Condition For The Water-Cooling Unit; Specification - Edwards STP-XF803 Series Instruction Manual

1.1.2

Condition for the water-cooling unit

1 Common to all three specifications.
Port type
*1
Flow rate
Water temperature
Water pressure
*1
The values are the recommended value.
MT-92E-101-C
Page 12
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
Item
Middle stage
Lower stage
*1
*1 MPa (kgf/cm

Specification

3/8-inch tube fitting (SUS)
Rc1/4(ISO standard, Female, SUS)
L/min
°C
2 )
2 to 3
17 to 32
<0.3 (3)