Table 9-1
Vth and Capacitance Measurement Program
This section introduces and explains how to use and modify the Vth and
Capacitance measurement program. This section consists of the following sections:
•
"Introduction"
•
"Setting up the Measurement Environment"
•
"Executing the Program"
•
"Modifying the Program"
Introduction
This program measures the parameters of the devices shown in Table 9-1 by using
the Agilent 4155/4156 Semiconductor Parameter Analyzer, the Agilent 4284A
Precision LCR Meter, and the Agilent E5250A with the E5252A card.
The program flow is shown in Table 9-2. In this program, the 4155/4156 is set up by
loading the 4155/4156 setup file E5252.MES, which is saved on the E5250A
Program Disk. So, the program disk must be in the 4155/4156's disk drive when you
execute the program.
Devices and Parameters Measured
Device
N-channel MOSFET
Capacitor
Agilent E5250A User's Guide, Edition 11
Vth and Capacitance Measurement Program
No. of
Measurement
Devices
Parameter
Measured
1
Threshold Voltage (Vth)
1
Capacitance
Executing Sample Programs
Instrument
Used
4155/4156
4284A
9-3