Control Signal Wiring - EBARA EV-SA20 Instruction Manual

Multi-stage dry vacuum pump
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3.3.2

Control Signal Wiring

Connect wires to the control connector for remote operation and remote monitoring.
Fig.3.5, Table 3.4 and 3.5 show the pin assignment.
Pin. No.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
[note 1]
[note 2]
[note 3]
PM10U
8
15
Dsub-15pin Female
Fig. 3.5 15 Pin D sub-Miniature Female Receptacle
(As seen from connecting side)
Table 3.4 Control Connector Pin Assignment
Signal name
PUMP RUN (+)
ALARM RESET (+)
PUMP RUN/STOP STATUS (+)
PUMP SPEED CONTROL
MODE (+)
---
ALARM STATUS (+)
PUMP SPEED CONTROL (+)
---
PUMP RUN (-)
ALARM RESET (-)
PUMP RUN/STOP STATUS (-)
PUMP SPEED CONTROL
MODE (-)
---
ALARM STATUS (-)
PUMP SPEED CONTROL (-)
RESET needs continuing signal over 5msec.
With Pin 4-12 close, the pump rotation speed is directly proportional to the applied
voltage between Pin 7-15. When 10V is applied, the pump rotation speed is maximum.
9, 10 and 12 pins are short-circuited by internal wiring.
1
Screw lock size : M2.6
Connector pin surface : Au
9
I/O
INPUT
RUN : CLOSE
RESET : CLOSE, Alternate
INPUT
[note 1]
OUTPUT
RUN : CLOSE
INPUT
CONTROL MODE : CLOSE [note 2]
OUTPUT
ALARM : OPEN
INPUT
DC 0-10 V [note 2]
[note 3]
[note 3]
[note 3]
P.33
Signal type
EBARA
CORPORATION

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