Ametek 5920 UHP User Manual page 87

To replace the Mass Flow Meter:
1. Connect the cable assembly to MFM.
2. Slide the new MFM into the mounting bracket and attach it to the bracket
3. Replace the MFM mounting bracket, with MFM, solenoids and solenoid
4. Reattach the Reference Valve solenoid bracket (including SAM 1 solenoid
5. Using a new VCR gasket, reattach the female nut and associated tubing to
6. Using a new VCR gasket, reattach the female nut and associated tubing to
7. Using new VCR gaskets, reattach the valves and tubing to the two remain-
FROM MFM
TO EXHAUST
(REMOVE TUBING)
MASS FLOW CONTROLLER (MFC)
Figure 4-3.
MFM mounting bracket.
PN 592047901 Rev YC
using the two (2) hex screws.
bracket attached, in its position on the analyzer mounting plate and attach
with screws.
valve) to the top of the MFM mounting bracket.
the valve on the mass flow meter.
the Reference Purifier on the other side of the SAM 1 solenoid.
ing solenoids.
VALVES
FROM MANIFOLD
TO MFC
(REMOVE TUBING)
MOUNTING
BRACKET
MASS FLOW METER (MFM)
Maintenance and Troubleshooting | 4-7
MASS FLOW METER
MASS FLOW CONTROLLER