Positioning The Pilot Laser Beam Above The Cyclone - Primes MicroSpotMonitor Plus HighBrilliance Original Instructions Manual

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MSM+ HB
7.3.4

Positioning the pilot laser beam above the cyclone

Fig. 7.4:
Alignment tool for MSM+ HB
Due to the imaging features of the measuring objective, it is necessary to position the laser beam focus in a
certain area above the cyclone. The device must be aligned to the laser beam along the z-axis as well as on
the x-y plane.
The measuring objective is imaging a measuring plane onto the CCD sensor. The measuring plane is outside
the measuring device. The beam must be aligned along the z-axis (centrically and perpendicular) into the
measuring plane.
Ideally, the beam focus should be exactly on the measuring plane after alignment. In practice, it is sufficient
if the beam focus is within the limits of a permissible z measuring range. Otherwise, the measuring objective
can be damaged if the beam intensities are too high.
The measuring plane distance depends on the beam path (standard, magnification objective MO, alignment
objective AO) (see Tab. 7.1 on page 31).
Measuring Objective
MOB MSM+ HB
Tab. 7.1:
Measuring plane distances
Fig. 7.5:
Lower reference plane
Revision 00 EN - 02/2022
Laser Beam
Alignment tool
Length of align-
Wavelength
ment tool
in nm
in mm
1064
32,8
Lower reference plane
Measuring plane distance
in mm
Standard
MO
32,8
32,8
AO
32,3
31

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