Technical Specifications - Agilent Technologies FRG-700 User Manual

Inverted magnetron pirani gauge
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Technical Information

Technical Specifications

Table 1

Technical Specifications

Specifications
Measuring range (air, N
)
2
Accuracy (N
)
2
Reproducibility
Gas type dependence
Output signal (measuring signal)
Voltage range
Measuring range
Voltage vs. pressure
Error signal
Output impedance
Minimum loaded impedance
Response time (pressure dependent)
-6
p > 10
mbar
p = 10
-8
mbar
Gauge identification
Status
-2
p > 10
mbar
Pirani-only mode
-2
p < 10
mbar
Cold cathode not ignited
Pirani-only mode
p < 10
-2
mbar
Cold cathode ignited
Combined Pirani /
cold cathode mode
Lamp
Agilent Inverted Magnetron Pirani Gauge FRG-700 and FRG-702 User Manual
-9
5×10
... 1000 mbar
±30%
-8
in the range 1×10
... 100 mbar
±5%
in the range 1×10
-8
... 100 mbar
See page 21
0 ... +10.5 V
1.82 ... 8.6 V
logarithmic, 0.6 V / decade
<0.5 V no supply
>9.5 V Pirani measurement element
defective (filament rupture)
Ω
2×10
Ω
10 k
, short-circuit proof
<
10 ms
1000 ms
85 kΩ referenced to supply common
Pin 6
Low = 0 V
Low = 0 V
High = 15 ... 30 VDC
High voltage on (LED on)
Value
17

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Frg-702

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