Specifications - Agilent Technologies 4155C User Manual

Precision semiconductor parameter analyzers
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Table 8-1
Current
Set
Range
Reso.
± 10 pA
10 fA
± 100 pA
10 fA
± 1 nA
100 fA
± 10 nA
1 pA
± 100 nA
10 pA
± 1 μA
100 pA
± 10 μA
1 nA
± 100 μA
10 nA
± 1 mA
100 nA
± 10 mA
1 μA
± 100 mA
10 μA
a. Accuracy: ± (% of reading or setting value + offset value). Vout is the output voltage in volts.
b. Iout is the output current in amps.
c. The accuracy is applicable when offset cancellation has been performed.
d.
The offset current specification is multiplied by one of the following factors depending upon the ambient
temperature and humidity. See
HRSMU Current Range, Resolution, and Accuracy
a
Set Accuracy
c d
± (4 % + 400 fA)
c d
± (4 % + 400 fA)
± (0.5 % + 0.7 pA
+ 1 fA × Vout)
± (0.5 % + 4 pA
+ 10 fA × Vout)
± (0.12 % + 40 pA
+ 100 fA × Vout)
± (0.12 % + 400 pA
+ 1 pA × Vout)
± (0.07 % + 4 nA
+ 10 pA × Vout)
± (0.07 % + 40 nA
+ 100 pA × Vout)
± (0.06 % + 400 nA
+ 1 nA × Vout)
± (0.06 % + 4 μA
+ 10 nA × Vout)
± (0.12 % + 40 μA
+ 100 nA × Vout)
Table 8-2
.
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
Measurement
Meas.
Reso.
Accuracy
± (4 % + 20 fA
1 fA
+ 1 fA × Vout/100)
± (4 % + 40 fA
1 fA
+ 10 fA × Vout / 100)
± (0.5 % + 0.4 pA
10 fA
+ 1 fA × Vout)
± (0.5 % + 2 pA
10 fA
+ 10 fA × Vout)
± (0.1 % + 20 pA
100 fA
+ 100 fA × Vout)
± (0.1 % + 200 pA
1 pA
+ 1 pA × Vout)
± (0.05 % + 2 nA
10 pA
+ 10 pA × Vout)
± (0.05 % + 20 nA
100 pA
+ 100 pA × Vout)
± (0.04 % + 200 nA
1 nA
+ 1 nA × Vout)
± (0.04 % + 2 μA
10 nA
+ 10 nA × Vout)
± (0.1 % + 20 μA
100 nA
+ 100 nA × Vout)

Specifications

Hardware
Max. Voltage
a
100 V
c d
100 V
c d
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V
100 V (Iout ≤ 20mA)
40V
(20mA < Iout ≤ 50mA)
20V
(50mA < Iout ≤ 100mA)
b
8-5

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