Control Signal Wiring - EBARA ESA300W Instruction Manual

4.3.3 Control Signal Wiring

Connect wires to the control connector for remote operation and remote monitoring.
Tables 4.4 and 4.5 and Figs. 4.5 and 4.6 show the pin assignment.
Table 4.4 Receptacle Specification
Connector No.
CN-Z
CN-Y
8
Fig. 4.6 15 Pin D Sub-Miniature Female Receptacle
Table 4.5 Control Connector Pin Assignment(CN-Z)
Pin. No. Signal name
1 MP START/STOP (+)
2 BP START/STOP (+)
3 MP START/STOP STATUS (+)
4 BP START/STOP STATUS (+)
5 WARNING STATUS (+)
6 ALARM STATUS (+)
7 REMOTE STATUS (+)
8
9 MP START/STOP (−)
10 BP START/STOP (−)
11 MP START/STOP STATUS (−)
12 BP START/STOP STATUS (−)
13 WARNING STATUS (−)
14 ALARM STATUS (−)
15 REMOTE STATUS (−)
Connector type
15 pin D sub-miniature Female receptacle
25 pin D sub-miniature Female receptacle
1
15 9
(As seen from connecting side)
(Applicable for SEMI E73)
Screw lock size : M2.6
Contact pin surface : Au
I/O Signal type
IN Run : CLOSE, Alternate
IN Run : CLOSE, Alternate
OUT Run : CLOSE, Alternate
OUT Run : CLOSE, Alternate
OUT WARNING : OPEN, Alternate
OUT ALARM : OPEN, Alternate
OUT REMOTE : ON
EBARA
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CORPORATION