1. Manuals
  2. Brands
  3. Agilent Technologies Manuals
  4. Switch
  5. Agilent E5250A
  6. User manual

Agilent Technologies Agilent E5250A User Manual

Agilent technologies low leakage switch mainframe user's guide
Hide thumbs
Table of Contents

Advertisement

Quick Links

Agilent E5250A
Low Leakage Switch
Mainframe
User's Guide
Agilent Technologies

Advertisement

Table of Contents
loading

Related Manuals for Agilent Technologies Agilent E5250A

Summary of Contents for Agilent Technologies Agilent E5250A

  • Page 1 Agilent E5250A Low Leakage Switch Mainframe User’s Guide Agilent Technologies...

  • Page 2: Technology Licenses

    Notices © Agilent Technologies, Inc. 1995 - 2011 No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or transla- tion into a foreign language) without prior agreement and written consent from Agi- lent Technologies, Inc.
  • Page 3 This DoC applies to above-listed products placed on the EU market after: March 20, 2010 Date For further information, please contact your local Agilent Technologies sales office, agent or distributor, or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, 71034 Böblingen, Germany. DECLARATION OF CONFORMITY...
  • Page 4 • Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 NOTE This ISM device complies with Canadian ICES-001. Cet appareil ISM est conforme à...

  • Page 5: Safety Summary

    Agilent Technologies, Inc. assumes no liability for customer’s failure to comply with these requirements. NOTE Agilent E5250A complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 61010-1.
  • Page 6 Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to a Agilent Technologies Sales and Service Office for services and repair to ensure that safety features are maintained.

  • Page 7: Safety Symbols

    Safety Symbols The general definitions of safety symbols used on equipment or in manuals are listed below. Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.
  • Page 8 In This Manual This manual is a user’s guide for Agilent E5250A, and consists of the following chapters. • Introduction Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.
  • Page 9 • Specifications Lists specifications, typical data, supplemental data, and reference data for the E5250A, E5252A, and E5255A. • Error Messages Lists and describes the error messages for the E5250A. • SCPI Command Summary This is a quick reference for the SCPI subsystem commands available for the E5250A.

  • Page 11: Table Of Contents

    Agilent E5250A Product Description ........
  • Page 12 Connecting the E5250A Output ......... . 4-20 Contents - 2 Agilent E5250A User’s Guide, Edition 11...
  • Page 13 SCPI Command Hierarchy ..........6-4 Agilent E5250A User’s Guide, Edition 11...
  • Page 14 :SYSTem Subsystem ..........7-42 Contents - 4 Agilent E5250A User’s Guide, Edition 11...
  • Page 15 Modifying the Program ..........9-35 10. Specifications 11. Error Messages Agilent E5250A User’s Guide, Edition 11 Contents - 5...
  • Page 16 Contents 12. SCPI Command Summary Contents - 6 Agilent E5250A User’s Guide, Edition 11...

  • Page 17: Introduction

    Introduction...
  • Page 18 Introduction This chapter gives an overview of Agilent E5250A, E5252A, and E5255A. • “Agilent E5250A Product Description” • “Agilent E5252A Product Description” • “Agilent E5255A Product Description” • “Options and Accessories” Agilent E5250A User’s Guide, Edition 11...

  • Page 19: Agilent E5250A Product Description

    Agilent E5250A Product Description Agilent E5250A Low Leakage Switch Mainframe is a computer-controlled switching matrix mainframe designed for semiconductor dc characteristics measurement applications. The E5250A has four slots for installing the modules (plug-in cards) listed in Table 1-1. These cards can be used in various switching matrix configurations in the E5250A.

  • Page 20: Front Panel Tour

    The connectors can also be used for a maximum three Kelvin connection inputs by coupling two ports as follows: • SMU INPUT 1 and 2 • SMU INPUT 3 and 4 • SMU INPUT 5 and 6 Agilent E5250A User’s Guide, Edition 11...
  • Page 21 If you use a bias source that has current limit capability, set the bias source current limit to less than 1 Adc. Figure 1-2 E5250A Rear Panel Agilent E5250A User’s Guide, Edition 11 Agilent E5250A Product Description AUX INPUT connectors are for C-V measurements, pulse input, and so on.

  • Page 22: Agilent E5252A Product Description

    10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and 10×48 matrix (four E5252As). The E5252A block diagram and output connectors are shown in Figure 1-3 and Figure 1-4. Figure 1-3 E5252A Block Diagram Agilent E5250A User’s Guide, Edition 11...
  • Page 23 Do not touch the force and guard terminals of the output connectors while the E5250A is turned on. Dangerous voltages up to the maximum input voltage may be present at the output connectors. Agilent E5250A User’s Guide, Edition 11 Agilent E5252A Product Description The E5252A has 10 input ports via the E5250A.

  • Page 24: Agilent E5255A Product Description

    E5255A. OUTPUT Connectors The E5255A has three 8-channel coaxial output connectors as shown in Figure 1-6. Each output connector is assigned to a 2×8 multiplexer as shown in Table 1-2. Agilent E5250A User’s Guide, Edition 11...
  • Page 25 Be careful about the heating of the rear panel of mainframe or plug-in card, which may be heated by resistors, even if you follow this warning. Agilent E5250A User’s Guide, Edition 11 Agilent E5255A Product Description Resistors connected between BIAS path and IV path are for protecting DUT from electrical damage.
  • Page 26 B LO C K 1 R esis tor O u tpu t B LO C K 2 R esis tor O u tpu t BLO C K 3 R esis tor O u tpu t Agilent E5250A User’s Guide, Edition 11...
  • Page 27 E5255A inputs. If you do, the E5255A will be damaged. If you use a bias source that has current limit capability, set the bias source current limit to less than 1 Adc. Agilent E5250A User’s Guide, Edition 11 BIAS INPUT (Port No.)

  • Page 28: Options And Accessories

    Table 1-3 lists the options available for the E5250A. Table 1-3 Options Model Number E5250A 1-12 Option Item Low Leakage Switch Mainframe E5250A-301 Relay Test Adapter E5250A-A6J ANSI Z540 compliant calibration E5250A-UK6 Commercial cal. certificate w/ test data Agilent E5250A User’s Guide, Edition 11 Description...
  • Page 29 E5250A in the Search field at the top of the page. Agilent E5250A User’s Guide, Edition 11 Description Agilent E5250A User's Guide E5250A VXI Plug&Play Driver disk Agilent E5250A Program Disk (LIF format, 3.5 inch disk) Module Extractor Wrench (for removing plug-in card) Power Cable Agilent E5252A Installation Guide...
  • Page 30 E5252A, and two for HCI test and analysis using the E5255A. Runs on HP BASIC. Refer to Chapter 9. Self-test Utility Self-test and relay test program for the E5250A. Runs on the 4155/4156's built-in IBASIC controller. Refer to Chapter 3. 1-14 Agilent E5250A User’s Guide, Edition 11...
  • Page 31 E5255A 16494A 16494B 16494C 16494D 16494E 16495C 16495D 16495E 16495F 16495G Agilent E5250A User’s Guide, Edition 11 Option Item 10×12 Matrix Switch 24 (8×3) Channel Multiplexer Triaxial Cable 16494A-001 1.5 m length 16494A-002 3 m length 16494A-003 80 cm length...
  • Page 32 Introduction Options and Accessories 1-16 Agilent E5250A User’s Guide, Edition 11...

  • Page 33: Installation

    Installation...
  • Page 34 Installation This chapter describes requirements to install Agilent E5250A and the tasks for installation, and is organized into the following three sections: • “To Inspect the E5250A and Accessories” describes how to inspect the E5250A when you receive it. •...

  • Page 35: To Inspect The E5250A And Accessories

    After installing the E5250A, check the E5250A operation by executing self-test shown in Chapter 3. If anything is wrong, notify your local Agilent Technologies sales office. When shipping the E5250A When you unpack the E5250A, retain all packing materials for future use. If it becomes necessary to reship the E5250A, repack it in the original packing materials and shipping carton.

  • Page 36: Requirements

    The color coding used in the cable will depend on the cable supplied. If a new plug is to be connected, it must meet local safety requirements and include the following features: • Adequate load-carrying capacity. (refer to Chapter 10, “Specifications.”) • Ground connection. • Cable clamp. Agilent E5250A User’s Guide, Edition 11...
  • Page 37 125 V, 10 A 250 V, 10 A • PN: 8120-6825, • PN: 8120-8871, 8121-1635 8121-1638 Agilent E5250A User’s Guide, Edition 11 • Plug: NEMA 5-15P, • Plug: CEE 7 sheet 125 V, 10 A VII, 250 V, 10 A •...

  • Page 38: Operating Environment

    Humidity: 5 % to 90 % RH at 65 °C (149 °F). • • Altitude: 0 m to 15,240 m Protect the E5250A from temperature extremes to prevent condensation from forming inside the E5250A. Agilent E5250A User’s Guide, Edition 11...

  • Page 39: Installing The E5250A

    If you require that the modules be guaranteed to their specifications (for ISO compliance, etc.), then you must perform a calibration on the instrument (modules and mainframe together). For calibration, contact your nearest Agilent Technologies service center. Agilent E5250A User’s Guide, Edition 11...

  • Page 40: To Install Plug-In Card

    CAUTION If you want to confirm that the E5250A with installed cards meets its specifications, return the E5250A with installed cards to your nearest Agilent Technologies Service Center to do the Performance Verification. Agilent E5250A User’s Guide, Edition 11...

  • Page 41: To Install Blank Panel

    1. Align the blank panel over the unused slot. 2. Screw in the screws on the left and right edges of the blank panel by using the wrench furnished with the E5250A. Agilent E5250A User’s Guide, Edition 11 Screw Hole for Module Extractor...

  • Page 42: To Configure E5255A

    BIASin BIASout BIASout1 BIASin2 BIASout2 BIASin3 BIASin/BIASout SMU1 BIAS INPUT 51 SMU2 BIAS INPUT 52 SMU3 BIAS INPUT 53 Agilent E5250A User’s Guide, Edition 11 IVin IVout DIP SW cable connector IVin1 IVout1 DIP SW1 IVin2 IVout2 DIP SW2 IVin3...
  • Page 43 When a module is installed in a mainframe slot, six module pins are connected to the mainframe internal bus. So, if multiplexers on different E5255As use the same module pin, the IV inputs are connected together via the internal bus. Agilent E5250A User’s Guide, Edition 11 DIP SW1 IVout1...
  • Page 44 Consider the current flows to resistor when DUT shorts, and make sure the power consumption by resistor will be within specification of resistor. Do not use resistors that have specifications inadequate for your applications, which will result in resistors heating up, burning, or smoking. 2-12 Agilent E5250A User’s Guide, Edition 11...

  • Page 45: E5255A Configuration Examples

    1. Connect the IVin1 cable to the SMU1 input connector on the E5255A. 2. Connect the IVin2 cable to the IVout1 connector. 3. Connect the IVin3 cable to the IVout2 connector. Agilent E5250A User’s Guide, Edition 11 Installation Installing the E5250A...
  • Page 46 2. Connect the IVin2 cable to the IVout1 connector. 3. Connect the IVin3 cable to the IVout2 connector. 4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3. 2-14 Agilent E5250A User’s Guide, Edition 11...
  • Page 47 • Agilent part number 1250-0781: female(side)-male(center)-female(side) • Agilent part number 1250-2405: male(side)-female(center)-female(side) Figure 2-5 Interconnection of BIAS INPUT Connectors BNC T-adapter To Bias Source Agilent E5250A User’s Guide, Edition 11 Installing the E5250A Agilent E5255A BNC cable Installation 2-15...
  • Page 48 Otherwise, you will be shocked if you touch the connectors while bias is applied. DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and the Bias Source will be destroyed when the bias is applied. 2-16 Agilent E5250A User’s Guide, Edition 11...

  • Page 49: To Set Gpib Address

    Max. total cable length = 20 m. • Maximum cable length between interfaces is 4 m. • Star connection and cascade connection are allowed. Loop connection is not allowed. Agilent E5250A User’s Guide, Edition 11 Installation Installing the E5250A 2-17...

  • Page 50: Maintenance

    It is recommended to perform the performance verification once a year at least. For the performance verification, contact your nearest Agilent Technologies Service Center. Trained service personnel will perform the performance verification.

  • Page 51: Executing Self-Test And Leak Test

    Executing Self-Test and Leak Test...
  • Page 52 This chapter describes how to execute the Self-Test and the Leak Test. The Self-Test consists of three tests that check the operation of Agilent E5250A firmware, LEDs, and key that are on the E5250A front panel, and the relays on the cards installed in the E5250A.

  • Page 53: Executing Self-Test

    Test Item Controller Test Front Panel Interface Test Relay Test Agilent E5250A User’s Guide, Edition 11 Executing Self-Test and Leak Test Description Checks the operation of Turning on the E5250A. the E5250A firmware. Entering SCPI Command. Using Self-Test Utility. Checks the operation of...

  • Page 54: To Execute Self-Test (Standalone)

    The Relay Test executes. Local/Self Test 8. Wait until the LED in Local/Self Test key on the E5250A front Local/Self Test key turns off. key to return to Local control. Local/Self Test key turns off. Agilent E5250A User’s Guide, Edition 11...
  • Page 55 • Output is not open. See step 2 of previous procedure. • You did not properly install the E5255A. See “To Configure E5255A” on page 2-10. • A plug-in card may be defective. Contact your nearest Agilent Technologies Service Center. Figure 3-1...

  • Page 56: To Execute Self-Test Using External Controller

    For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL. If the Fail LED turns on after executing the Self-Test, the E5250A or modules may be defective. Contact your nearest Agilent Technologies Service Center. NOTE Before executing Relay Test, be careful about following: •...
  • Page 57 Front Panel Interface Test, which turns on the Fail LED. If you pressed it means the If you find any problem, contact your nearest Agilent Technologies Service Center. Agilent E5250A User’s Guide, Edition 11 Description Executes Controller Test, :DIAG:TEST:FRAM:EXEC? CONT then returns test result.
  • Page 58 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 2" ENTER @Hp5250;A IF A=0 THEN GOTO 400 DISP "Card 2 failed. Press Continue to test Card 3" GOTO 410 DISP "Card 2 passed. Press Continue to test Card 3" PAUSE OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 3" Agilent E5250A User’s Guide, Edition 11...
  • Page 59 E5250A, then returns test result. 490 to 550 Executes the Relay Test for the card installed in slot 4 of the E5250A, then returns test result. Agilent E5250A User’s Guide, Edition 11 Executing Self-Test and Leak Test Executing Self-Test Description...

  • Page 60: Using The Self-Test Utility

    (E5250-60002) 1250-0929 3-10 Description Qty. Semiconductor Parameter Analyzer GPIB Cable E5250A Program Disk (furnished) Relay Test Adapter BNC Short Cap 3 for each E5255A (furnished with the E5255A) Agilent E5250A User’s Guide, Edition 11 Usage Executing Self-Test Utility Relay Test...

  • Page 61: To Start The Self-Test Utility

    IBASIC area on the 4155/4156 front panel. The following message is displayed: Input Agilent E5250A GPIB Address (default 722):? 9. To use default GPIB address 722, just press the address of your E5250A, then press...

  • Page 62: To Execute Self-Test

    For executing Relay Test for Card4. Executes Controller Test immediately. Executes Front Panel I/F Test immediately. Returns to MAIN MENU of Self-Test Utility immediately..Start E5250A Controller Test ... Return to MAIN MENU Agilent E5250A User’s Guide, Edition 11 Description...
  • Page 63 If you do not press the If you pressed it means the Contact your nearest Agilent Technologies Service Center. Agilent E5250A User’s Guide, Edition 11 key on the E5250A front panel within 10 seconds. Local/Self Test key within 10 seconds, the Fail LED turns on.
  • Page 64 Or press the CANCEL softkey to cancel test execution. 5. Repeat steps 1 to 4 for the each card you want to test. If [F] result is displayed after executing the Relay Test, the card is defective. Contact your nearest Agilent Technologies Service Center. 3-14 Description...

  • Page 65: To Execute Leak Test

    4155/4156 SMU to measure the leakage current for each channel. You need to execute this test for each input port. Table 3-4 Test Limits of Leak Test Card E5252A E5255A Agilent E5250A User’s Guide, Edition 11 Instrument Connection 4155 non-Kelvin 4156 non-Kelvin Kelvin...
  • Page 66 If only the E5255As are installed, only IVn softkeys displayed are for SMU INPUTn internally connected to the E5255A IV input. CANCEL Cancels the Leak Test execution. 3-16 Enter key. Enter Description Description Agilent E5250A User’s Guide, Edition 11 key.
  • Page 67 SMU6 are displayed only if 5th and 6th SMU are installed in the 41501 expander of the 4155/4156. CANCEL Cancels the Leak Test execution. Agilent E5250A User’s Guide, Edition 11 Executing Self-Test and Leak Test Using the Self-Test Utility Description...
  • Page 68 And the following softkeys are displayed. Softkey CONTINUE Executes the Leak Test. Consecutively connects input port specified by IVn softkey to each output port and makes leak measurement. CANCEL Cancels the Leak Test execution. 3-18 Description Description Agilent E5250A User’s Guide, Edition 11...
  • Page 69 10. To return to the LEAK TEST MENU, select the LEAK TEST softkey. And to perform the Leak Test for another input port, repeat steps 3 to 9. Agilent E5250A User’s Guide, Edition 11 Executing Self-Test and Leak Test Using the Self-Test Utility...
  • Page 70 Executing Self-Test and Leak Test Using the Self-Test Utility 3-20 Agilent E5250A User’s Guide, Edition 11...

  • Page 71: Setting Up Measurement Environment

    Setting up Measurement Environment...
  • Page 72 Setting up Measurement Environment This chapter explains how to connect your instruments to Agilent E5250A input, and how to connect the E5250A output to your wafer prober or test fixture. You can connect the E5250A output (E5252A or E5255A) to your prober or fixture in the following three ways: •...

  • Page 73: Connector Plates

    Full size connector plate for E5255A The 16495D has twelve 8-channel shielded coaxial connectors, an Intlk connector, and a GNDU connector. The back of each connector is designed for soldering. Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Connector Plates...

  • Page 74: Blank Plate

    This plate is used to cover openings when you made too big openings for mounting the connector plate. You will use this plate to cover openings if you mount the half size connector plate in openings made for the full size connector plate. Agilent E5250A User’s Guide, Edition 11...

  • Page 75: Connecting 8-Channel Shielded Coaxial Cable

    For highly accurate current forcing and measurements with minimized leakage, extend the guard to surround the signal lines as close as possible to the DUT. Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Connecting 8-Channel Shielded Coaxial Cable...

  • Page 76: Mounting Connectors Directly

    “To Connect Connectors to DUT” on page 4-13. Table 4-1 lists the parts required to mount connectors on your shielding box. From this table, select the parts that you need to mount. Quantity of parts depends on your site. Agilent E5250A User’s Guide, Edition 11...
  • Page 77 ∅3.2 8 Channel Shielded Coaxial Connector (in mm) 63.5 2 − ∅ 3 4 − R1.5 Agilent E5250A User’s Guide, Edition 11 Interlock Connector (6 pin, female) Switch ≅ 2.1 V @ I LED (V Wire (24 AWG, 600 V, 150 °C)

  • Page 78: To Make Interlock Circuit

    3) of the interlock connector. See Figure 4-2. For example, Agilent 4155/4156 is connected to the interlock circuit, it cannot force more than ±40 V when the door is open. When door is closed, it can force more than ±40 V. Agilent E5250A User’s Guide, Edition 11...
  • Page 79 Figure 4-3 Dimensions of Interlock Switch (Agilent part number 3101-0302) Figure 4-4 Dimensions of Interlock Switch (Agilent part number 3101-3241) Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Mounting Connectors Directly...
  • Page 80 Figure 4-5. 2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock connector. Refer to Figure 4-2. Figure 4-5 Dimensions of LED (Agilent part number 1450-0641) 4-10 Agilent E5250A User’s Guide, Edition 11...
  • Page 81 16435A (interlock cable adapter) by using the BNC cable that is furnished with the adapter. 2. Connect the 16435A adapter to the interlock connector by using the 16493J Interlock cable. Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Mounting Connectors Directly Description...
  • Page 82 LED turns on within 1 sec from when interlock circuit is shorted. • LED turns off within 1 sec from when interlock circuit is open. To stop the interlock test, select STOP secondary softkey. 4-12 front-panel key, then select CALIB/DIAG primary softkey to System Agilent E5250A User’s Guide, Edition 11...

  • Page 83: To Connect Connectors To Dut

    Never connect the guard terminal to any output, including circuit common, chassis ground, or the guard terminal of any other unit. Doing so may result in an emergency condition. Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment non-Kelvin connections Following connection is for the Kelvin connectors.
  • Page 84 Refer to following figure. Insulator (black) Outer conductor (for Guard signal) 4-14 Cover here using sleeve min 2 mm approx. 10 to 15 mm Insulator (clear) Conductive layer (black) Agilent E5250A User’s Guide, Edition 11 Center conductor (for Force/Sense signal)

  • Page 85: Connecting The E5250A Input

    SMU INPUT connectors (1&2, 3&4, or 5&6) of the E5250A. The input signal for each Kelvin input is as follows: • Odd input port number: FORCE • Even input port number: SENSE Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Connecting the E5250A Input 4-15...
  • Page 86 16493H GNDU cable and E5250-60044 Adapter − 16493H GNDU cable (for direct connection to Connector Plate) − Intlk 16435A Interlock cable adapter and 16493J Interlock cable (for direct connection to Connector Plate) Agilent E5250A User’s Guide, Edition 11 Cable Required...
  • Page 87 To connect instrument output that uses banana plug to AUX connector, use Dual Banana plug to BNC Adapter (Agilent part number 1251-2277). Figure 4-6 shows an example of connecting the E5250A to the 4156. Figure 4-6 Connection Example with Agilent 4156 Agilent E5250A User’s Guide, Edition 11 E5250A Input Output Connector...

  • Page 88: To Connect Bias Source To The E5255A Bias Input

    Figure 4-7. 2. Connect the GNDU cable between the instrument GNDU connector and the triaxial connector on the adapter. 4-18 Agilent Quantity 16493H E5250-60044 Agilent E5250A User’s Guide, Edition 11 Description GNDU Cable Triaxial to Dual Triaxial Adapter...
  • Page 89 By this connection, input signal for SMU INPUT connectors is as follows: If you make non-Kelvin connection for the E5250A outputs, use the odd input port only. Because non-Kelvin connection uses only Force signal for measurement. Agilent E5250A User’s Guide, Edition 11 SMU INPUT From...

  • Page 90: Connecting The E5250A Output

    Force or Sense Guard Signal line Ground Triaxial cable, 1.5m (for non-Kelvin connection) Triaxial cable, 3m (for non-Kelvin connection) Kelvin Triaxial cable, 1.5m (for Kelvin connection) Kelvin Triaxial cable, 3m (for Kelvin connection) Agilent E5250A User’s Guide, Edition 11 Ground Description...
  • Page 91 Figure 4-9 shows the 16494B Kelvin triaxial cable for the E5252A. Figure 4-9 16494B Kelvin Triaxial Cable for E5252A Connector Plate Side Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Kelvin Output Port Output Port Number 1 (Force) and 2 (Sense)

  • Page 92: To Connect The E5255A Output

    16494D 8-Channel Shielded Coaxial Cable for E5255A FEMALE E5255A 4-22 Force Guard Bias line Bias line Agilent Model No. 16494D-001 8-Ch Shielded Coaxial cable, 1.5m 16494D-002 8-Ch Shielded Coaxial cable, 3m Agilent E5250A User’s Guide, Edition 11 Ground Description MALE Connector Plate...

  • Page 93: Measurement Cable Length

    Cg-total = 145+(8×3)+75+125+(130×2)+10 pF = 639 pF < 900 pF Even if you use other instruments, you can use the table for reference about the measurement cable length and capacitance. Agilent E5250A User’s Guide, Edition 11 Setting up Measurement Environment Measurement Cable Length...
  • Page 94 16494A-002 (for non-Kelvin) 16494B-001 (for Kelvin) 16494B-002 (for Kelvin) 16494C-001 (for 4142B) 16494C-002 (for 4142B) 16494D-001 16494D-002 16494E-003 Agilent Part No. 8121-1191 Agilent E5250A User’s Guide, Edition 11 Cable Guard Length Capacitance 80 cm 75 pF 80 cm 90 pF 1.5 m...

  • Page 95: Controlling The E5250A

    Controlling the E5250A...
  • Page 96 Controlling the E5250A This chapter explains how to control Agilent E5250A. • “Methods for Controlling the E5250A” introduces several methods for controlling the E5250A. • “Switch Control Basics” introduces basic information for controlling the relay switches on the E5252A and E5255A plug-in cards.

  • Page 97: Methods For Controlling The E5250A

    4284A, and this subprogram returns the compensated value. To use this subprogram, link it to your program. For details, refer to Chapter 6. Agilent E5250A User’s Guide, Edition 11 Methods for Controlling the E5250A Operating System (Controller)

  • Page 98: Modifying A Sample Program

    The Virtual Front Panel (VFP) Utility is used to control the E5250A by using Agilent 4155/4156 Semiconductor Parameter Analyzer's built-in Instrument BASIC (IBASIC) controller. You can control the E5250A interactively without the control program. Refer to “Using Virtual Front Panel Utility” on page 5-25. Agilent E5250A User’s Guide, Edition 11...

  • Page 99: Switch Control Basics

    E5252A and the E5255A. • “Channel List and Channel Configuration” • “Connection Rule” • “Connection Sequence” • “Bias Mode” • “Couple Port” • “E5252A Channel List” • “E5255A Channel List” Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Switch Control Basics...

  • Page 100: Channel List And Channel Configuration

    Last two digits: specifies output port. Depends on type of card and Channel Configuration mode. Refer to “E5252A Channel List” on page 5-15 and “E5255A Channel List” on page 5-19. Agilent E5250A User’s Guide, Edition 11 Card No. Card No. Channel No.
  • Page 101 NOTE In the Auto Configuration mode, you can omit any zeros at beginning of channel. For example, channel 00101 can be expressed by 101. Agilent E5250A User’s Guide, Edition 11 Slot No. Card is Installed you specified Controlling the E5250A Switch Control Basics Card No.

  • Page 102: Channel Configuration

    For more information, refer to “E5252A Channel List” on page 5-15 and “E5255A Channel List” on page 5-19. Agilent E5250A User’s Guide, Edition 11...

  • Page 103: Connection Rule

    If the Free connection rule has been specified, ensure multiple input ports are not connected to the same output port. Such configurations can cause damage. Agilent E5250A User’s Guide, Edition 11 Each input port can be connected to only one output port, and each output port can be connected to only one input port.

  • Page 104: Connection Sequence

    2. Wait for relays to open. 3. Connect new route. Make Before Break 1. Connect new route. 2. Wait for relays to close. 3. Disconnect previous route. No Sequence 1. Disconnect previous route. 2. Connect new route. Agilent E5250A User’s Guide, Edition 11 Relay Operation...

  • Page 105: Bias Mode

    You can independently control the Bias Mode for each card installed in the E5250A. Refer to [:ROUTe]:BIAS[:STATe] in Chapter 7. For a programming example, refer to Chapter 6. Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Switch Control Basics...
  • Page 106 1 and 3 are not connected to the input Bias Port. 5-12 Input 01 Input 02 Input 03 Input 10 Connect to Bias port Agilent E5250A User’s Guide, Edition 11 Connect to Input 3 Connect to Input 1...

  • Page 107: Couple Port

    See Table 5-4. For example, if you specify input port number 1 in the [:ROUTe]:COUPle:PORT command, input ports 1 and 2 are coupled together. Table 5-4 Couple Port Number and Output Port Number Agilent E5250A User’s Guide, Edition 11 Couple Input Ports Port No.
  • Page 108 5-14 2XN-1 2XM-1 OUTPUT 1. Connect condition N=1 to 5 Close M=1 to 6 for Normal Config. Open M=1 to 24 (max) for Auto Config. Agilent E5250A User’s Guide, Edition 11 2XN-1 INPUT 2XM-1 OUTPUT 2. Disconnect condition...

  • Page 109: E5252A Channel List

    SMU6, HF2, and CV2 (Input Port No. 06, 08, and 10) For example, if you specify input port 05, then you cannot specify input ports 07 and 09. You can specify 05 and 06 at the same time. Agilent E5250A User’s Guide, Edition 11 One Channel: 5 digits Card Number (first 1 digit) One digit: 1 to 4.
  • Page 110 0803 0804 0805 0806 0807 0808 0809 0810 0811 0812 0903 0904 0905 0906 0907 0908 0909 0910 0911 0912 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 Output Port (Output Port No.) Agilent E5250A User’s Guide, Edition 11 XXXX : Channel No.
  • Page 111 For example, if you specify input port 05, then you cannot specify input ports 07 and 09. You can specify 05 and 06 at the same time: Agilent E5250A User’s Guide, Edition 11 One Channel: 5 digits Channel Number: 4 digits...
  • Page 112 0703 0704 0705 0706 0803 0804 0805 0806 0903 0904 0905 0906 1003 1004 1005 1006 Output Port (Output Port No.) Agilent E5250A User’s Guide, Edition 11 0145 0146 0147 0148 0245 0246 0247 0248 0345 0346 0347 0348 0445 0446 0447 0448...

  • Page 113: E5255A Channel List

    To specify a channel, you use five digits as shown in Table 5-7. Table 5-7 Specifying E5255A Channels in Normal Config. Mode Slot No. (E5255A installed) Agilent E5250A User’s Guide, Edition 11 Block No. Card Number of E5255A (first 1 digit) Controlling the E5250A...
  • Page 114 0103 0104 0105 0106 0107 0108 Block 2 5203 5204 5205 5206 5207 5208 0203 0204 0205 0206 0207 0208 Block 3 5303 5304 5305 5306 5307 5308 0303 0304 0305 0306 0307 0308 Agilent E5250A User’s Guide, Edition 11 XXXX : Channel No.
  • Page 115 SMU3 (3) to SMU4 (4) to SMU5 (5) to SMU6 (6) Card Number: Channel Number: Four digits: XXYY. Agilent E5250A User’s Guide, Edition 11 One Channel: 5 digits Channel Number: 4 digits Card Number Input Port No. (first 1 digit)
  • Page 116 For the internal connections of the E5255A, see Chapter 2. Figure 5-7 Example Setup of E5255A 5-22 2x48 Multiplexer 2x8 Multiplexer-1 2x16 Multiplexer-1 2x16 Multiplexer-2 Agilent E5250A User’s Guide, Edition 11 slot 1 slot 2 slot 3 slot 4 2x8 Multiplexer-2...
  • Page 117 1 to 3 SMU1 SMU2 SMU3 SMU4 SMU2 SMU3 SMU5 Agilent E5250A User’s Guide, Edition 11 One Channel: 5 digits Channel Number: 4 digits (first 1 digit) Input Port No. (next 2 digits) IV Input: 01 BIAS Input: 11 IV Input: 01...
  • Page 118 IV Input 0203 0215 0216 SMU5 (05) Output Made from Block #3 of Card in Slot #4. 1303 1315 1316 0303 0315 0316 Agilent E5250A User’s Guide, Edition 11 1403 1401 1402 1407 0402 0401 0403 0407 1502 1503 1501 1507...

  • Page 119: Using Virtual Front Panel Utility

    “Changing the VFP Setup Mode” • “Defining Labels for the E5250A Input Ports” • “Making Connections and Changing the Setup Data” • “Saving/Loading the Setup Data” Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Using Virtual Front Panel Utility 5-25...

  • Page 120: Functions Of Virtual Front Panel Utility

    Data Upload Library. Refer to Chapter 6. In the VFP, the following are always used and cannot be changed: • Connection Rule: FREE • Connection Sequence: Break Before Make • Couple Port function is not available in the VFP. 5-26 Agilent E5250A User’s Guide, Edition 11...

  • Page 121: Requirements

    IBASIC area on the 4155/4156 front panel. The following message is displayed: Input Agilent E5250A GPIB Address (default 722) : ? 9. To use default GPIB address 722, just press the If not, type the GPIB address of your E5250A, then press The main menu of VFP is displayed on the 4155/4156 screen.

  • Page 122: Confirming The E5250A Card Configurations

    IV input of each multiplexer block. The next parameter indicates if resistor is used between input Bias Port and IV Input ports as follows: • No Resistance: no resistor used. • With Resistance: resistor is used. 5-28 Description Agilent E5250A User’s Guide, Edition 11...

  • Page 123: Changing The Vfp Setup Mode

    MENU CAUTION If you change the VFP Setup Mode, all data is cleared from the setup memories when you return to the VFP main menu. Agilent E5250A User’s Guide, Edition 11 NORMAL or AUTO E5252A or E5255A ON or OFF Description For changing the channel configuration mode.
  • Page 124 Controlling the E5250A Using Virtual Front Panel Utility Figure 5-9 Example of SETUP MODE MENU Agilent E5250A Virtual Front Panel Utility ** SETUP MODE MENU ** CONFIG MODE : NORMAL CARD1 [E5252] CARD2 [E5252] CARD3 [E5255] CARD4 [E5255] !! CAUTION !! If any setting parameter of this menu is changed, all setup memory will be cleared.

  • Page 125: Defining Labels For The E5250A Input Ports

    Input Label Name. (Max 5 char string) Type desired label (maximum 5 characters), then press the If you press the key without typing any characters, the label is cleared. Enter Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Using Virtual Front Panel Utility Description Description key.
  • Page 126 Input Label Name. (Max 5 char string) Type desired label (maximum 5 characters), then press the If you press the Figure 5-10 Example of DEFINE LABEL MENU Agilent E5250A Virtual Front Panel Utility ** DEFINE LABEL MENU ** E5250A INPUT1 CARD1 CARD2...

  • Page 127: Making Connections And Changing The Setup Data

    "Open All" (no connection) setup. See later. MORE Displays more softkeys. See above table. MAIN MENU Returns to the VFP main menu. Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Using Virtual Front Panel Utility Description Description...
  • Page 128 Controlling the E5250A Using Virtual Front Panel Utility Figure 5-11 Example of SETUP MEMORY MENU Agilent E5250A Virtual Front Panel Utility ** SETUP MEMORY MENU ** Current Setup Memory : 1 Setup: Comment Select desired softkey. To change the E5250A setup to specified setup memory Select the GOTO SETUP softkey.
  • Page 129 CLEAR ALL Clears all setup memories. CANCEL Cancels the clear operation. Select the CLEAR ALL softkey to clear all setup memories. Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Using Virtual Front Panel Utility key. Enter key. The setup memory...
  • Page 130 Config mode, settings for all cards are on one MEMORY SETUP PANEL. For Normal Config mode, each card uses a different MEMORY SETUP PANEL. Figure 5-12 Memory Setup Panel for the E5252A in Auto Config. Agilent E5250A Virtual Front Panel Utility ** MEMORY SETUP PANEL ** Current Setup Memory : 1 Comment...
  • Page 131 Figure 5-13 Memory Setup Panel for the E5255A in Normal Config. (2 X 24 multiplexer) Agilent E5250A Virtual Front Panel Utility ** MEMORY SETUP PANEL ** Current Setup Memory : 1 Comment Card Number Input Use softkeys to move cursor and to change status.
  • Page 132 E5250A to the new settings. GOTO For changing the E5250A to settings of specified setup memory. SETUP See later. Changes Current Setup Memory to specified setup memory number. SETUP Returns to the SETUP MEMORY MENU. MEMORY 5-38 Description Agilent E5250A User’s Guide, Edition 11...
  • Page 133 IV6 (INPUT 6) and HF2 (INPUT 8) and CV2 (INPUT 10) For example, when IV5 is used, HF1 and CV1 cannot be used. Agilent E5250A User’s Guide, Edition 11 key without typing a comment, comment line is cleared. key without typing a number.
  • Page 134 Bias Port and Bias Mode is ON. See Softkey Menu 2 and Menu 3 on next pages. Displays the previous level of the softkey menu, shown previously in "To Modify the Settings in Current Setup Memory". Agilent E5250A User’s Guide, Edition 11...
  • Page 135 Bias Port. MORE Displays softkey menu 1. RETURN Displays the previous level of softkey menu. Agilent E5250A User’s Guide, Edition 11 Controlling the E5250A Using Virtual Front Panel Utility Description Description...

  • Page 136: Saving/Loading The Setup Data

    After loading the file, the E5250A changes to the setting of setup memory 1. 5-42 Description key without typing the file name. Enter Enter key without typing the file name. Enter Agilent E5250A User’s Guide, Edition 11 key. The VFP...

  • Page 137: Programming The E5250A

    Programming the E5250A...
  • Page 138 E5250A, and helps to increase your understanding about programming. CAUTION The VFP Data Upload Library and the Capacitance Compensation Routine can be used only in an program runs on HP BASIC. Agilent E5250A User’s Guide, Edition 11...

  • Page 139: Scpi Programming Basics

    This section describes the structure of SCPI commands, and the basics of using an program that contains SCPI commands to control the E5250A and runs on HP BASIC: • “SCPI Command Hierarchy” • “Controlling E5250A by Using HP BASIC” Agilent E5250A User’s Guide, Edition 11 Programming the E5250A SCPI Programming Basics...

  • Page 140: Scpi Command Hierarchy

    :ROUT:CONN:RULE ALL,FREE :ROUT:CONN:SEQ ALL,BBM So, using a semicolon reduces typing and simplifies the program. A command terminator (such as carriage return) resets the path to root. root sub-level 1 sub-level 2 Agilent E5250A User’s Guide, Edition 11...

  • Page 141: Controlling E5250A By Using Hp Basic

    Sets all cards to free connection rule. Sets all cards to break-before-make connection sequence. Creates channels 10101 and 10202. 120 and 130 Waits until all operations are complete. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A SCPI Programming Basics Description...

  • Page 142: Creating A Control Program

    The SCPI commands introduced in this section are ROUTe subsystem commands for controlling the E5250A. There are also other SCPI subsystem commands for the E5250A: DIAGnostic and SYSTem subsystem commands. For details about all SCPI commands, refer to Chapter 7. Agilent E5250A User’s Guide, Edition 11...
  • Page 143 For details about these parameters, refer to Chapter 5 and Chapter 7. CAUTION Bias Port and Couple Port cannot be set for the same input port number. Agilent E5250A User’s Guide, Edition 11 Command :ROUT:FUNC channel_config :ROUT:CONN:RULE card_no, rule...

  • Page 144: Defining Channel Configuration Mode

    100 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,FREE" 110 ! Sets all cards to Free Connection rule. Command Sets Normal Channel Configuration mode. Sets Auto Channel Configuration mode. Command Agilent E5250A User’s Guide, Edition 11 Description Description Sets Free Connection rule. Sets Single Connection rule.

  • Page 145: Defining Connection Sequence

    :ROUT:CONN:SEQ card_no,NSEQ :ROUT:CONN:SEQ card_no,BBM :ROUT:CONN:SEQ card_no,MBBR Example: 100 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM" 110 ! Sets all cards to Break-before-Make connection sequence. Agilent E5250A User’s Guide, Edition 11 Command Connection sequence not specified. Specifies Break-before-Make connection sequence. Specifies Make-before-Break connection sequence. Programming the E5250A...

  • Page 146: Using Bias Mode

    Command Turns on Bias Mode for card specified by card_no. Turns off Bias Mode for card specified by card_no. Agilent E5250A User’s Guide, Edition 11 Description input_port_no specifies which input port (on specified card) to be the input Bias Port.

  • Page 147: Using Couple Port (For E5252A Only)

    110 ! Sets up two couple ports (1&2 and 3&4) on all cards. 120 OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" 130 ! Turns on the couple port mode for all cards. Agilent E5250A User’s Guide, Edition 11 Command Command Turns on the couple port mode for card specified by card_no.

  • Page 148: Controlling Relay Switching

    100 OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" 110 ! Closes relays to create channels 10101 and 10202. 6-12 Command Close the relays specified by channel_list. Open the relays specified by channel_list. Open all relays on card specified by card_no. Agilent E5250A User’s Guide, Edition 11 Description...

  • Page 149: Programming Examples

    This section explains the following three examples: • “Channel Creation Example” • “Bias Mode Example” • “Couple Port Example” For each example, the required conditions, program list, and program description are given. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Programming Examples 6-13...

  • Page 150: Channel Creation Example

    E5252A Output Ports: Output 1 to 4 are used in the program, and should be connected as follows. • Output 1: Gate • Output 2: Drain • Output 3: Substrate • Output 4: Source 6-14 Agilent E5250A User’s Guide, Edition 11...
  • Page 151 280 END Line Number 170 to 180 220 to 240 Agilent E5250A User’s Guide, Edition 11 Description Declares data size of Channel$, which is used as channel_list parameter. Defines the desired channel_list. Here, insert the initialization routine for your measurement instrument.

  • Page 152: Bias Mode Example

    Bias Input Connection: BIAS INPUT 51 should be connected to bias source. E5255A Output Ports: • Block 1: outputs 1 to 8 are used in the program. • Block 2 and 3: not used. 6-16 Agilent E5250A User’s Guide, Edition 11...
  • Page 153 130 !OUTPUT @Hp5250;":ROUT:BIAS:PORT 1,7" 140 OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD 1" 150 OUTPUT @Hp5250;":ROUT:BIAS:STAT 1,ON" Line Number Agilent E5250A User’s Guide, Edition 11 Description Declares data size of Channel$, which is used as channel_list parameter. Defines the desired channel_list. Here, insert the initialization routine for your measurement instrument.
  • Page 154 Turns off the Bias Mode. 260 to 280 Opens all relays, then connects all output ports of block 1 to the input Bias Port again, and waits until the connections are completed. Resets the E5250A. 6-18 Description Agilent E5250A User’s Guide, Edition 11...

  • Page 155: Couple Port Example

    Couple Port, use Kelvin triaxial cable for instrument connection. E5252A Output Ports: Output 1, 2, 3, 4, 5, 6 should be connected to : Substrate, Gate, Drain, Drain, Source, Source, respectively. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Programming Examples 6-19...
  • Page 156 Defines the desired channel_list. Here, insert the initialization routine for your measurement instrument. Resets the E5250A. Sets the E5250A to Auto channel configuration mode. Sets the connection rule to Single. Sets the connection sequence to Break-Before-Make. Agilent E5250A User’s Guide, Edition 11...
  • Page 157 Waits until the relay close operation is completed. Here, insert measurement routine for your measurement instrument. 240 to 260 Opens all relays, and waits until open operation is completed. Resets the E5250A. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Programming Examples Description 6-21...

  • Page 158: Using The Vfp Data Upload Library

    For information about using the VFP, refer to “Using Virtual Front Panel Utility” on page 5-25. CAUTION The VFP Data Upload Library can be used only in an program runs on HP BASIC. 6-22 Agilent E5250A User’s Guide, Edition 11...

  • Page 159: Vfp Data Upload Library

    Parameter: Setup_data$: Example: CALL Init_vfp_setup(Mat48_data$) Agilent E5250A User’s Guide, Edition 11 Using the VFP Data Upload Library GPIB address of the E5250A. File name of data you want to load. Data string for internal use in the library. Must declare 14000 byte data size.
  • Page 160 Setup Memory number: 1 to 24. Data string for internal use in the library. Must declare 14000 byte data size. Setup Memory number from which to get comment: 1 to 24. Agilent E5250A User’s Guide, Edition 11...

  • Page 161: Programming Example

    Connects relays based on data from specified Setup Memory. 160 to 180 Gets the comment from specified Setup Memory, and displays the comment. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Using the VFP Data Upload Library Description 6-25...

  • Page 162: Before Executing Your Program

    For example, if the file is on the device ":CS80,701,1", you should change the mass storage device by using the MSI statement: MSI ":CS80,701,1" Or you can specify the mass storage device as follows: Load_vfp_data(Address_5250,"LOAD_FILE:CS80,701,1",Setup_data$) 6-26 Agilent E5250A User’s Guide, Edition 11...

  • Page 163: Error Messages

    Confirm the GPIB address of the E5250A, and the connection of the GPIB cable. Or the E5250A firmware may be defective. • Must execute Init_vfp_setup before Connect_vfp. Init_vfp_setup must be called before calling Connect_vfp. Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Using the VFP Data Upload Library 6-27...

  • Page 164: Using The Capacitance Compensation Routine

    Also the conditions specified in “Required Conditions” on page 6-30 must be satisfied. 6-28 1 kHz to 1 MHz Maximum 1000 pF At the end of the Agilent 16494A-001 (1.5 m triaxial cable) connected to the E5252A output terminal. Agilent E5250A User’s Guide, Edition 11...

  • Page 165: Capacitance Compensation Routine

    Freq L2_h L2_l L3_h L3_l Agilent E5250A User’s Guide, Edition 11 Using the Capacitance Compensation Routine Measurement Frequency (Hz): 1000 Hz to 1000000 Hz (1 kHz to 1 MHz). Length (in meters) of 16494A triaxial cable connected from E5252A output to connector plate.

  • Page 166: Required Conditions

    Use low noise coaxial cable (Agilent part number: 8121-1191) for minimizing the compensation error. You can also use another type of coaxial cable, triaxial cable, or combination of these. See “Using Other than Recommended Cable”. Agilent E5250A User’s Guide, Edition 11...
  • Page 167 DATA 100.70E-3, 400.00E-9, 80.00E-12 1440 DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl H 1450 DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl L Agilent E5250A User’s Guide, Edition 11 Programming the E5250A Using the Capacitance Compensation Routine GROUND (F) GUARD (D)

  • Page 168: Programming Example

    If error occurs, following error message is displayed, and program is paused: Parameter Out of Range Improper parameter value. Confirm and enter the available value. 6-32 ! SET Cp-G FUNCTION ! SET 16048D LENGTH Agilent E5250A User’s Guide, Edition 11...

  • Page 169: Command Reference

    Command Reference...
  • Page 170 Command Reference This chapter describes the following for Agilent E5250A: • SCPI commands available to control the E5250A via GPIB interface. SCPI is a universal programming language for electronic test and measurement instruments, and is based on IEEE 488.1 and IEEE 488.2.
  • Page 171 Braces (curly brackets) are used to enclose one or more parameters that may be included zero or more times. < > Angular brackets indicate that the word or words enclosed represent something other than themselves. For example, <newline>. Agilent E5250A User’s Guide, Edition 11 Command Reference...

  • Page 172: Common Commands

    Standard Event Status Register Query *IDN? Identification Query *OPC(?) Operation Complete Command (Query) *RST Reset Command *SRE(?) Service Request Enable Command (Query) *STB? Read Status Byte Query *TST? Self-Test Query *WAI Wait-to-Continue Command Name Agilent E5250A User’s Guide, Edition 11...
  • Page 173 8 bits are used, which correspond to the bits of the Standard Event Status Register. For details, refer to “Standard Event Status Enable Register” on page 7-54 Agilent E5250A User’s Guide, Edition 11 Explanation decimal integer (that is the sum of the binary-weighted values...
  • Page 174 OPC (Operation Complete) not used QYE (Query ERROR) DDE (Device-Dependent ERROR) EXE (Execution ERROR) CME (Command ERROR) not used PON (Power on) Agilent E5250A User’s Guide, Edition 11 using decimal numeric using binary numeric using octal numeric using hexadecimal numeric...
  • Page 175 The following table shows the bits of the Standard Event Status Register, and the binary-weighted decimal value of each bit. Example OUTPUT @Hp5250;"*ESR?" ENTER @Hp5250;A Agilent E5250A User’s Guide, Edition 11 decimal integer value that is the sum of the binary-weighted values for the set bits binary- description...
  • Page 176 HEWLETT-PACKARD,model,0,revision <newline><^END> Response model revision Example DIM A$[50] OUTPUT @Hp5250;"*IDN?" ENTER @Hp5250;A$ PRINT A$ An example result of above program is: HEWLETT-PACKARD,E5250A,0,A.01.00 Type character model number. E5250A character revision number. A.01.00 or later Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 177 *OPC? places ASCII character 1 into the Output Queue when all pending operations are completed. For details, refer to “Output Queue” on page 7-55. Example OUTPUT @Hp5250;"*OPC" The following example is for query: OUTPUT @Hp5250;"*OPC?" ENTER @Hp5250;A Agilent E5250A User’s Guide, Edition 11 Command Reference *OPC...
  • Page 178 For the power-on settings, see :SYSTEM:CPON. 7-10 Normal Config Mode Free Break Before Make • E5252A: 10 • E5255A: None All channels (output ports) are bias enabled No Couple Port All relays open No Change Agilent E5250A User’s Guide, Edition 11...
  • Page 179 The following table shows the bits of the Status Byte Register, and the binary-weighted decimal value of each bit. Agilent E5250A User’s Guide, Edition 11 decimal integer (that is the sum of the binary-weighted values for the desired bits), hexadecimal, octal, or binary value...
  • Page 180 OUTPUT @Hp5250;"*SRE 48" OUTPUT @Hp5250;"*SRE #B110000" OUTPUT @Hp5250;"*SRE #Q60" OUTPUT @Hp5250;"*SRE #H30" The following is example for query: OUTPUT @Hp5250;"*SRE?" ENTER @Hp5250;A 7-12 using decimal numeric using binary numeric using octal numeric using hexadecimal numeric Agilent E5250A User’s Guide, Edition 11...
  • Page 181 The following table shows the bits of the Status Byte Register, and the binary-weighted decimal value of each bit. Example OUTPUT @Hp5250;"*STB?" ENTER @Hp5250;A Agilent E5250A User’s Guide, Edition 11 decimal integer value that is the sum of the binary-weighted values for the set bits binary- description weight not used.
  • Page 182 This command stops execution of any commands until the Operation Complete (OPC) bit is set to 1, which means there is no pending operation. Refer to *OPC command. Syntax *WAI Example OUTPUT @Hp5250;"*WAI" 7-14 test_result pass fail Agilent E5250A User’s Guide, Edition 11 Explanation...

  • Page 183: Diagnostic Subsystem

    The :DIAGnostic subsystem commands ignore the E5250A channel configuration mode. For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL. :DIAGnostic Command Tree :DIAGnostic Parameter values: card_number: Agilent E5250A User’s Guide, Edition 11 Command :TEST :CARD :CLEar [:EXECute]? :STATe?
  • Page 184 <newline><^END> 1 : Fail card exists 0 : Pass Example OUTPUT @Hp5250;":DIAG:TEST:CARD? ALL" 7-16 Parameter card number: 1, 2, 3, 4, or ALL Parameter card number: 1, 2, 3, 4, or ALL Agilent E5250A User’s Guide, Edition 11 Explanation Explanation...
  • Page 185 This command clears test result of the specified E5250A test. Syntax :DIAGnostic:TEST:FRAMe:CLEar CONTroller | FPANel CONTroller FPANel Example OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE CONT" Agilent E5250A User’s Guide, Edition 11 Parameter card number: 1, 2, 3, 4 Parameter Controller test Front panel interface test Command Reference...
  • Page 186 If key is not pressed within 10 seconds, this test result will be fail. Syntax :DIAGnostic:TEST:FRAMe[:EXECute]? CONTroller | FPANel CONTroller FPANel Query response test_result <newline><^END> 1 : Fail 0 : Pass Example OUTPUT @Hp5250;":DIAG:TEST:FRAM? CONT" 7-18 Parameter Controller test Front panel interface test Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 187 CONTroller FPANel Query response test_result <newline><^END> 1 : Fail 0 : Pass -1 : Not Tested Example OUTPUT @Hp5250;":DIAG:TEST:FRAM:STAT? CONT" ENTER @Hp5250;A Agilent E5250A User’s Guide, Edition 11 Parameter Controller test Front panel interface test Command Reference :DIAGnostic:TEST:FRAMe:STATe? Explanation 7-19...

  • Page 188: Route Subsystem

    [:STATe]? :CLOSe :CARD? [:LIST] [:LIST]? 7-20 Parameter card_number | ALL :CARD (@channel_list) [:LIST] [:LIST]? (@channel_list) card_number | ALL :CARD [:LIST] (@channel_list) (@channel_list) [:LIST]? card_number | ALL,bias_port card_number card_number | ALL,state card_number card_number (@channel_list) (@channel_list) Agilent E5250A User’s Guide, Edition 11...
  • Page 189 ON | OFF | 0 | 1 rule: FREE | SROU channel_config: ACON | NCON sequence: NSEQ | BBM | MBBR Agilent E5250A User’s Guide, Edition 11 Command Reference :ROUTe Command Tree Parameter card_number | ALL,rule card_number card_number | ALL,sequence...
  • Page 190 For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Parameter Channels to bias disable. For details about channel_list, refer to Chapter 5. Agilent E5250A User’s Guide, Edition 11 Explanation Explanation...
  • Page 191 In above example, A$ will be as follows: 1,0,1 10101 and 10201 have the same meaning because the specified input port is ignored. Agilent E5250A User’s Guide, Edition 11 [:ROUTe]:BIAS:CHANnel:DISable[:LIST]? Parameter Channels to check. For details about channel_list, refer to Chapter 5.
  • Page 192 At *RST, all output ports are bias enabled. Syntax [:ROUTe]:BIAS:CHANnel:ENABle:CARD card_number card_number Example OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL" 7-24 Parameter card number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 193 In above example, the input Bias Port on card 1 is enabled for output ports 1 and 2. Specified input ports 4 and 5 are ignored because input port is always the input Bias Port. Agilent E5250A User’s Guide, Edition 11 [:ROUTe]:BIAS:CHANnel:ENABle[:LIST] Parameter Channels to bias enable.
  • Page 194 In above example, A$ will be as follows: 1,0,1 10101 and 10201 have the same meaning because the specified input port is ignored. 7-26 Parameter Channels to check. For details about channel_list, refer to Chapter 5. Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 195 [:ROUTe]:BIAS:PORT card_number,bias_port card_number bias_port Example OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,6" Agilent E5250A User’s Guide, Edition 11 Parameter card number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Input port number: 1 to 10.
  • Page 196 OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,4" OUTPUT @Hp5250;":ROUT:BIAS:PORT? 1" ENTER @Hp5250;A For above example, A will be as follows: 7-28 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 197 [:ROUTe]:BIAS[:STATe] card_number,state card_number state Example OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON" Agilent E5250A User’s Guide, Edition 11 Parameter card number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL ON or 1: turn ON the Bias Mode...
  • Page 198 For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation Explanation...
  • Page 199 1 : closed, or 0 : opened Example OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" OUTPUT @Hp5250;":ROUT:CLOS? (@10101,10102,10201,10202)" ENTER @Hp5250;A$ In above example, A$ will be 1,0,0,1. Agilent E5250A User’s Guide, Edition 11 Parameter Channels to close. For details about channel_list, refer to Chapter 5. Parameter Channels to check.
  • Page 200 For Normal Config mode: 1, 2, 3, 4, or ALL FREE: free route SROUte: single route Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation Explanation...
  • Page 201 Syntax [:ROUTe]:CONNection:SEQuence card_number,sequence card_number sequence Example OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR" Agilent E5250A User’s Guide, Edition 11 Parameter card number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL NSEQ: No-Sequence mode BBM: Break-Before-Make mode...
  • Page 202 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR" OUTPUT @Hp5250;":ROUT:CONN:SEQ? 0" ENTER @Hp5250;A$ In above example, A$ will be as follows: MBBR 7-34 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 203 The lower output port of the couple port is always the odd number port, even if you specify an even output port in the :ROUT:CLOS command. For example, if you used :ROUT:CLOS (@10104), the connections would be the same as above. Agilent E5250A User’s Guide, Edition 11 Parameter card number:...
  • Page 204 OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1,3'" OUTPUT @Hp5250;":ROUT:COUP:PORT? 1" ENTER @Hp5250;A$ In above example, A$ will be as follows: 7-36 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 205 [:ROUTe]:COUPle[:STATe] card_number,state card_number state Example OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" Agilent E5250A User’s Guide, Edition 11 Parameter card number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL ON or 1: turn ON the Couple Port Mode...
  • Page 206 OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON" OUTPUT @Hp5250;":ROUT:COUP:STAT? 2" ENTER @Hp5250;A For above example, A will be as follows: 7-38 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 207 ACON or NCON <newline><^END> Example OUTPUT @Hp5250;":ROUT:FUNC ACON" OUTPUT @Hp5250;":ROUT:FUNC?" ENTER @Hp5250;A$ In above example, A$ will be as follows: ACON Agilent E5250A User’s Guide, Edition 11 Parameter ACONfig: Auto Config Mode NCONfig: Normal Config Mode Command Reference [:ROUTe]:FUNCtion Explanation...
  • Page 208 For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL Parameter Channels to open (disconnect). For details about channel_list, refer to Chapter 5. Agilent E5250A User’s Guide, Edition 11 Explanation Explanation...
  • Page 209 OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL" OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)" OUTPUT @Hp5250;":ROUT:OPEN? (@10101,10102,10201,10202)" ENTER @Hp5250;A$ In above example, A$ will be as follows: 0,1,1,0 Agilent E5250A User’s Guide, Edition 11 Parameter Channels to check. For details about channel_list, refer to Chapter 5. Command Reference [:ROUTe]:OPEN[:LIST]?

  • Page 210: System Subsystem

    :SYSTem Command Tree Command :SYSTem :CCONfig? :CDEScription? :CPON :CTYPe? :ERRor? :VERSion? Parameter values: card_number: Auto Config Mode: 0 Normal Config Mode: 1 | 2 | 3 | 4 7-42 Parameter card_number card_number card_number | ALL card_number Agilent E5250A User’s Guide, Edition 11...
  • Page 211 OUTPUT @Hp5250;":SYST:CCON? 1" ENTER @Hp5250;A$ ENTER A$ USING "3X,6A";B$ FOR I=1 TO 6 C=NUM(B$[I;1]) PRINT "BYTE No. ";I;"= ";C NEXT I Agilent E5250A User’s Guide, Edition 11 Parameter card number: 1, 2, 3, or 4 Command Reference :SYSTem:CCONfig? Explanation 7-43...
  • Page 212 For E5255A in Normal Config mode: "E5255A 24 (8x3) Channel Multiplexer" Example OUTPUT @Hp5250;":SYST:CDES? 1" ENTER @Hp5250;A$ 7-44 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 213 Card Channel Status: Self-Test Result: For the device reset state, see *RST. Syntax :SYSTem:CPON card_number card_number Example OUTPUT @Hp5250;":SYST:CPON ALL" Agilent E5250A User’s Guide, Edition 11 No Change Free Break Before Make • E5252A : 10 • E5255A : None...
  • Page 214 If designated card is not installed or initialize failed, this command returns NONE,NONE,0,0 Example OUTPUT @Hp5250;":SYST:CTYPE? 1" ENTER @Hp5250;A$ 7-46 Parameter card number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Agilent E5250A User’s Guide, Edition 11 Explanation...
  • Page 215 This command has query form only. Syntax :SYSTem:VERSion? Query response YYYY.V <newline><^END> YYYY is the year (for example, 1995). V is the approved revision number for that year. Example OUTPUT @Hp5250;":SYST:VERS?" ENTER @Hp5250;A$ Agilent E5250A User’s Guide, Edition 11 Command Reference :SYSTem:ERRor? 7-47...

  • Page 216: Status Reporting Structure

    In general, the status reporting structure is used to request service via Service Request (SRQ) or to indicate a specific condition, such as operation complete. Refer to the following figures for a model of the E5250A status reporting structure. 7-48 Agilent E5250A User’s Guide, Edition 11...
  • Page 217 (must be in the program) that uses a Serial Poll to read Status Byte of each instrument to determine which instrument requested service. See “Status Byte Register” on page 7-50. Agilent E5250A User’s Guide, Edition 11 7-49...

  • Page 218: Status Byte Register

    • SPOLL returns RQS for bit6 • *STB? returns MSS for bit6 RQS and MSS are always the same value, so returned Status Byte value is always the same for these two methods. 7-50 Agilent E5250A User’s Guide, Edition 11...
  • Page 219 In general, use serial polling (not *STB?) inside interrupt service routines. Use *STB? in other cases (not in interrupt service routine) when you want to know the value of Status Byte. Table 7-1 Status Byte Register of E5250A Agilent E5250A User’s Guide, Edition 11 Definition Not Used. Always zero. Not Used.

  • Page 220: Service Request Enable Register

    The Service Request Enable Register is an 8-bit register that can be used by the programmer to select which summary messages in the Status Byte Register may cause service requests. Refer to Figure 7-3. Figure 7-3 Service Request Enable Register of E5250A 7-52 Agilent E5250A User’s Guide, Edition 11...

  • Page 221: Standard Event Status Register

    Standard Event Status Register Standard Event Status Register The Standard Event Status Register has specific events assigned to specific bits. Refer to Figure 7-4 and Table 7-2. Figure 7-4 Standard Event Status Register of E5250A Agilent E5250A User’s Guide, Edition 11 7-53...

  • Page 222: Standard Event Status Enable Register

    A command syntax error has been detected. (CME) Not Used Always 0. Power On (PON) This event bit indicates that an off-to-on transition has occurred in instrument's power supply. Not used Always 0. Agilent E5250A User’s Guide, Edition 11 Explanation...

  • Page 223: Output Queue

    Output Queue in response to query commands. These messages are removed from the Output Queue as they are read by the controller. As long as the Output Queue contains an unread message, MAV is 1. Agilent E5250A User’s Guide, Edition 11 7-55...
  • Page 224 Command Reference Output Queue 7-56 Agilent E5250A User’s Guide, Edition 11...

  • Page 225: Vxiplug&Play Driver

    VXIplug&play Driver...
  • Page 226 VXIplug&play Driver This chapter introduces the VXIplug&play driver available for Agilent E5250A, and consists of the following sections: • “System Requirements” • “Installing VXIplug&play Driver” • “Driver Functions” Agilent E5250A User’s Guide, Edition 11...

  • Page 227: System Requirements

    2 MB for 4155/4156 driver 1 MB for E5250A driver NOTE For the latest system requirements, go to www.agilent.com and type in E5250A in the Search field at the top of the page. Agilent E5250A User’s Guide, Edition 11 VXIplug&play Driver System Requirements...

  • Page 228: Installing Vxiplug&Play Driver

    <install folder>\Winnt\Hpe5250a folder. Execute echo %VXIPNPPATH% on the Command Prompt to know <install folder>. • hpe5250a.bas • hpe5250a.c • hpe5250a.def • hpe5250a.fp • hpe5250a.GID • hpe5250a.h • hpe5250a.hlp • readme.txt • DelsL1.isu Agilent E5250A User’s Guide, Edition 11...

  • Page 229: Driver Functions

    Couple Port hpe5250a_couplePort hpe5250a_coupleState Agilent E5250A User’s Guide, Edition 11 Description Initializes the E5250A. Closes the connection with the E5250A. Executes the E5250A reset. Executes the E5250A self-test. Queries for the E5250A error code/message. Queries for the driver error.
  • Page 230 Sends a command to read 32 bit integer response. Sends a command to read 32 bit integer array response. Sends a command to read 64 bit real response. Sends a command to read 64 bit real array response. Agilent E5250A User’s Guide, Edition 11...
  • Page 231 ViStatus _VI_FUNC hpe5250a_biasChanList(ViSession vi, ViInt16 biaschan_disen, ViInt32 _VI_FAR biaschan_list[ ] ); Parameters biaschan_disen biaschan_list[ ] Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Bias status. 0 : sets bias enabled card. 1 : sets bias disabled card.
  • Page 232 Bias status of the channels given in the biaschan_list. Returned value depends on the setting of bias_disen as shown below: when bias_disen=0, 0 means bias disabled, 1 means enabled. when bias_disen=1, 0 means bias enabled, 1 means disabled. Agilent E5250A User’s Guide, Edition 11...
  • Page 233 Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5 state Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). (all card) in the normal configuration mode, or 0 (all card in the automatic configuration mode).
  • Page 234 Card number. 1 (card 1), 2 (card 2), 3 (card 3), or 4 (card 4) in the normal configuration mode, or 0 (all card in the automatic configuration mode). For the configuration mode, see hpe5250a_func. Channels closed of the specified card. Agilent E5250A User’s Guide, Edition 11...
  • Page 235 ViStatus _VI_FUNC hpe5250a_closeList(ViSession vi, ViInt32_VI_FAR closechan_list[ ] ); Parameters closechan_list[ ] Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Channel numbers to connect. 5 digits integer. ABCDE. where A: card number, BC: input port number, DE: output port number.
  • Page 236 A=0, BC=01, and DE=01, channel number should be 101 instead of 00101. Status of the channels given in the closechan_list. 0 (opened) or 1 (closed). Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Agilent E5250A User’s Guide, Edition 11...
  • Page 237 ViStatus _VI_FUNC hpe5250a_cmdInt(ViSession vi, ViString cmd_str, ViInt32 value); Parameters cmd_str value Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Length of result in bytes. 2 to 32767. Response from instrument.
  • Page 238 Size of result[ ] (number of items in the array). 1 to 2147483647. Response from instrument. Count of valid items in result[ ]. Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Response from instrument. Agilent E5250A User’s Guide, Edition 11...
  • Page 239 ViStatus _VI_FUNC hpe5250a_cmdInt32_Q(ViSession vi, ViString cmd_str, ViPInt32 result); Parameters cmd_str result Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Size of result[ ] (number of items in the array). 1 to 2147483647.
  • Page 240 Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Size of result[ ] (number of items in the array). 1 to 2147483647. Response from instrument. Count of valid items in result[ ]. Agilent E5250A User’s Guide, Edition 11...
  • Page 241 ViInt32 size, ViChar _VI_FAR result[ ] ); Parameters cmd_str size result[ ] Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Instrument command (cannot exceed 256 bytes in length). Response from instrument. Instrument handle returned from hpe5250a_init( ).
  • Page 242 If you do not use coaxial cable, enter 0 (zero). Capacitance value (in F) measured by the 4284A. Conductance value (in S) measured by the 4284A. Capacitance compensation result (in F). Conductance compensation result (in S). Agilent E5250A User’s Guide, Edition 11...
  • Page 243 Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5 (all card) in the normal configuration mode, or 0 (all card in the automatic configuration mode).
  • Page 244 Couple port by the input ports 5 and 6. 0 (disable) or 1 (enable). Couple port by the input ports 7 and 8. 0 (disable) or 1 (enable). Couple port by the input ports 9 and 10. 0 (disable) or 1 (enable). Agilent E5250A User’s Guide, Edition 11...
  • Page 245 Syntax ViStatus _VI_FUNC hpe5250a_dcl(ViSession vi); Parameters Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5 (all card) in the normal configuration mode, or 0 (all card in the automatic configuration mode).
  • Page 246 ] Instrument’s error message. This is limited to 256 characters. 8-22 Instrument handle returned from hpe5250a_init( ). Error return value from the driver function. Error message string. This is limited to 256 characters. Instrument handle returned from hpe5250a_init( ). Instrument’s error code. Agilent E5250A User’s Guide, Edition 11...
  • Page 247 Syntax ViStatus _VI_FUNC hpe5250a_errorQueryDetect_Q(ViSession vi, ViPBoolean pErrDetect); Parameters pErrDetect Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Instrument handle returned from hpe5250a_init( ). Error checking enable (VI_TRUE) or disable (VI_FALSE). VXIplug&play Driver Driver Functions 8-23...
  • Page 248 Instrument handle returned from hpe5250a_init( ). Response from instrument. Bit Value Message “ESR_OPC” “ESR_RQL” “ESR_QYE_ERROR” “ESR_DEVICE_DEPENDENT_ERROR” “ESR_EXECUTION_ERROR” “ESR_COMMAND_ERROR” “ESR_URQ” “ESR_PON” OTHERS “ESR_MULTI_EVENT” Instrument handle returned from hpe5250a_init( ). Configuration mode. 0 (auto) or 1 (normal). Agilent E5250A User’s Guide, Edition 11...
  • Page 249 This function does the *OPC? common command. Syntax ViStatus _VI_FUNC hpe5250a_opc_Q(ViSession vi, ViPBoolean result); Parameters result Agilent E5250A User’s Guide, Edition 11 Instrument description. Examples; GPIB0::1::INSTR. VI_TRUE (to perform In-System Verification), or VI_FALSE (do not perform In-System Verification). VI_TRUE (to perform reset operation), or VI_FALSE (do not perform reset operation).
  • Page 250 Channel numbers to disconnect. 5 digits integer. ABCDE. where A: card number, BC: input port number, DE: output port number. Top zero(s) can be ignored. For example, if A=0, BC=01, and DE=01, channel number should be 101 instead of 00101. Agilent E5250A User’s Guide, Edition 11...
  • Page 251 ViStatus _VI_FUNC hpe5250a_readStatusByte_Q(ViSession vi, ViPInt16 statusByte); Parameters statusByte Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Channel numbers to know the open status. 5 digits integer. ABCDE. where A: card number, BC: input port number, DE: output port number.
  • Page 252 ] instr_rev[ ] 8-28 Instrument handle returned from hpe5250a_init( ). Instrument handle returned from hpe5250a_init( ). Instrument driver revision. This is limited to 256 characters. Instrument firmware revision. This is limited to 256 characters. Agilent E5250A User’s Guide, Edition 11...
  • Page 253 DATA07 DATA08 DATA09 # END of Data Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Compensation data file name. Use absolute path. If the value is NULL string, the default data is used. C Compensation coefficient data table Change the value for R,L,C of DATA05,06,07 or 08.
  • Page 254 2 (card 2 relay test result) 3 (card 3 relay test result) 4 (card 4 relay test result) 5 (relay test result of all card) 6 (front panel test result) 7 (controller test result) Agilent E5250A User’s Guide, Edition 11...
  • Page 255 ViStatus_VI_FUNC hpe5250a_timeOut_Q(ViSession vi, ViPInt32 pTimeOut); Parameters pTimeOut Agilent E5250A User’s Guide, Edition 11 Instrument handle returned from hpe5250a_init( ). Test to be executed. 1 (card 1 relay test) to 4 (card 4 relay test), 5 (relay test for all card), 6 (front panel test), or 7 (controller test).
  • Page 256 VXIplug&play Driver Driver Functions 8-32 Agilent E5250A User’s Guide, Edition 11...

  • Page 257: Executing Sample Programs

    Executing Sample Programs...
  • Page 258 “HCI Measurement Program” The sample programs are saved in the E5250A Program Disk (LIF formatted, 3.5-inch diskette) that is furnished with Agilent E5250A. This disk includes the setup files for controlling Agilent 4155/4156 Semiconductor Parameter Analyzer used in the program with Agilent E5250A.

  • Page 259: Vth And Capacitance Measurement Program

    This program measures the parameters of the devices shown in Table 9-1 by using the Agilent 4155/4156 Semiconductor Parameter Analyzer, the Agilent 4284A Precision LCR Meter, and the Agilent E5250A with the E5252A card. The program flow is shown in Table 9-2. In this program, the 4155/4156 is set up by loading the 4155/4156 setup file E5252.MES, which is saved on the E5250A...
  • Page 260 3. Measures capacitance. 4. Disconnects the connection channels in the E5250A. 5. Compensates the measurement data. 6. Judges pass or fail. 7. Displays result and measurement data on computer's screen. 8. Resets instrument. Resets all instruments. Agilent E5250A User’s Guide, Edition 11...
  • Page 261 I NAME SMU1 SMU2 SMU3 SMU4 User Function Setup: NAME UNIT SQRTId GRAD BETA Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program Channels Source Setup MODE FUNCTION CONST 0 to 5V, 50mV step VAR1 Common...
  • Page 262 • 4284A Setup: Measurement Frequency Signal Level Measurement Function Y1axis SQRTId LINEAR 200 m at a point where Channels 100 kHz 0.03 V Cp-G Agilent E5250A User’s Guide, Edition 11 Y2axis GRAD LINEAR 80 m...

  • Page 263: Setting Up The Measurement Environment

    16494A-003 16494A-001 or -002 16495F 4284A with 4284A-006 16048D/E 1250-2405 10833A/B/C Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program Description Low Leakage Switch Mainframe 10×12 Matrix Switch Semiconductor Parameter Analyzer Triaxial Cable (80 cm) Triaxial Cable (1.5 m or 3 m)
  • Page 264 SMU 3 SMU INPUT 3 SMU 4 SMU INPUT 4 Hp, Hc AUX INPUT CV1 Lp, Lc AUX INPUT CV2 Agilent E5250A User’s Guide, Edition 11 DUT Terminal (via Connector Plate) Output Port OUTPUT 1 MOSFET Drain OUTPUT 2 MOSFET Gate...

  • Page 265: Executing The Program

    In following example, the file is stored as program file C_COM. GET "C_COMPEN" RE-STORE "C_COM" For details of Capacitance Compensation Routine, refer to “Using the Capacitance Compensation Routine” on page 6-28. Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program...
  • Page 266 Test Time : 30 Sep 1995 10:29:27 # P/F P 10.000E-002 18.255E-001 20.000E-001 MOSFET Vth Measurement F 8.000E-12 9-10 : Vth & C Meas. Sample Program Min. Meas. Max. 2.164E-11 2.000E-11 Agilent E5250A User’s Guide, Edition 11 Comment Capacitance Measurement...

  • Page 267: Modifying The Program

    Header comment (title) of the report. Test_num Initial number for numbering the test item. If value is 0, the first test item will be number 1. Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program Description Default Default "Vth C Meas.
  • Page 268 ! OUTPUT @Hp415x;":MMEM:STOR:TRAC DEF,'VTH.DAT','DISK'" ! OUTPUT @Hp415x;"*OPC?" ! ENTER @Hp415x;A The measurement data will be saved to the VTH.DAT file after the measurement. If desired, you can use another file name instead of VTH.DAT. 9-12 Description Agilent E5250A User’s Guide, Edition 11 Default...
  • Page 269 Meas_vth subprogram, "Test measurement data" block: IF Vth<Vth_min OR Vth>Vth_max THEN • Meas_vth subprogram, "Reset Instrument" block: OUTPUT Out_str$ USING Img1;Test_num,Result$,Vth_min,V th,Vth_max,Test_comm$ Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program Default "MOSFET Vth Measurement" "E5252.MES"...
  • Page 270 To change the E5250A input port/output port connections, change the Channel$ parameter. And if you want to change the E5250A connection functions (Channel Configuration mode, etc.), modify the Set5250init subprogram. 9-14 Description "Capacitance Measurement" 2.0E-11 8.0E-12 0.03 1.0E+5 "(@10905,11006)" Agilent E5250A User’s Guide, Edition 11 Default...
  • Page 271 Meas_c "Constant Definition" block Meas_c "Connect to DUT" block Meas_c "Connection All Open" block Set5250init Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs Vth and Capacitance Measurement Program Program Line Test_comm$="MOSFET Vth Measurement" Channel$="(@10101,10202,10303,10404)" OUTPUT @Hp5250;":ROUT:CLOS "&Channel$ OUTPUT @Hp5250;"*OPC?"...
  • Page 272 In Load_vfp_data subprogram, enter your VFP data file name instead of "VFP_FILE". Your VFP data file must contain data for at least 3 Setup Memories: for Vth measurement, C mea- surement, and "Open All" condition. 9-16 Program Line Agilent E5250A User’s Guide, Edition 11...

  • Page 273: Hci Measurement Program

    The HCI measurement sample program (SP_MUX_M) requires bias sources. You must modify or add a control routine for your bias sources to the program. Refer to “Adding the Bias Source Control Routine” on page 9-23. Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program...
  • Page 274 Determines Stress Condition. See later. Selects devices valid for the HCI test. See later. Characterizes the initial parameters. See later. Applies stress and characterizes the parameters. See later. Agilent E5250A User’s Guide, Edition 11 4155/4156 setup file IBVG.MES IGLEAK.MES IDLEAK.MES PARAM.MES...
  • Page 275 Channel/Source Setup: V NAME I NAME SMU1 SMU3 SMU4 GNDU Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program Device 3 ....
  • Page 276 For changing the conditions, refer to “Modifying the Program” on page 9-35. 9-20 DEFINITION DIFF(ID,VG) @MX-(@MY1/@MY2)-AT(VD,1)/2 MAX(Gm) @L2X @L1Y1 Y1axis LINEAR LINEAR 2 mA at a point where at a point where Agilent E5250A User’s Guide, Edition 11 Y2axis 1.5 mS...
  • Page 277 50 sec 50 sec 100 sec 100 sec 200 sec 300 sec 500 sec 500 sec 1000 sec Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program Stress Cumulative Stress time cycle stress time 1000 sec 2000 sec...
  • Page 278 8 Channel Shielded Coaxial Cable (1.5 m or 3 m) Connector Plate GPIB Cable E5250A Program Disk (furnished) Bias Source BNC - BNC cable (for Bias Source) 3.5 inch diskette (for storing measurement data and modified program) Agilent E5250A User’s Guide, Edition 11 Qty.

  • Page 279: Adding The Bias Source Control Routine

    4. Save modified file to an empty formatted diskette as in following example. This diskette is used for executing program. And the data measured and analyzed will be saved to this diskette automatically during program execution. RE-STORE "SP_MUX" Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program 9-23...

  • Page 280: Setting Up The Measurement Environment

    3. Connect all equipment and devices as shown in Figure 9-4 and Table 9-7. Refer to Chapter 4 for the details of the connection from the E5250A output to Device Under Test (DUT). 9-24 Agilent E5250A User’s Guide, Edition 11...
  • Page 281 Port SMU 1 SMU 3 SMU 4 GNDU Agilent E5250A User’s Guide, Edition 11 IVin2 cable IVout1 For E5255A in Slot 1: Connect IVin1 to SMU1, and set SW1/SW2/SW3 to For E5255A in Slot 2: Connect IVin1 to SMU3, and...
  • Page 282 9-26 16494D-001 or 002 Output 1--24 25--48 49--72 E5250A 16494A-003 (3ea.) 4155/4156 GNDU 41501 16494A-001 or 002 (Total 24ea.) Agilent E5250A User’s Guide, Edition 11 Shielding Box ( 9 ea.) GNDU 16495D Drain Gate Source GNDU Device24...

  • Page 283: Executing The Program

    Recommended maximum value is about 0.5 V below actual breakdown. Then, edit the HCI test program (SP_MUX in this example) , and define the Vdstr value. The value should be defined in the following program line. Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program...
  • Page 284 Executing Sample Programs HCI Measurement Program !-- Drain stress voltage should be determined by Id-Vd charact eristics Vdstr=5 After defining the value, re-store the program. Figure 9-5 Id-Vds Measurement Example 9-28 ! Drain stress voltage Agilent E5250A User’s Guide, Edition 11...
  • Page 285 Then, stress/interim characterization cycle is executed until stress termination conditions are met as described previously. In each interim characterization, Idlin, Gmmax, Vtext, and Vtci are determined. An example measurement is shown in Figure 9-7. Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program key. After...
  • Page 286 After testing, the test result data is saved to the diskette in the computer's disk drive, and the following message is displayed. "HCI Degradation Test is Completed!!" Figure 9-6 Example of Ib-Vgs Measurement Results 9-30 Agilent E5250A User’s Guide, Edition 11...
  • Page 287 Figure 9-7 Initial/Interim Characterization Example Figure 9-8 HCI Degradation Test Result Example Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program 9-31...
  • Page 288 Tdc is the "time to target". The SP_MUX_A program extracts Tdc from the measurement data that was saved by SP_MUX program. Tdc is the time when the device parameter reached its termination condition. 9-32 MSI "/test_data" description Agilent E5250A User’s Guide, Edition 11...
  • Page 289 And program pauses. This step is repeated according to entered number of devices and selected softkey. Figure 9-9 HCI Degradation Test Data Analysis Example Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program 9-33...
  • Page 290 For the above, 0 means valid and 1 means invalid. Following is an actual example for this case: 5, 1.95, 1.E-6, 1.E-5 Idlin Device Validity Tdc_idlin 1, 0, 835.5786 2, 0, 3401.432 3, 0, 6269.047 4, 0, 24366.79 Averaged Tdc_idlin 8718.2119 9-34 Agilent E5250A User’s Guide, Edition 11...

  • Page 291: Modifying The Program

    To change the GPIB address of the instruments, change the following parameters in the "GPIB Setup" block. Parameter Hpib_sc 4155/4156 GPIB select code Hpib_addr 4155/4156 GPIB address Swm_sc E5250A GPIB select code Swm_addr E5250A GPIB address Agilent E5250A User’s Guide, Edition 11 Executing Sample Programs HCI Measurement Program Description Default 9-35...
  • Page 292 3. Change the following parameters in the "Device geometries" block of program. Parameter Gate_length Gate length in m. Gate_width Gate width in m. 9-36 Description "IBVG.MES" "IGLEAK.MES" "IDLEAK.MES" "PARAM.MES" Description Default 1.E-6 1.E-5 Agilent E5250A User’s Guide, Edition 11 Default...
  • Page 293 Meas_points in the DATA statements. In the above example, the number of data in DATA statements is 13. So the variable for the above example must be set as follows. Meas_points=13 Agilent E5250A User’s Guide, Edition 11 9-37...
  • Page 294 • Save_at_last=0: Saves the data after each parameter measurement. • Save_at_last=1: Saves the data after HCI test is completely finished. For this parameter, the default is 1. 9-38 Description Description Agilent E5250A User’s Guide, Edition 11 Default 2.E-10 1.E-8 Default...

  • Page 295: Specifications

    Specifications...
  • Page 296 The typical data and supplemental data are not warranted, but provide useful information about functions and performance. If not noted otherwise, the conditions for specifications and other data are as follows: Temperature: 23 °C ± 5 °C Humidity: < 60 % RH 10-2 Agilent E5250A User’s Guide, Edition 11...

  • Page 297: General Specifications

    General I-V Port: 4 C-V Port: 2 HF Port: 2 Output Channels: 12 Number of Ports Low Leakage I-V Port: 3 with option 501 Bias Port: 3 Output Channels: 24 (8 × 3) Agilent E5250A User’s Guide, Edition 11 Specifications General Specifications 10-3...

  • Page 298: Switch Specifications

    Channel Isolation Resistance (Ω) Low Leakage I-V Port General I-V Port C-V Port, HF Port 10-4 5 × 10 5 × 10 5 × 10 Agilent E5250A User’s Guide, Edition 11 2 × 10 2 × 10 2 × 10...
  • Page 299 Settling Time < 3.5 sec to settle to within 400 fA of final value after 10 V is applied (Low Leakage I-V Port) Agilent E5250A User’s Guide, Edition 11 Option 001 Matrix Switch < 0.1 pA (Low Leakage I-V Port) <...
  • Page 300 Low Leakage I-V Port BIAS Port a. When 0 Ω resistors are mounted on the card as the protective resis- tor. 10-6 5 × 10 5 × 10 Agilent E5250A User’s Guide, Edition 11 2 × 10 2 × 10...
  • Page 301 Settling Time: < 3.5 sec to settle to within 400 fA of final value after 10 V is applied (Low Leakage I-V Port) Agilent E5250A User’s Guide, Edition 11 Option 501 Multiplexer < 0.1 pA (Low Leakage I-V Port) < 5 pF per channel (Bias Port) <...
  • Page 302 5 °C to 40 °C for connector part −50 °C to 200 °C for cable part −40 °C to 70 °C 5 % to 80 % RH, non-condensing 5 % to 90 % RH at 65 °C Agilent E5250A User’s Guide, Edition 11...
  • Page 303 1 nA 4 pA + (0.2 × Vout) pA 10 nA 40 pA + (0.3 × Vout) pA 100 nA Agilent E5250A User’s Guide, Edition 11 Specifications Measurement 780 μV + (0.5 × Iout) V Measurement 3 pA + (0.2 × Vout) pA 5 pA + (0.2 ×...
  • Page 304 Specifications Supplemental Data when used with Agilent 4155/4156 10-10 Agilent E5250A User’s Guide, Edition 11...

  • Page 305: Error Messages

    Error Messages...
  • Page 306 Error Messages This chapter lists and describes the error messages for Agilent E5250A. An error message consists of an error number and message. There are two types of error messages: • Standard SCPI Error Messages Negative error numbers (Command Error, Execution Error, Device-Dependent Error, and Query Error) are standard SCPI errors.
  • Page 307 Syntax error -102 An unrecognized command or data type was received; for example, a string was received when the E5250A does not accept strings. Agilent E5250A User’s Guide, Edition 11 Error Messages Standard SCPI Error Messages 11-3...
  • Page 308 Program mnemonic too long -112 A keyword in the command header contains more than twelve characters. Undefined header -113 An undefined command header was received; for example, *XYZ or :ROUT:OPEN:COOD. 11-4 Agilent E5250A User’s Guide, Edition 11...
  • Page 309 Either the character parameter contains an invalid character or the particular element received is not valid for the command. Character data too long -144 The character parameter contains more than 12 characters. Agilent E5250A User’s Guide, Edition 11 Error Messages Standard SCPI Error Messages 11-5...
  • Page 310 E5250A cannot determine more specific errors -171 and -178. Invalid expression -171 The expression was invalid; for example, unmatched parentheses or an illegal character. Expression data not allowed -178 An expression was received but was not allowed at this point. 11-6 Agilent E5250A User’s Guide, Edition 11...
  • Page 311 A valid parameter setting (where exact value from list of possibles was expected) could not be executed due to present E5250A state. Expression error -260 An expression related error occurred. Agilent E5250A User’s Guide, Edition 11 Error Messages Standard SCPI Error Messages 11-7...
  • Page 312 If error queue is full, this code is entered into the error queue instead of the code that caused the error. This code indicates that there was no room in the error queue, so an error occurred but was not recorded. 11-8 Agilent E5250A User’s Guide, Edition 11...
  • Page 313 Query UNTERMINATED after indefinite response -440 A query was received in the same program message after a query requesting an indefinite length response was executed. Agilent E5250A User’s Guide, Edition 11 Error Messages Standard SCPI Error Messages 11-9...
  • Page 314 For these errors, an error number and message are placed in the error queue, and bit3 of the Standard Event Status Register is set. The E5250A specific error messages have positive error numbers. 11-10 Agilent E5250A User’s Guide, Edition 11...
  • Page 315 Invalid channel range Wrong channel list is defined. Confirm the syntax of the channel list, the card configuration, and the configuration mode of the E5250A. Agilent E5250A User’s Guide, Edition 11 E5250A Specific Error Messages Error Message and Description Error Messages...
  • Page 316 For the Input Port No. for Couple Port, only 1, 3, 5, 7, or 9 are allowed. 3012 Bad bias port number For Input Port No. for Bias Port, only 1 to 10 are allowed. 11-12 Agilent E5250A User’s Guide, Edition 11...
  • Page 317 Cannot use same port for Couple and Bias Same input port number is specified to be Couple Port and Bias Port. Couple Port and Bias Port cannot be the same port. Agilent E5250A User’s Guide, Edition 11 Error Messages E5250A Specific Error Messages...
  • Page 318 Error Messages E5250A Specific Error Messages 11-14 Agilent E5250A User’s Guide, Edition 11...
  • Page 319 SCPI Command Summary...
  • Page 320 SCPI Command Summary This chapter is a quick reference for the SCPI subsystem commands available for Agilent E5250A. The commands are in alphabetical order. For details about these commands, see Chapter 7. For how to specify the channel_list parameter, see Chapter 5.
  • Page 321 :DIAG:TEST:FRAM[:EXEC]? unit :DIAG:TEST:FRAM:STAT? unit [:ROUT]:BIAS:CHAN:DIS:CARD card_number [:ROUT]:BIAS:CHAN:DIS[:LIST] (@channel_list) [:ROUT]:BIAS:CHAN:DIS[:LIST]? (@channel_list) Agilent E5250A User’s Guide, Edition 11 SCPI Command Summary Description Clears relay test result (pass/fail) of specified card. card_number: 1, 2, 3, 4, or ALL Executes relay test, then returns result:...
  • Page 322 OFF or 0: turn OFF Bias Mode Returns the Bias Mode for the specified card. 0: Bias Mode is OFF, 1: Bias Mode is ON. card_number: For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, 4 Agilent E5250A User’s Guide, Edition 11...
  • Page 323 [:ROUT]:CLOS[:LIST] (@channel_list) [:ROUT]:CLOS[:LIST]? (@channel_list) [:ROUT]:CONN:RULE card_number,rule [:ROUT]:CONN:RULE? card_number [:ROUT]:CONN:SEQ card_number,sequence Agilent E5250A User’s Guide, Edition 11 SCPI Command Summary Description Returns channel_list of all closed channels for the specified card. "Closed channel" means an input port connected to an output port.
  • Page 324 Only for the E5252A card. card_number: For Auto Config mode: 0 or ALL For Normal Config mode: 1, 2, 3, 4, or ALL state: ON or 1: turn ON Couple Mode OFF or 0: turn OFF Couple Mode Agilent E5250A User’s Guide, Edition 11...
  • Page 325 [:ROUT]:COUP[:STAT]? card_number [:ROUT]:FUNC channel_config [:ROUT]:FUNC? [:ROUT]:OPEN:CARD card_number [:ROUT]:OPEN[:LIST] (@channel_list) [:ROUT]:OPEN[:LIST]? (@channel_list) :SYST:CCON? card_number Agilent E5250A User’s Guide, Edition 11 SCPI Command Summary Description Returns Couple Mode of specified card. 0: Couple Mode is OFF 1: Couple Mode is ON. card_number:...
  • Page 326 For Auto Config mode: 0 For Normal Config mode: 1, 2, 3, or 4 Reads error from head of error queue, and removes that error from queue. Returns SCPI version number for which the E5250A complies. Agilent E5250A User’s Guide, Edition 11...

This manual is also suitable for:

Agilent e5252aAgilent e5255a

Table of Contents