Bringing The Target Into The Optical Path (Horizontal Stage Movement); Standard Stage Operation - Nikon Eclipse Ni-E Instruction Manual

5

Bringing the Target into the Optical Path (Horizontal Stage Movement)

When using the standard stage FN-3PS2, bring the target into optical path using the stage X, Y knobs. (So that the sample
is illuminated.)
When using a motorized XY stage, use the ergo controller or joystick to control the horizontal stage movement.

Standard Stage Operation

5.1
Notes on moving the stage
Avoid the following actions, which can cause equipment
malfunctions.
• Moving the stage to the right and left by holding the top
surface of the stage directly.
• Forcing the stage to move past the X/Y stroke.
Knob rotation and horizontal stage movement
To move the stage in the X or Y direction, rotate the X knob or Y
knob.
The stroke of the stage is X: ±29.5 mm, Y: ±29.5 mm.
Adjusting the Knob Rotation Torque
The rotation torque of the stage Y movement knob and stage X
movement knob can be adjusted. The adjustment task is made
easier by bringing the stage to the end of the travel limit.
• Adjusting Y movement torque
Hold knob (a) and rotate knob Y in the direction indicated by
arrow (clockwise) to increase the torque, or rotate it in the
opposite direction to decrease the torque.
• Adjusting X movement torque
Hold knob (b) and rotate knob X in the direction indicated by
arrow (counterclockwise) to increase the torque, or rotate it in
the opposite direction to decrease the torque. When holding
knob (b), prevent it from moving by placing your finger into
the hole under knob (b).
Avoid decreasing the torque excessively. If the knobs are too
loose, the top surface of the stage may move, even when
touched very lightly.
Chapter 3
Individual Operations
Stage X knob
Increase
54
A . S
Do not move the stage with a hand.
Y direction
Stage Y knob
Knob Rotation and Stage Movement
Knob (a)
Knob Y
Increase
Knob X
Knob (b)
Adjusting the Stage Knob Rotation Torque
X direction
NC B
ND
ND
11
8 32
OU T
IN