Agilent Technologies Agilent E5250A User Manual page 264

Figure 9-1
Table 9-4
Instrument
Model No.
4155/4156
4284A
Executing Sample Programs
Vth and Capacitance Measurement Program
Vth and C Measurement Setup and DUT Connection
Instrument and DUT Connection
Measurement
Port
SMU 1
SMU 2
SMU 3
SMU 4
Hp, Hc AUX INPUT CV1
Lp, Lc AUX INPUT CV2
9-8
E5250A
Input Port Output Port
SMU INPUT 1 OUTPUT 1
SMU INPUT 2 OUTPUT 2
SMU INPUT 3 OUTPUT 3
SMU INPUT 4 OUTPUT 4
OUTPUT 5
OUTPUT 6
Agilent E5250A User's Guide, Edition 11
DUT Terminal (via
Connector Plate)
MOSFET Drain
MOSFET Gate
MOSFET Source
MOSFET Substrate
Capacitance (H)
Capacitance (L)