User Manuals: Edwards STP-301 Series Turbo Pump

Limited Warranty

9

Table of Contents

10

Precautions for Safe Operation of the STP Pump

15

Usable Gases

15

Precautions on Maintenance and Inspection

15

Labels

16

Operation Principle of the STP Pump

19

Figure 2.1 Cross Sectional View of the STP Pump

20

Unpacking

21

Unpacking the STP Pump and the STP Control Unit

21

Accessories

21

Table 3.1 Accessories

21

Table 3.2 Accessories for Chemical Specific Pump (Type C)

21

Installation of the STP Pump

23

Name and Function of each Part

23

Figure 4.1 Configuration of the STP Pump

24

Precautions before Installation

25

Operating Environment

25

Installation Area

26

Bench

26

How to Install the STP Pump

27

Figure 4.2 Installation of the STP Pump to the Vacuum Equipment

27

Cleaning the Seal

28

STP Pump Installation Positions

29

Figure 4.3 STP Pump Installation Positions

29

Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump

29

How to Secure the STP Pump

30

Table 4.1 Tightening Torque of Bolt

30

Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange

31

Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)

31

Table 4.3 Number of Claw Clamps by Size of Flange

32

Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)

32

Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)

33

Vacuum Piping

34

Connecting the Ground Cable

35

Connecting the Purge Port (for the Chemical Specific Pump, Type C)

36

Figure 4.8 Connecting the Purge Port

36

Baking, Cooling the STP Pump and Gas Pumping

37

Baking the STP Pump

37

Attaching a Baking Heater

37

Cooling the STP Pump

38

Water Cooling Method

38

Air Cooling Method

39

Gas Pumping

40

How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]

40

Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater

41

Installation of the STP Control Unit

43

Name and Function of each Part

43

Front Panel

43

Figure 6.1 STP Control Unit Front Panel

44

Rear Panel

45

Figure 6.2 STP Control Unit Rear Panel

46

Top Panel

47

Figure 6.3 STP Control Unit Top Panel

47

Side Panel (Left)

48

Figure 6.4 STP Control Unit Side Panel (Left)

48

Precautions before Installation

49

Operating Environment

49

Insulation Test

49

Installation Area

50

Figure 6.5 Peripheral Spaces of the STP Control Unit

50

Attaching the STP Control Unit Front Panel to a Rack

51

Figure 6.6 Example of Securing the STP Control Unit

51

Cable Connection

52

Name and Dimensions of each Cable

52

Figure 6.7 External Dimensions of Ground Cable

52

Figure 6.8 External Dimensions of STP Connection Cable

52

Figure 6.9 External Dimensions of STP Connection Cable

53

How to Connect the Cables

54

Table 6.1 Connecting the Power Cable

55

Figure 6.10 Connecting Method of the AC Power Cable

55

Figure 6.11 How to Secure the Power Cable

56

Connecting to Semiconductor Equipment

57

Connecting to Power

57

Emergency off Circuit (EMO Circuit)

57

How to Start/Stop the STP Pump

59

Before Starting

59

Start Procedures

60

Stop Procedures

60

Manual Operation

61

Powering on

61

Starting the STP Pump

61

Stopping the STP Pump

61

Starting the STP Pump after Stopping

62

Powering off

62

Starting the STP Pump after a Safety Function Operates

62

Remote Operation (I/O TB2)

63

Powering on

63

Starting/Stopping the STP Pump

63

Starting the STP Pump after Stopping

63

Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)

63

Powering off

64

Starting the STP Pump after a Safety Function Operates

64

Table 7.2 Reset Operation During Remote Operation (I/O TB2)

64

Remote Operation (CON4: Optional Accessory)

65

Powering on

65

Starting/Stopping the STP Pump

65

Starting the STP Pump after Stopping

65

Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)

65

Powering off

66

Starting the STP Pump after a Safety Function Operates

66

Table 7.4 Reset Operation During Remote Operation (CON4)

66

Figure 7.1 STP Pump Operation Procedures

67

Remote Input/Output Signal Terminal Blocks

69

I/O TB1 Terminal Block

69

Table 8.1 I/O TB1 Terminal Block

69

Figure 8.1 I/O TB1 Remote Output Signal Terminal Block

71

I/O TB2 Terminal Block

73

Table 8.4 I/O TB2 Terminal Block

73

Figure 8.2 I/O TB2 Remote Input Signal Terminal Block

74

CON4 Connector (Optional Accessory)

75

Remote Input Signals

75

Table 8.5 CON4 Connector (Remote Input Signal)

75

Figure 8.3 CON4 Remote Input Signal Connector

76

Remote Output Signals

77

Table 8.7 con 4 Connector (Remote Output Signal)

77

Figure 8.4 CON4 Remote Output Signal Connector

78

Remote Cables (Optional Accessories)

79

Table 8.9 Remote Cable Connections (Single-Side Connector Type)

79

Adjustment Method

81

Tuning

81

Tuning Method

81

Figure 9.1 Tuning Procedures

82

Setting the Rated Speed

83

When Setting DSW-B No. 1 to on under Power-ON State

83

When Setting DSW-B No. 1 to on before Powering on

84

Figure 9.2 LCD Message in Rated Speed Setting Mode

85

10 Safety Functions

87

Power Failure

87

Table 10.1 States of Lamps and REMOTE Output Signals at Power Failure

88

Table 10.2 Operations of the STP Pump after Power Recovery

88

Abnormal State of Magnetic Bearing

89

Excessive Vibration

89

Motor Driver Overload

89

Overheating Inside the STP Pump

89

Overheating Inside the STP Control Unit

89

Overspeed

89

11 Troubleshooting, Maintenance and Inspection

93

Troubleshooting Immediately after an Abnormality/Error Occurs

93

In Case of a Power Failure

93

In Other Cases

93

When Error Message Is Displayed

94

Error Messages

94

Table 11.1 Error Messages

95

Displaying Past Abnormalities/Errors and Accumulated Running-Time

97

Abnormalities When Powering on

99

Abnormalities When Performing the STP Pump Start Operation

99

Table 11.2 Troubleshooting after Powering on

99

Table 11.3 Troubleshooting When Performing the STP Pump Start Operation

99

Other Abnormalities

100

Table 11.4 Troubleshooting While the STP Pump Is Rotating

100

Maintenance and Inspection

101

Inspecting the Air Cooling Fan

101

Replacing the Fuses

102

Table 11.5 Recommended Spare Parts

102

Cleaning and Decontamination

103

Inspecting for Deposit

103

Table 11.6 Cleaning and Decontamination

103

Overhaul

104

Transporting for Repair or Overhaul

105

12 Storage and Disposal

107

Storage of the STP Pump

107

Storage of the STP Control Unit

107

Disposal

108

13 Specifications and Accessories

109

Specifications of the STP Pump

109

Table 13.1 Specifications of the STP Pump

109

Figure 13.1 External Appearance of the STP Pump [Without Anti-Corrosion Treatment]

110

Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C]

111

Figure 13.3 Label Affixing Position for the STP Pump

112

Specifications of the STP Control Unit

113

Table 13.2 Specifications of the STP Control Unit

113

Safety Functions

114

Figure 13.4 External Appearance of the the STP Control Unit

115

Figure 13.5 Label Affixing Positions for the STP Control Unit

116

User Manuals: Edwards STP-301 Series Turbo Pump

Edwards STP-301 Series Instruction Manual (121 pages)

Table of Contents

Introduction

Limited Warranty

1 Precautions for Safe Operation of the STP Pump

2 Operation Principle of the STP Pump

3 Unpacking

4 Installation of the STP Pump

5 Baking, Cooling the STP Pump and Gas Pumping

6 Installation of the STP Control Unit

7 How to Start/Stop the STP Pump

8 Remote Input/Output Signal Terminal Blocks

9 Adjustment Method

10 Safety Functions

11 Troubleshooting, Maintenance and Inspection

12 Storage and Disposal

13 Specifications and Accessories

Unit Conversion Table

Edwards STP-301 Series Instruction Manual (118 pages)

Table of Contents

Edwards STP-301 Series Instruction Manual (122 pages)

Table of Contents

Limited Warranty

1 Precautions for Safe Operation of the STP Pump

2 Operation Principle of the STP Pump

3 Unpacking

4 Installation of the STP Pump

5 Baking, Cooling the STP Pump and Gas Pumping

6 Installation of the STP Control Unit

7 How to Start/Stop the STP Pump

8 Remote Input/Output Signal Terminal Blocks

9 Adjustment Method

10 Safety Functions

11 Troubleshooting, Maintenance and Inspection

12 Storage and Disposal

13 Specifications and Accessories

Unit Conversion Table

Edwards STP-301 Series Instruction Manual (63 pages)

Table of Contents

Edwards STP-301 Series Instruction Manual (23 pages)

Table of Contents

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