Primes MicroSpotMonitor Plus HighBrilliance Original Instructions Manual page 14

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The beam geometries (beam position, beam radius and azimuth angle) are determined for each plane ac-
cording to the procedures described in the standard ISO 11146 (2. moment and 86 % power inclusion).
The beam propagation parameters (focus position, focus radius, Rayleigh length, divergence, M
beam parameter product) are determined with the beam geometry data. From the measurement data for the
semi-axes of the beam, the ellipticity of the focus and the astigmatic difference are determined according to
ISO11146.
An automatic function supports the user when measuring a caustic.
Device Assembly
Z-axis-drive
HighPower
beam absorber
Fig. 4.3:
Components of the MSM+ HB
Lever to adjust the magnification
Fig. 4.4:
Levers to adjust the magnification
14
Beam entrance
High Brilliance
measuring objective
Magnification objective (high)
Alignment objective (low)
MSM+ HB
, K and
2
Z-axis-drive
Lever to adjust the
magnification
Standard
Revision 00 EN - 02/2022

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