Control Signal Wiring - EBARA EV-S20 Instruction Manual

4.3.2 Control Signal Wiring

Connect wires to the control connector for remote operation and remote
monitoring.
Tables 4.6, 4.7, 4.8 and 4.9 and Figs. 4.6 and 4.7 show the pin assignment.
PM10U
Table 4.6 Receptacle Specification
Connector No.
CN-Z
CN-Y
Connector type
15 pin D sub-miniature Female receptacle
(In accordance with SEMI-E73)
25 pin D sub-miniature Female receptacle
P.49
EBARA
CORPORATION