The 5920 Moisture Analyzer measures trace concentrations of moisture in
ultra-high purity gases such as air, oxygen, hydrogen, helium, argon, air, neon,
xenon and nitrogen at concentrations down to 1 parts-per-billion by volume
(PPBV) using a quartz crystal microbalance sensor. Calibrated range is 0–150
parts-per-billion by volume (PPBV) with a trend indication for measured con-
centrations above the calibrated range.
Figure 1-1.
5920 Moisture Analyzer
sampling system.
PN 592047901 Rev YC
Overview
|
Overview
1-1