Vacuum Piping Method - Edwards STP-iS1607 Series Instruction Manual

3.5.1

Vacuum piping method

3
1. Attach the inlet port to the high vacuum side.
(Refer to Section 2.1, "STP pump specifications" for maximum working pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to Section 2.1, "STP pump specifications" for allowable backing pressure).
Note: Maximum flow for water cooled is applicable under the condition listed in Section 2.3, "Water
cooling use condition".
MT-94E-001-C
Page 48
STP-iS1607 Series Turbomolecular Pump