Mounting The Cyclone - Primes MicroSpotMonitor Plus HighBrilliance Original Instructions Manual

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MSM+ HB
z-axis
y-axis
x-axis
Fig. 7.1:
z-measurement range of the MSM+ HB
7.3.2

Mounting the cyclone

Fig. 7.2:
Position of cyclone and alignment tool
The magnetically held alignment tool can fall down during shipping. Dirt may enter the objective. Therefore,
the objective of the MSM+ HB is closed with a black aperture lock.
You must remove the aperture lock on the objective first, then you can mount the cyclone.
Before removing the aperture lock, the area around the aperture must be cleaned with clean compressed air
and the purge air must be connected to the MSM+ HB.
Revision 00 EN - 02/2022
Laser Beam
4 screws a.f. 2.5 mm
Upper limit
Permissible z-
Measuring plane
measurement range
Lower limit
Measuring plane distance
Measuring objective
Beam hits measuring objective
centered and perpendicular
Cyclone and
alignment tool
29

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This manual is also suitable for:

Msm plus hb10Msm plus hb20

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