Agilent Technologies 4155C User Manual page 212

Specifications
Hardware
Hardware
4156C Precision Semiconductor Parameter Analyzer
HRSMU (High Resolution SMU) Specifications
• Current Range, Resolution, and Accuracy: See Table 8-1.
• Voltage Range, Resolution, and Accuracy: See Table 8-3.
• Output terminal/connection
Dual triaxial connectors, Kelvin (remote sensing)
• Voltage/Current Compliance (Limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
Voltage
Current
Compliance accuracy
• HRSMU supplemental information
Allowable cable resistance maximum 10 Ω (for both Force and Sence. Kelvin
Voltage source output
resistance
Voltage measurement input
resistance
Current source output
resistance
Current compliance setting
accuracy
8-4
0 V to ± 100 V
± 100 fA to ± 100 mA
Same as current (voltage) set accuracy.
connection.)
typical 0.2 Ω (Force line. Non-Kelvin connection.)
15
≥ 10 Ω
15
≥ 10 Ω (10 pA range)
(for opposite polarity)
For 10 pA to 10 nA range:
V/I setting accuracy ± 12 % of range
For 100 nA to 100 mA range:
V/I setting accuracy ± 2.5 % of range
Agilent 4155C/4156C User's Guide Vol.1, Edition 11