Agilent Technologies 4155C User Manual page 215

Precision semiconductor parameter analyzers
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HRSMU, MPSMU, and HPSMU Supplemental Information
Capacitive load
Guard capacitance
Shield capacitance
Guard offset voltage
Noise characteristics
Output overshoot
Range switching
transient noise
Slew rate
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
maximum 1000 pF
maximum 900 pF
maximum 5000 pF
maximum ± 1 mV
(typical, filter ON)
Voltage source: 0.01 % of V range (rms)
Current source: 0.1 % of I range (rms)
Voltage monitor: 0.02 % of V range (p-p)
Current monitor: 0.2 % of I range (p-p)
(typical, filter ON)
Voltage source: 0.03 % of V range
Current source: 1 % of I range
(typical, filter ON)
Voltage ranging: 250 mV
Current ranging: 10 mV
maximum 0.2 V/μs
Specifications
Hardware
8-7

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