Agilent Technologies 4155C User Manual page 218

Specifications
Hardware
4155C Semiconductor Parameter Analyzer
MPSMU (Medium Power SMU) Specifications
• Voltage Range, Resolution, and Accuracy
See Table 8-5.
• Current Range, Resolution, and Accuracy
See Table 8-4.
• Output terminal/connection
Single triaxial connector, non-Kelvin (no remote sensing)
• Voltage/Current Compliance (Limiting)
The SMU can limit output voltage or current to prevent damaging the device
under test.
Voltage
Current
Compliance accuracy
• MPSMU supplemental information
Voltage source output
resistance
Voltage measurement input
resistance
Current source output
resistance
Current compliance setting
accuracy
8-10
0 V to ± 100 V
± 1 pA to ± 100 mA
Same as current (voltage) set accuracy.
typical 0.3 Ω
13
≥ 10 Ω
13
≥ 10 Ω (1 nA range)
(for opposite polarity)
For 1 nA to 10 nA range:
V/I setting accuracy ± 12 % of range
For 100 nA to 100 mA range:
V/I setting accuracy ± 2.5 % of range
Agilent 4155C/4156C User's Guide Vol.1, Edition 11