Agilent Technologies 4155C User Manual page 222

Precision semiconductor parameter analyzers
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Table 8-6
Current
Set Reso.
Range
± 1 nA
100 fA
± 10 nA
1 pA
± 100 nA
10 pA
± 1 μA
100 pA
± 10 μA
1 nA
± 100 μA
10 nA
± 1 mA
100 nA
± 10 mA
1 μA
± 100 mA
10 μA
± 1 A
100 μA
a. Accuracy: ± (% of reading or setting value + offset value). Vout is the output voltage in volts.
b. Iout is the output current in amps.
Specifications
Hardware
HPSMU Current Range, Resolution, and Accuracy
a
Set Accuracy
± (0.5 % + 3 pA
+ 2 fA × Vout)
± (0.5 % + 7 pA
+ 20 fA × Vout)
± (0.12 % + 50 pA
+ 200 fA × Vout)
± (0.12 % + 400 pA
+ 2 pA × Vout)
± (0.12 % + 5 nA
+ 20 pA × Vout)
± (0.12 % + 40 nA
+ 200 pA × Vout)
± (0.12 % + 500 nA
+ 2 nA × Vout)
± (0.12 % + 4 μA
+ 20 nA × Vout)
± (0.12 % + 50 μA
+ 200 nA × Vout)
± (0.5 % + 500 μA
+ 2 μA × Vout)
8-14
Measurement
Meas.
Reso.
Accuracy
± (0.5 % + 3 pA
10 fA
+ 2 fA × Vout)
± (0.5 % + 5 pA
10 fA
+ 20 fA × Vout)
± (0.1 % + 30 pA
100 fA
+ 200 fA × Vout)
± (0.1 % + 200 pA
1 pA
+ 2 pA × Vout)
± (0.1 % + 3 nA
10 pA
+ 20 pA × Vout)
± (0.1 % + 20 nA
100 pA
+ 200 pA × Vout)
± (0.1 % + 300 nA
1 nA
+ 2 nA × Vout)
± (0.1 % + 2 μA
10 nA
+ 20 nA × Vout)
± (0.1 % + 30 μA
100 nA
+ 200 nA × Vout)
1 μA
± (0.5 % + 300 μA
+ 2 μA × Vout)
Agilent 4155C/4156C User's Guide Vol.1, Edition 11
Max. Voltage
a
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V (Iout ≤ 50 mA)
100 V
(50mA < Iout ≤ 100mA)
200 V (Iout ≤ 50 mA)
100 V
(50mA < Iout ≤ 125mA)
40 V
(125mA < Iout ≤ 500mA
)
20 V
(500 mA < Iout ≤ 1 A)
b

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