Agilent Technologies 4155C User Manual page 217

Precision semiconductor parameter analyzers
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VMU (Voltage Monitor Unit) Specifications
Voltage Range, Resolution, and Accuracy
Grounded measurement mode
Voltage Range
±
2 V
±
20 V
a. Accuracy: ± (% of reading value + offset value).
Differential measurement mode
Differential
Meas.
Voltage
Reso.
Range
±
0.2 V
0.2
±
2 V
2
a. Accuracy: ± (% of reading value + offset value + common mode error).
b. Vi is the input voltage of VMU2 in volts.
VMU supplemental information
Input impedance
Input leakage current
Measurement noise
Differential mode
measurement noise
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
Meas. Reso.
2
μ
V
μ
20
V
Meas. Accuracy
μ
V
±
(0.03 % + 10
μ
V
±
(0.02 % + 100
≥ 1 GΩ
500 pA (at 0 V)
typical 0.01 % of range (p-p). when the integration
time is 10 PLC.
typical 0.005 % of range (p-p). when the integration
time is short.
Specifications
Meas. Accuracy
±
(0.02 % + 200
±
(0.02 % + 1 mV)
a
b
μ
V + 0.3
μ
V
×
Vi
)
b
μ
μ
×
V + 3
V
Vi
)
Hardware
a
μ
V)
Max.
Common
Mode
Voltage
±
20 V
±
20 V
8-9

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