in this case, you cannot use the built-in function in an expression. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 340: Expression

    When an expression contains more than one operation, the order of operation is determined by operator precedence. Operations with the highest precedence are performed first. Multiple operations with the same precedence are performed left to right. The following table shows the arithmetic operator precedence. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 341 Data Variable and Analysis Function Expression Figure 7-1 Expression Syntax Figure 7-2 Numeric Constant Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 342 A keyword that invokes the 4155B/4156B’s built-in function. Refer to “Built-in Function” on page 7-11. read out function keyword A keyword that invokes the 4155B/4156B’s built-in read out function. Refer to “Read Out Function” on page 7-20. 7-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 343: Built-In Function

    ANALYSIS SETUP screen. • For direct keyboard calculations. The following functions are available: • • • • COND • DELTA • DIFF • • INTEG • • • MAVG • • • SQRT Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-11...

  • Page 344: Abs

    Returns the average value of sweep data or sampling data. Syntax AVG(expression) For subordinate sweep measurement, this function returns the average value of the primary sweep for the secondary sweep step. Example To return the absolute value of ID: AVG(ID) 7-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 345: Cond

    If value of 1st expression or a 2nd expression is invalid, the value for the previous measurement index number is used for the comparison. Example COND(ID-VG,SQRT(ID)-VG,VD,VGS-VTH) returns: • VD if ID-VG < SQRT(ID)-VG. • VGS-VTH if ID-VG ³ SQRT(ID)-VG. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-13...

  • Page 346: Delta

    1 for the first step of each primary sweep. If expression is a data variable for a secondary sweep source, this function returns the sweep step value of the secondary sweep. Example To return the difference of ID: DELTA(ID) 7-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 347: Diff

    For each primary sweep, use same definition as for basic sweep measurement and assume measurement index number 1 for the first step of each primary sweep. Example To return the 2nd order differential coefficient of ID by VG: DIFF(DIFF(ID,VG),VG) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-15...

  • Page 348: Exp

    For each primary sweep, use same definition as for basic sweep measurement and assume measurement index number 1 for the first step of each primary sweep. Example To integrate ID by VD: INTEG(ID,VD) 7-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 349: Lgt

    If the expression is: -Overflow is returned with status of "Arithmetic error". logarithm of absolute value is returned with status of negative value "Arithmetic error". Example To return the logarithm of ID: LOG(ID) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-17...

  • Page 350: Mavg

    For each primary sweep, use same definition as for basic sweep measurement and assume measurement index number 1 for the first step of each primary sweep. Example To return the moving average value of ''ID'' by using five measurement values: MAVG(ID,5) 7-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 351: Max

    If there are invalid values in expression, invalid values are ignored. Example To return the minimum value of ID: MIN(ID) SQRT Returns the square root of the expression. Syntax SQRT(expression) Example To return the square root of ID: SQRT(ID) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-19...

  • Page 352: Read Out Function

    If the marker, cursor, and line have not been displayed, the read out function returns invalid data. • You cannot assign a data variable that includes a read out function to an axis of graphics plot. 7-20 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 353: Cy1

    If there are Y1 and Y2 axes, this function returns the value for selected axis. @CY1 Returns the value of Y1 coordinate at the active cursor position. Syntax: @CY1 @CY2 Returns the value of Y2 coordinate at the active cursor position. Syntax: @CY2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-21...
  • Page 354 Y-intercept value of LINEn. If the Y axis is logarithmic scale, y is the log value of the y intercept of LINEn. Slope of LINEn. If LINE1 is parallel to LINE2, this function returns invalid data with the status "Arithmetic error". 7-22 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 355: Iy1

    Y2-intercept of LINEn. If the Y2 axis is logarithmic scale, y is the log value of the Y2 intercept of LINEn. Slope of LINEn. If LINE1 is parallel to LINE2, this function returns invalid data with the status "Arithmetic error". Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-23...

  • Page 356: L1Co

    = (log y - log y - log x )/(log x Where, Slope of LINE1. : X and Y coordinate values at the two points where LINE1 intercepts the perimeter of the plotting area. 7-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 357: L1G1

    = (log y - log y - log x )/(log x Where, Slope of LINE1. : X and Y1 coordinate values at the two points where LINE1 intercepts the perimeter of the plotting area. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-25...

  • Page 358: L1G2

    = (log y - log y - log x )/(log x Where, Slope of LINE1. : X and Y2 coordinate values at the two points where LINE1 intercepts the perimeter of the plotting area. 7-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 359: L1X

    If LINE1 is vertical, this function returns invalid data. @L2CO Returns the correlation coefficient of the regression for LINE2. Syntax: @L2CO LINE2 must be in regression mode. If not, this function returns invalid data. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-27...

  • Page 360: L2G

    = (log y - log y - log x )/(log x Where, Slope of LINE2. : X and Y coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area. 7-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 361: L2G1

    = (log y - log y - log x )/(log x Where, Slope of LINE2. : X and Y1 coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-29...

  • Page 362: L2G2

    = (log y - log y - log x )/(log x Where, Slope of LINE2. : X and Y2 coordinate values at the two points where LINE2 intercepts the perimeter of the plotting area. 7-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 363: L2X

    This function can be used in both GRAPHICS and LIST display modes. If the interpolation mode is enabled in GRAPHICS display and the marker is located between the measurement data, this function returns a non-integer value. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-31...

  • Page 364: My1

    If there are Y1 and Y2 axes, this function returns the value for selected axis. @MY1 Returns the value of the Y1 coordinate at the marker location. Syntax: @MY1 @MY2 Returns the value of the Y2 coordinate at the marker location. Syntax: @MY2 7-32 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 365: Analysis Function

    Data Variable and Analysis Function Analysis Function Analysis Function The 4155B/4156B provides the following functions for analyzing measurement results: • “Marker on the GRAPH/LIST: GRAPHICS screen” • “Marker on the GRAPH/LIST: LIST screen” • “Cursor” • “Line Drawing” • “Scaling Functions”...

  • Page 366: Marker On The Graph/List: Graphics Screen

    For tangent line mode, the marker is used to specify the position at which to draw a tangent to the measurement curve. Refer to “Line Drawing” on page 7-39. • displaying values of data variables 7-34 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 367 Moves the marker directly to specified coordinates on measurement curve. • Marker Skip Moves the marker to the next measurement curve. This function only has meaning for subordinate sweep measurements and append measurements. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-35...

  • Page 368: Marker On The Graph/List: List Screen

    If you set up an expression for the marker on DISPLAY: ANALYSIS SETUP screen, the marker moves to the row determined by the expression after auto analysis is performed. 7-36 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 369 Moves the pointer directly to the value that is closest to the specified value. • Marker Skip Moves the pointer to data for the next measurement curve. This function only has meaning for subordinate sweep measurements and append measurements. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-37...

  • Page 370: Cursor

    You can select a short cursor, which is a cross "`+'", or a long cursor, which is a cross with long lines. You can move the cursor anywhere in the plotting area by using arrow keys of the Marker/Cursor key group. Figure 7-5 Cursors on the GRAPH/LIST: GRAPHICS screen 7-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 371: Line Drawing

    To draw lines, you can select one of following four line modes: • Normal line mode: can draw a line through two cursors. • Grad line mode: can draw a line through a cursor with specified gradient. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-39...
  • Page 372 Data Variable and Analysis Function Analysis Function • Tangent line mode: can draw tangent line to marker, which is on measurement curve. • Regression line mode: can draw regression line within area specified by two cursors. 7-40 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 373: Scaling Functions

    Zooming out Changes the scaling to double the present scaling. This reduces the measurement curve on the plot area. • Centering at cursor Centers the display around the cursor at the same resolution. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7-41...

  • Page 374: Overlay Display Function

    You set up this function on the DISPLAY: ANALYSIS SETUP screen. This function is performed automatically when: • measurement finishes. • AUTO ANALYSIS secondary softkey is pressed. 7-42 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 375: If You Have A Problem

    If You Have A Problem Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 376 This section explains how to solve the problems that may occur when making a measurement. • If errors occur • This section lists error codes and messages that may be displayed when operating Agilent 4155B/4156B. Also, this section describes how to read data status. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 377 GRAPHICS, LIST, KNOB SWEEP, or STRESS FORCE screen. You can enter desired variable or function into the selected setup field of a screen by selecting ENTER secondary softkey, then pressing Enter front-panel key. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 378: When You Make A Measurement

    “If Large Current Causes High Temperature (Thermal Drift)” • “If Measurement Takes More Time than Specified” • “If Measurement Damages the Device under Test” • “If You Get Unexpected Data when Performing Sampling Measurement” Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 379: If Measured Value Oscillates When Measuring High-Frequency Devices

    For bipolar transistors, add resistive ferrite beads as close as possible to the base or emitter. • Make connection cables as short as possible. Long wires cause oscillation because of their large inductance. Test Device To unit To Unit Ferrite UGT06002, 90x 40 Beads Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 380: If Measured Value Oscillates When Measuring Negative Resistance

    Connect R in series with your DUT to cancel negative resistance. To obtain an output I-V curve, use the following equation. = V - R * I • If the resistance of the DUT is less than 1 MW, you can use R-Box. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 381: If Noise Affects The Measured Values

    If you use only Force terminal and triaxial cables for HRSMUs or HPSMU, connect an open cap to sense terminal. • Keep constant temperature in the room when you use the 4155B/4156B. Shift of 1 °C may shift the measurement values. Temperature change causes the following.

  • Page 382: If Measured Voltage Has Some Error When Forcing A Large Current

    • Use the pulse output mode of the SMU. For large currents, the SMU should be set to pulse output mode. This decreases the average power output to prevent temperature rise of DUT. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 383: If Measurement Takes More Time Than Specified

    R-Box and display the voltage values or use voltage values in user functions. The channels automatically measure current, which is used to compensate the voltage values. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 384: If Measurement Damages The Device Under Test

    After a long time charge, the increased terminal voltage is discharged by connecting DUT, which may damage the DUT. To solve this problem: There are three ways to prevent this problem as follows: 8-10 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 385 • insert the resistor at close point to DUT to prevent damage due to the charge in a measurement circuit. (See dotted line in the above figure) Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-11...

  • Page 386: If You Get Unexpected Data When Performing Sampling Measurement

    The channels automatically measure current, which is used to compensate the voltage values. • Do not perform analysis operation during measurement state 8-12 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

  • Page 387: If Errors Occur

    If You Have A Problem If Errors Occur If Errors Occur If the 4155B/4156B is not operated correctly, or if diagnostics or calibration fails, error codes and error messages are displayed. If measurement or forcing stress are not performed correctly, measurement data status is displayed at bottom of GRAPHICS, LIST, KNOB SWEEP, or STRESS FORCE screen.

  • Page 388: If Errors Occur When You Perform Self-Calibration Or Diagnostics

    AD converter test reached timeout. Measurement unit failed AD converter test as a pretest for calibration or self-test. Overvoltage occurred for a measurement unit. 1xx11 1xx12 Overcurrent occurred for a measurement unit. 8-14 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 389 Calibration or diagnostics was aborted by an emergency or *RST 1xx92 command. The 4155B/4156B was turned on before the 41501A/B. 1xx94 Communication failed between HOST controller and SMU controller. 1xx97 Or calibration/diagnostics was performed, but HOST controller couldn't receive the result from SMU controller.
  • Page 390 PGU1 failed pulse offset calibration. 10762 PGU2 failed pulse offset calibration. 10763 10764 PGU1 failed voltage calibration of base value. 10765 PGU2 failed voltage calibration of base value. PGU1 failed leading time calibration. 10766 8-16 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 391 Successive approximation AD converter failed calibration or self-test. 10906 Integrating type AD converter failed calibration or self-test. 10907 AD converter reached timeout. AD converter did not return completion 10908 status within certain time after sending calibration or self-test command. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-17...
  • Page 392 SMU controller failed power on self-test. 23076 SMU controller test gets timeout. 23077 23080 Access to graphics system processor failed read and write test. Graphic memories (SRAM) failed read and write test. 23091 8-18 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 393 A front-panel key is stuck in pressed position. Front key assembly may be disconnected. 24072 Front-panel key controller is not functioning properly. 24073 External key controller failed self-test. 24100 Selector test reached timeout. 24120 24130 R-Box test reached timeout. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-19...

  • Page 394: If Errors Occur When You Operate The 4155B/4156B

    If Errors Occur when You Operate the 4155B/4156B The following error codes and messages can occur when operating the 4155B/4156B. The error codes and messages are displayed in a message window or in the message display area at the bottom of the screen.
  • Page 395 If You Have A Problem If Errors Occur Device I/O error. Unable to print out. The 4155B/4156B, printer, or plotter may be broken. Contact the nearest Agilent Technologies sales and service office. Filer error. File name is required. Filer error. File Type is required.
  • Page 396 Cal/diag must be performed in the idle state. Calibration and Diagnostics cannot be performed unless the 4155B/4156B is in the idle state. For example, this error is displayed if the SCPI calibration command is sent when the 4155B/4156B is not in the idle state.
  • Page 397 The TIFF format is only supported by the SCREEN DUMP function. TIFF image can only be written to a FILE. A TIFF image can only be written to a FILE. The 4155B/4156B cannot output TIFF format images to a printer or plotter.
  • Page 398 Total sampling time must be set in the following range: total sampling time ³ initial interval ´ (number of samples -1) STOP CONDITION NAME is not set. PGU pulse Period must be > Width. PGU pulse Period must be >= Delay. 8-24 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 399 Syntax error in user function. Too few arguments in user function. Too many arguments in user function. User function area is full. Recursive call in user function. User function is undefined. Stack overflow in user function. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-25...
  • Page 400 1 ´ 10 or less. Measure channel is not assigned. Unable to find approximate data. Illegal graph scale setup. The Sweep/Pulse Polarity is not same. SYNC can not be set for standby CH. 8-26 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 401 Illegal setup. Target module is not installed. Illegal setup. Invalid command. Cannot define more than 6 User functions. Cannot define more than 8 data vars in lists. Cannot define more than 2 display data vars. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-27...
  • Page 402 Filer error. File type is wrong. Filer error. EOF found. Filer error. EOR found. File error. Illegal DISK parameter. Illegal disk parameter was detected. The mass storage device is set up incorrectly. 8-28 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 403 If Errors Occur System error. Controller not found. Unable to access the file system. The file system controller cannot be found. The 4155B/4156B may need service. Contact the nearest Agilent Technologies Sales and Service office. File error. Unable to execute. File open.
  • Page 404 Filer error. DISK is protected. System error. Unable to verify. Filer error. Unable to copy between LIF/DOS. Filer error. Reason Unknown. HOLD TM must be>=0 when INIT INT>=2ms. VAR1' output value is out of range. 8-30 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 405 Over voltage is detected. Over Current is detected. Power failure at Main Frame. Turn on the 4155B/4156B again. You can use filer functions after selecting OK secondary softkey (except when this error occurs during power-on test). Power failure at Expander Box.
  • Page 406 If You Have A Problem If Errors Occur Cannot shutdown Power Supply. Turn on the 4155B/4156B again. You can use filer functions after selecting OK secondary softkey (except when this error occurs during power-on test). Unknown emergency (SMUC time out).
  • Page 407 The network interface cannot be found because the network interface for the lpr server is down. Unable to print out. Reason unknown. Network connection failed. The reason for the failure is unknown. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-33...
  • Page 408 Cannot set 0(zero) for 4155/4156 User ID. When a valid host name for the 4155B/4156B network setup is specified, the User Id of the 4155B/4156B cannot be set to 0 (zero). No response from NFS. Try again ? There is no response from the Network File System (NFS) when trying to mount a network disk.
  • Page 409 Specified argument did not work when executing the command. Verify the command syntax and argument are correct. Seek operation failed. Seek for file operation failed, or append write failed to open the specified file. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-35...
  • Page 410 This type of protocol is not supported on the network. NFS too many references, can't splice. System busy. Saving/getting text files. The 4155B/4156B cannot be interrupted by other operations. For example, text files cannot be saved or retrieved while making measurements.
  • Page 411 Unable to write to this file. The file is locked by another process. No such device or address. The 4155B/4156B cannot find the specified network device or address. Verify the correct device file exists, the select code/major number/minor number are correct, and that the device is correctly connected (high speed or low speed port).

  • Page 412: If A Measurement Data Status Is Displayed

    • 4 : only one data for delta measurement. At least 2 data needed. PGU status • 1 : PGU average output current exceeds 100 mA. For non-measurement channels, "_" is displayed. 8-38 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...
  • Page 413 • 4 : only one data for delta measurement. At least 2 data needed. PGU status • 1 : PGU average output current exceeds 100 mA. For non-measurement channels, "_" is displayed. Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 8-39...
  • Page 414 If multiple errors occur, numbers are added and displayed as a hexadecimal number. • 2 : Oscillation. • 4 : Some channel has reached compliance limit. PGU status • 1 : PGU average current exceeds 100 mA. 8-40 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5...

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