Control Signal Wiring - EBARA EV-A10 Instruction Manual

3.3.2

Control Signal Wiring

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Fig. 3.4 15 Pin D sub-Miniature Female Receptacle
(As seen from connecting side)
Table 3.3 Control Connector Pin Assignment
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3803 581 
$/$50 5(6(7 
3803 5816723 67$786 


$/$50 67$786 


3803 581 
$/$50 5(6(7 
3803 5816723 67$786 


$/$50 67$786 

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,1387 581 &/26(
5(6(7 &/26( $OWHUQDWH
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287387 581 &/26(
287387 $/$50 23(1
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