Primes MicroSpotMonitor Plus HighBrilliance Original Instructions Manual page 46

Fig. 9.1: Traverse range of the MSM+ HB with fiber bridge
Type of Fiber Adapter
QBH
HLC-16
LLK-D
Tab. 9.1: Limit Values for z
46
z
max
Maximum Traverse range z
MSM+ HB
106
118
120
max
Aperture plate
in mm
max
MSM+ HB 20 kW
26
38
40
Revision 00 EN - 02/2022
MSM+ HB